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The recent realization of millisecond-scale coherence with tantalum-on-silicon transmon qubits showed that depositing the Al/AlOx/Al Josephson junction in a high purity, ultrahigh vacuum environment was critical for achieving…

We demonstrate a three-dimensional fin lithium niobate (FinLN) acoustic resonator fabricated from thick lithium niobate on insulator using deep ion etching and sidewall electrode patterning. The FinLN geometry enables strong…

Applied Physics · Physics 2026-01-27 Haorui Ni , Sunil Bhave

This work reports an acoustic filter at 23.5 GHz with a low insertion loss (IL) of 2.38 dB and a 3-dB fractional bandwidth (FBW) of 18.2%, significantly surpassing the state-of-the-art. The device leverages electrically coupled acoustic…

Signal Processing · Electrical Eng. & Systems 2023-11-07 Omar Barrera , Sinwoo Cho , Lezli Matto , Jack Kramer , Kenny Huynh , Vakhtang Chulukhadze , Yen-Wei Chang , Mark S. Goorsky , Ruochen Lu

An apparatus was developed to obtain, for the first time, 2D maps of the surface resistance of the inner surface of an operating superconducting radio-frequency niobium cavity by a low-temperature laser scanning microscopy technique. This…

Surface properties are critical to the capabilities of superconducting microwave devices. The native oxide of niobium-based devices is thought to consist of a thin normal conducting layer. To improve understanding on the importance of this…

Superconductivity · Physics 2023-10-10 Thomas Oseroff , Zeming Sun , Matthias Liepe

Thin-film lithium niobate (TFLN) in the form of x- or z-cut lithium-niobate-on-insulator (LNOI) has recently popped up as a very promising and novel platform for developing integrated optoelectronic (nano)devices and exploring fundamental…

Thin V2O3 films were deposited on a piezoelectric substrate by electron-beam evaporation. Surface acoustic waves (SAW) were generated by interdigital-transducers (IDTs). The attenuation and sound velocity was investigated from 260K to 10K,…

Strongly Correlated Electrons · Physics 2007-05-23 C. Mueller , A. A. Nateprov , G. Obermeier , M. Klemm , R. Tidecks , A. Wixforth , S. Horn

In display technologies or data processing, planar and subwavelength free-space components suited for flat photonic devices are needed. Metasurfaces, which shape the optical wavefront within hundreds of nanometers, can provide a solution…

Acousto-optic modulation in photonic integrated circuits harness the applications that include signal processing, quantum photonics and microwave photonics. However, silicon nitride ($\rm{Si_3N_4}$), as a main-stream low-loss scalable…

In this work, we have successfully engineered and examined suspended laterally vibrating resonators (LVRs) on a lithium niobate thin film on lithium niobate carrier wafer (LN-on-LN) platform, powered by aluminum interdigital transducers…

Applied Physics · Physics 2023-07-10 Yiyang Feng , Sen Dai , Sunil A. Bhave

Lithium niobate (LN) is an excellent nonlinear optical and electro-optic material that has found many applications in classical nonlinear optics, optical fiber communications and quantum photonics. Here we review the recent development of…

Applied Physics · Physics 2020-12-11 Cheng Wang , Mian Zhang , Marko Lončar

Thin-film lithium niobate is an attractive integrated photonics platform due to its low optical loss and favorable optical nonlinear and electro-optic properties. However, in applications such as second harmonic generation, frequency comb…

Optics · Physics 2021-02-24 Yuntao Xu , Mohan Shen , Juanjuan Lu , Joshua Surya , Ayed Al Sayem , Hong X. Tang

We present microwave-frequency NbTiN resonators on silicon, systematically achieving internal quality factors above 1 M in the quantum regime. We use two techniques to reduce losses associated with two-level systems: an additional substrate…

Superconductivity · Physics 2015-07-15 A. Bruno , G. de Lange , S. Asaad , K. L. van der Enden , N. K. Langford , L. DiCarlo

We characterize low-loss electron-beam evaporated niobium thin films deposited under ultra-high vacuum conditions. Slow deposition yields films with a high superconducting transition temperature ($9.20 \pm 0.06 \rm ~K$) as well as a…

Connecting nanoscale mechanical resonators to microwave quantum circuits opens new avenues for storing, processing, and transmitting quantum information. In this work, we couple a phononic crystal cavity to a tunable superconducting quantum…

Thin-film lithium niobate (TFLN) has emerged as a versatile integrated photonics platform, combining strong electro-optic and nonlinear effects. Among TFLN devices, ring resonators play a central role in filtering, modulation, and nonlinear…

Optics · Physics 2026-04-03 Xinrui Zhu , Hana K. Warner , Yunxiang Song , Donald Witt , Marko Loncar

Recent advances in the processing of thin-film LNOI have enabled low-loss photonic integrated circuits, modulators with improved half-wave voltage, electro-optic frequency combs and novel on-chip electro-optic devices, with applications…

Superconducting qubits have emerged as a potentially foundational platform technology for addressing complex computational problems deemed intractable with classical computing. Despite recent advances enabling multiqubit designs that…

Lithium niobate (LN) based devices are widely used in integrated and nonlinear optics. This material is robust and resistive to high temperatures, which makes the LN-based devices table, but challenging to fabricate. In this work we report…

The performance of superconducting microwave circuits is strongly influenced by the material properties of the superconducting film and substrate. While progress has been made in understanding the importance of surface preparation and the…

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