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We implemented, optimized and fully tested over multiple runs a superconducting Josephson junction fabrication process tailored for the integrated digital circuits that are used for control and readout of superconducting qubits operating at…

Superconducting junctions with a ferromagnet as the weak link, where triplet correlations can transport supercurrents over a substantial distance, have been of long-standing interest. In this work, we study the triplet transport in planar…

Superconductivity · Physics 2024-04-25 Junxiang Yao , Jan Aarts

The application of in-plane magnetic fields to Josephson junctions enables fundamental exploration of quantum phenomena, including Zeeman-driven 0-$\pi$ transitions and planar topological superconductivity. However, intrinsic orbital…

We present a way to We present a way to fabricate bicrystal Josephson junctions of high-Tc cuprate superconductors that does not require bulk bicrystalline substrates. Based on vector substrate technology, this novel approach makes use of a…

Vertical integration of superconducting electronics requires fabrication strategies that preserve pristine interfaces while accommodating oxidation-sensitive elemental superconductors. However, existing van der Waals-based vertical…

We have developed a combined photolithography and electron-beam lithography fabrication process for sub-\mum to \mum-size Nb/Al-AlOx/Nb Josephson junctions. In order to define the junction size and protect its top electrode during anodic…

Superconductivity · Physics 2011-02-14 Christoph Kaiser , J. M. Meckbach , K. Ilin , J. Lisenfeld , R. Schäfer , A. V. Ustinov , M. Siegel

Ion beam damage combined with nanoscale focused ion beam direct milling was used to create manufacturable SNS type Josephson junctions in 100 nm thick MgB$_{2}$ with T$_{C}$ of 38 K. The junctions show non-hysteretic current - voltage…

Superconductivity · Physics 2018-07-04 D. -J. Kang , N. H. Peng , R. Webb , C. Jeynes , J. H. Yun , S. H. Moon , D. Oh , G. Burnell , E. J. Tarte , D. F. Moore , M. G. Blamire

Hybrid InSb nanowire-superconductor devices are promising for investigating Majorana modes and topological quantum computation in solid-state devices. An experimental realisation of ballistic, phase-coherent superconductor-nanowire hybrid…

Mesoscale and Nanoscale Physics · Physics 2016-04-25 S. Li , N. Kang , D. X. Fan , L. B. Wang , Y. Q. Huang , P. Caroff , H. Q. Xu

A minimal method to fabricate Al/AlO$_x$/Al Josephson junctions (JJs) using photolithography and argon etching, before metallization and oxidation, is demonstrated. JJs with areas ranging from 1 to 6 $\mu$m$^2$ can be fabricated and, with…

Quantum Physics · Physics 2026-04-30 Imran Mahboob , Satoshi Sasaki , Takaaki Takenaka

A fabrication process for Nb/Al-AlOx/Nb Josephson junctions (JJs) with sizes down to 200 nm has been developed on a 200-mm-wafer tool set typical for CMOS foundry. This process is the core of several nodes of a roadmap for fully-planarized…

Modern Superconducting QUantum Interference Devices (SQUIDs) are commonly fabricated from either Al or Nb electrodes, with an in-situ oxidation process to create a weak link between them. However, common problems of such planar nano- and…

Superconductivity · Physics 2021-08-18 Liam S. Farrar , Aimee Nevill , Zhen Jieh Lim , Geetha Balakrishnan , Sara Dale , Simon J. Bending

We report on experiments with superconducting metamaterials containing Josephson junctions. In these structures, split-ring resonators used in conventional metamaterials are replaced by superconducting loops that are interrupted by…

Superconductivity · Physics 2013-05-01 Philipp Jung , Susanne Butz , Sergey V. Shitov , Alexey V. Ustinov

Here we report a novel nitridation technique for transforming niobium into hexagonal Nb2N which appears to be superconducting below 1K. The nitridation is achieved by high temperature annealing of Nb films grown on Si3N4/Si (100) substrate…

The transparent interface in epitaxial Al-InAs heterostructures provides an excellent platform for potential advances in mesoscopic and topological superconductivity. Semiconductor-based Josephson Junction Field Effect Transistors (JJ-FETs)…

In this letter, we demonstrate for the first time the creation of Josephson-like superconducting nanojunctions using a thermal scanning probe to directly inscribe weak links into microstrips of YBa2Cu3O7-x (YBCO). Our method effectively…

We are developing a superconductor electronics fabrication process with up to nine planarized superconducting layers, stackable stud vias, self-shunted Nb/AlOx-Al/Nb Josephson junctions, and one layer of MoNx kinetic inductors. The minimum…

Superconducting quantum circuits provide a versatile platform for studying quantum materials by leveraging precise microwave control and utilizing the tools of circuit quantum electrodynamics (QED). Hybrid circuit devices incorporating…

Mesoscale and Nanoscale Physics · Physics 2025-06-24 Sheng-Wen Huang , Ramya Suresh , Jian Liao , Botao Du , Zachary Miles , Leonid P. Rokhinson , Yong P. Chen , Ruichao Ma

We present ferromagnetic Nb/Al2O3/Ni60Cu40/Nb Josephson junctions (SIFS) with an ultrathin Al2O3 tunnel barrier. The junction fabrication was optimized regarding junction insulation and homogeneity of current transport. Using…

Superconductivity · Physics 2007-05-23 M. Weides , K. Tillmann , H. Kohlstedt

High-quality free-standing InAs nanosheets are emerging layered semiconductor materials with potentials in designing planar Josephson junction devices for novel physics studies due to their unique properties including strong spin-orbit…

Mesoscale and Nanoscale Physics · Physics 2023-08-09 Shili Yan , Haitian Su , Dong Pan , Weijie Li , Zhaozheng Lyu , Mo Chen , Xingjun Wu , Li Lu , Jianhua Zhao , Ji-Yin Wang , H. Q. Xu

Bias lines routed over a ground plane naturally form microstrip lines associated with the presence of a capacitance. This can lead to unwanted resonances when coupled to Josephson junctions. This work presents an electrical model of a…

Applied Physics · Physics 2023-07-19 Ugur Yilmaz , Sasan Razmkhah , Romain Collot , Juergen Kunert , Ronny Stolz , Pascal Febvre