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Strain engineering is used to obtain desirable materials properties in a range of modern technologies. Direct nanoscale measurement of the three-dimensional strain tensor field within these materials has however been limited by a lack of…

High-throughput grain mapping with sub-nanometer spatial resolution is demonstrated using scanning nanobeam electron diffraction (also known as 4D scanning transmission electron microscopy, or 4D-STEM) combined with high-speed direct…

All materials are made from atoms arranged either in repeating (crystalline) or in random (amorphous) structures. Diffraction measurements probe average distances between atoms and/or planes of atoms. A transmission electron microscope in…

Materials Science · Physics 2025-07-24 Andreas Werbrouck , Nikhila C. Paranamana , Xiaoqing He , Matthias J. Young

Characterisation of rare microstructural features in scanning electron microscopy (SEM) requires imaging large areas at high resolution. This leads to prohibitively long acquisition times. We present an open-source Python framework that…

Scanning transmission electron microscopy (STEM) has become a cornerstone instrument for semiconductor materials metrology, enabling nanoscale analysis of complex multilayer structures that define device performance. Developing effective…

Automated experimentation with real time data analysis in scanning transmission electron microscopy (STEM) often require end-to-end framework. The four-dimensional scanning transmission electron microscopy (4D-STEM) with high-throughput…

Computer Vision and Pattern Recognition · Computer Science 2025-08-26 Mingyu Liu , Zian Mao , Zhu Liu , Haoran Zhang , Jintao Guo , Xiaoya He , Xi Huang , Shufen Chu , Chun Cheng , Jun Ding , Yujun Xie

The scanning electron microscope (SEM) produces an image of a sample by scanning it with a focused beam of electrons. The electrons interact with the atoms in the sample, which emit secondary electrons that contain information about the…

Computer Vision and Pattern Recognition · Computer Science 2017-09-08 Shahar Tsiper , Or Dicker , Idan Kaizerman , Zeev Zohar , Mordechai Segev , Yonina C. Eldar

Despite their success, unsupervised domain adaptation methods for semantic segmentation primarily focus on adaptation between image domains and do not utilize other abundant visual modalities like depth, infrared and event. This limitation…

Computer Vision and Pattern Recognition · Computer Science 2024-10-30 Ruihao Xia , Yu Liang , Peng-Tao Jiang , Hao Zhang , Bo Li , Yang Tang , Pan Zhou

The robust and automated determination of crystal symmetry is of utmost importance in material characterization and analysis. Recent studies have shown that deep learning (DL) methods can effectively reveal the correlations between X-ray or…

Computational Physics · Physics 2020-05-27 Leslie Ching Ow Tiong , Jeongrae Kim , Sang Soo Han , Donghun Kim

We present a few recent developments in the field of electron backscatter diffraction (EBSD). We highlight how open source algorithms and open data formats can be used to rapidly to develop microstructural insight of materials. We include…

Computational Physics · Physics 2019-08-15 Alex Foden , Alessandro Previero , Thomas Benjamin Britton

The robust approach for real-time analysis of the scanning transmission electron microscopy (STEM) data streams, based on the ensemble learning and iterative training (ELIT) of deep convolutional neural networks, is implemented on an…

Disordered Systems and Neural Networks · Physics 2022-07-27 Kevin M. Roccapriore , Matthew G. Boebinger , Ondrej Dyck , Ayana Ghosh , Raymond R. Unocic , Sergei V. Kalinin , Maxim Ziatdinov

Preparing training data for deep vision models is a labor-intensive task. To address this, generative models have emerged as an effective solution for generating synthetic data. While current generative models produce image-level category…

Computer Vision and Pattern Recognition · Computer Science 2023-11-14 Quang Nguyen , Truong Vu , Anh Tran , Khoi Nguyen

Precision in identifying nanometer-scale device-killer defects is crucial in both semiconductor research and development as well as in production processes. The effectiveness of existing ML-based approaches in this context is largely…

Computer Vision and Pattern Recognition · Computer Science 2024-07-16 Bappaditya Dey , Vic De Ridder , Victor Blanco , Sandip Halder , Bartel Van Waeyenberge

Breast tumor segmentation is a critical task in computer-aided diagnosis (CAD) systems for breast cancer detection because accurate tumor size, shape and location are important for further tumor quantification and classification. However,…

Image and Video Processing · Electrical Eng. & Systems 2020-09-29 Bryar Shareef , Alex Vakanski , Min Xian , Phoebe E. Freer

Serial electron diffraction (SerialED) is an emerging technique, which applies the snapshot data-collection mode of serial X-ray crystallography to three-dimensional electron diffraction (3D ED), forgoing the conventional rotation method.…

Data Analysis, Statistics and Probability · Physics 2020-11-06 Robert Bücker , Pascal Hogan-Lamarre , R. J. Dwayne Miller

The technique known as 4D-STEM has recently emerged as a powerful tool for the local characterization of crystalline structures in materials, such as cathode materials for Li-ion batteries or perovskite materials for photovoltaics. However,…

Despite decades of research, the ultimate goal of nanotechnology--top-down manipulation of individual atoms--has been directly achieved with only one technique: scanning probe microscopy. In this Review, we demonstrate that scanning…

Amorphous solids exhibit structural short-range order despite lacking long-range crystalline order, with this structural descriptor found to be important for determining mechanical properties. Nanobeam electron diffraction offers a…

Materials Science · Physics 2026-05-21 Junjie Wu , Timothy J. Rupert

Electron microscopy is a powerful tool for visualizing the shapes of sub-nanometer objects. However, contrast is not in proportional to density distribution, and therefore achieving a quantitative understanding of specimens is not…

Instrumentation and Detectors · Physics 2020-05-14 Masato Tomita , Yukinori Nagatani , Kazuyoshi Murata , Atsushi Momose

We propose a novel Graph Neural Network-based method for segmentation based on data fusion of multimodal Scanning Electron Microscope (SEM) images. In most cases, Backscattered Electron (BSE) images obtained using SEM do not contain…

Computer Vision and Pattern Recognition · Computer Science 2025-06-24 Samuel Repka , Bořek Reich , Fedor Zolotarev , Tuomas Eerola , Pavel Zemčík
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