Related papers: High Density Fabrication Process for Single Flux Q…
Superconducting qubits in today's quantum processing units are typically fabricated with angle-evaporated aluminum--aluminum-oxide--aluminum Josephson junctions. However, there is an urgent need to overcome the limited reproducibility of…
We have observed coherent time evolution between two quantum states of a superconducting flux qubit comprising three Josephson junctions in a loop. The superposition of the two states carrying opposite macroscopic persistent currents is…
Superconducting circuits can exhibit quantized energy levels and long coherence times. Harnessing the anharmonicity offered by Josephson junctions, such circuits have been successfully employed as qubits, quantum limited amplifiers and…
To increase density of superconductor digital and neuromorphic circuits by 10x and reach integration scale of $10^8$ Josephson junctions (JJs) per chip, we developed a new fabrication process on 200-mm wafers, using self-shunted…
Josephson tunnel junctions are the centerpiece of almost any superconducting electronic circuit, including qubits. Typically, the junctions for qubits are fabricated using shadow evaporation techniques to reduce dielectric loss…
We have demonstrated strong antiferromagnetic coupling between two three-junction flux qubits based on a shared Josephson junction, and therefore not limited by the small inductances of the qubit loops. The coupling sign and magnitude were…
Single flux quantum (SFQ) technology has garnered significant attention due to its low switching power and high operational speed. Researchers have been actively pursuing more advanced devices and technologies to further reduce the reliance…
We report the fabrication of strongly coupled nanohybrid superconducting junctions using PbS semiconductor nanowires and Pb0.5In0.5 superconducting electrodes. The maximum supercurrent in the junction reaches up to ~15 \mu A at 0.3 K, which…
The non-dissipative non-linearity of a Josephson junction converts macroscopic superconducting circuits into artificial atoms, enabling some of the best controlled quantum bits (qubits) today. Three fundamental types of superconducting…
Josephson junctions constructed from superconductor-semiconductor-superconductor heterostructures have been used to realize a variety of voltage-tunable superconducting quantum devices, including qubits and parametric amplifiers. To date…
A fabrication process for Nb/Al-AlOx/Nb Josephson junctions (JJs) with sizes down to 200 nm has been developed on a 200-mm-wafer tool set typical for CMOS foundry. This process is the core of several nodes of a roadmap for fully-planarized…
Fabrication of sub-micron Josephson junctions is demonstrated using standard processing techniques for high-coherence, superconducting qubits. These junctions are made in two separate lithography steps with normal-angle evaporation. Most…
The reproducibility of qubit parameters is a challenge for scaling up superconducting quantum processors. Signal crosstalk imposes constraints on the frequency separation between neighboring qubits. The frequency uncertainty of transmon…
Josephson junctions are the principal circuit element in numerous superconducting quantum information devices and can be readily integrated into large-scale electronics. However, device integration at the wafer scale necessarily depends on…
Josephson junctions are essential devices in superconducting electronics and quantum computing hardware. Here we predict electrical control of the supercurrent in composite superconductor-insulator-ferroelectric-insulator-superconductor…
Josephson tunnel junctions form the basis for various superconducting electronic devices. For this reason, enormous efforts are routinely taken to establish and later on maintain a scalable and reproducible wafer-scale manufacturing process…
Arrays of Vortex Transitional (VT) memory cells with functional density up to $1 Mbit/cm^2$ have been designed, fabricated, and successfully demonstrated. This progress is due to recent advances in design optimization and in superconductor…
Josephson junction transistors and 50-junction arrays with linear junction dimensions from 200 nm down to 70 nm were fabricated from standard Nb/AlOx/Nb trilayers. The fabrication process includes electron beam lithography, dry etching,…
Josephson junctions (JJs) with Josephson energy $E_J \lesssim 1K$ are widely employed as non-linear elements in superconducting circuits for quantum computing, operating at milli-Kelvin temperatures. Here we experimentally study incoherent…
A variety of superconductor integrated circuits comprising six ac-powered SFQ shift registers with a total of 27078 bits and 108500 Josephson junctions (JJs) per 5 mm x 5 mm chip have been designed, fabricated, and tested to characterize…