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The characterization of nanostructured surfaces with sensitivity in the sub-nm range is of high importance for the development of current and next generation integrated electronic circuits. Modern transistor architectures for e.g. FinFETs…

A method for automatic computation of parameter derivatives of numerically computed light scattering signals is demonstrated. The finite-element based method is validated in a numerical convergence study, and it is applied to investigate…

Optics · Physics 2013-04-17 S. Burger , L. Zschiedrich , J. Pomplun , F. Schmidt , B. Bodermann

Parameter reconstruction is a common problem in optical nano metrology. It generally involves a set of measurements, to which one attempts to fit a numerical model of the measurement process. The model evaluation typically involves to solve…

Computational Physics · Physics 2021-07-13 Matthias Plock , Sven Burger , Philipp-Immanuel Schneider

Machine learning (ML) has employed various discretization methods to partition numerical attributes into intervals. However, an effective discretization technique remains elusive in many ML applications, such as association rule mining.…

Machine Learning · Computer Science 2023-11-07 Minakshi Kaushik , Rahul Sharma , Dirk Draheim

When using the finite element method (FEM) in inverse problems, its discretization error can produce parameter estimates that are inaccurate and overconfident. The Bayesian finite element method (BFEM) provides a probabilistic model for the…

Numerical Analysis · Mathematics 2026-01-26 Anne Poot , Iuri Rocha , Pierre Kerfriden , Frans van der Meer

Optical scatterometry is a method to measure the size and shape of periodic micro- or nanostructures on surfaces. For this purpose the geometry parameters of the structures are obtained by reproducing experimental measurement results…

Computational Physics · Physics 2020-06-24 Philipp-Immanuel Schneider , Martin Hammerschmidt , Lin Zschiedrich , Sven Burger

We consider a fractional plasticity model based on linear isotropic and kinematic hardening as well as a standard von-Mises yield function, where the flow rule is replaced by a Riesz--Caputo fractional derivative. The resulting mathematical…

Numerical Analysis · Mathematics 2025-04-14 Michael Feischl , David Niederkofler , Barbara Wohlmuth

This paper deals with estimating model parameters in graphical models. We reformulate it as an information geometric optimization problem and introduce a natural gradient descent strategy that incorporates additional meta parameters. We…

Machine Learning · Computer Science 2019-05-15 Eric Benhamou , Jamal Atif , Rida Laraki , David Saltiel

In this paper, gradient-based optimization methods are combined with finite-element modeling for improving electric devices. Geometric design parameters are considered by affine decomposition of the geometry or by the design element…

Image reconstruction in X-ray tomography is an ill-posed inverse problem, particularly with limited available data. Regularization is thus essential, but its effectiveness hinges on the choice of a regularization parameter that balances…

Computer Vision and Pattern Recognition · Computer Science 2026-02-11 Chuyang Wu , Samuli Siltanen

Practical diffusion sampling is a numerical approximation problem: under a fixed inference budget, one must simulate a reverse-time ODE or SDE using only a limited number of denoising steps, so discretization error is often the dominant…

Machine Learning · Computer Science 2026-05-12 Samuel Hurault , Thomas Moreau , Gabriel Peyré

The capability of discretization of matrix elements in the problem of quadratic functional minimization with linear member built on matrix in N-dimensional configuration space with discrete coordinates is researched. It is shown, that…

Neural and Evolutionary Computing · Computer Science 2012-05-04 Boris Kryzhanovsky , Mikhail Kryzhanovsky , Magomed Malsagov

Graphical models are useful tools for describing structured high-dimensional probability distributions. Development of efficient algorithms for learning graphical models with least amount of data remains an active research topic.…

Machine Learning · Computer Science 2021-11-18 Marc Vuffray , Sidhant Misra , Andrey Y. Lokhov

Parameter reconstructions are indispensable in metrology. Here, the objective is to to explain $K$ experimental measurements by fitting to them a parameterized model of the measurement process. The model parameters are regularly determined…

Computational Physics · Physics 2022-10-17 Matthias Plock , Kas Andrle , Sven Burger , Philipp-Immanuel Schneider

We perform extended studies of an adaptive finite element method applied to the reconstruction of shapes of buried objects from experimental backscattering data. We use experimental data which are collected by a microwave scattering…

Numerical Analysis · Mathematics 2015-03-05 Larisa Beilina , Nguyen Trung Thành , Michael V. Klibanov , John Bondestam Malmberg

We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where we take into account a priori information and measurement…

Computational Physics · Physics 2017-07-27 M. Hammerschmidt , M. Weiser , X. Garcia Santiago , L. Zschiedrich , B. Bodermann , S. Burger

The modeling of damage processes in materials constitutes an ill-posed mathematical problem which manifests in mesh-dependent finite element results. The loss of ellipticity of the discrete system of equations is counteracted by…

Computational Engineering, Finance, and Science · Computer Science 2021-02-18 Philipp Junker , Johannes Riesselmann , Daniel Balzani

We consider inverse problems estimating distributed parameters from indirect noisy observations through discretization of continuum models described by partial differential or integral equations. It is well understood that the errors…

Numerical Analysis · Mathematics 2023-10-09 Albero Bocchinfuso , Daniela Calvetti , Erkki Somersalo

The paper studies several approaches to numerical integration over a domain defined implicitly by an indicator function such as the level set function. The integration methods are based on subdivision, moment--fitting, local…

Numerical Analysis · Mathematics 2016-01-26 Maxim Olshanskii , Danil Safin

For nonlinear reduced-order models, especially for those with non-polynomial nonlinearities, the computational complexity still depends on the dimension of the original dynamical system. As a result, the reduced-order model loses its…

Numerical Analysis · Mathematics 2013-04-30 Zhu Wang
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