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Epitaxial growth has become a promising route to achieve highly crystalline continuous two-dimensional layers. However, high-quality layer production with expected electrical properties is still challenging due to the defects induced by the…

Directed atomic fabrication using an aberration-corrected scanning transmission electron microscope (STEM) opens new pathways for atomic engineering of functional materials. In this approach, the electron beam is used to actively alter the…

The 4D scanning transmission electron microscopy (STEM) method has enabled mapping of the structure and functionality of solids on the atomic scale, yielding information-rich data sets containing information on the interatomic electric and…

Computational Physics · Physics 2020-09-24 Mark P. Oxley , Maxim Ziatdinov , Ondrej Dyck , Andrew R. Lupini , Rama Vasudevan , Sergei V. Kalinin

Scanning Transmission Electron Microscopy (STEM) is a critical tool for imaging the properties of materials and biological specimens at atomic scale, yet our understanding of relevant electron beam damage mechanisms is incomplete. Recent…

Signal Processing · Electrical Eng. & Systems 2025-07-02 Amir Javadi Rad , Amirafshar Moshtaghpour , Dongdong Chen , Angus I. Kirkland

Atomic-resolution scanning transmission electron microscopy (STEM) characterization requires precise tilting of the specimen to high symmetric zone axis, which is usually processed in reciprocal space by following the diffraction patterns.…

Materials Science · Physics 2024-06-04 Jiake Wei , Zhangze Xu , Wenjie Shen , Bin Feng , Ryo Ishikawa , Naoya Shibata , Yuichi Ikuhara , Xuedong Bai

In the field of transmission electron microscopy, data interpretation often lags behind acquisition methods, as image processing methods often have to be manually tailored to individual datasets. Machine learning offers a promising approach…

Image and Video Processing · Electrical Eng. & Systems 2021-07-07 C. K. Groschner , Christina Choi , M. C. Scott

The recently developed precession electron diffraction (PED) technique in scanning transmission electron microscopy (STEM) has been used to elucidate the local strain distribution and crystalline misorientation in CMOS fabricated strained…

Self-supervised learning has become a central strategy for representation learning, but the majority of architectures used for encoding data have only been validated on regularly-sampled inputs such as images, audios. and videos. In many…

Machine Learning · Statistics 2025-10-24 Yunyi Shen , Alexander Gagliano

The traditional techniques for extracting polycrystalline grain structures from microscopy images, such as transmission electron microscopy (TEM) and scanning electron microscopy (SEM), are labour-intensive, subjective, and time-consuming,…

Machine Learning · Computer Science 2025-04-22 Ahmed Sobhi Saleh , Kristof Croes , Hajdin Ceric , Ingrid De Wolf , Houman Zahedmanesh

A growing need exists for efficient and accurate methods for detecting defects in semiconductor materials and devices. These defects can have a detrimental impact on the efficiency of the manufacturing process, because they cause critical…

Computer Vision and Pattern Recognition · Computer Science 2023-08-21 Thibault Lechien , Enrique Dehaerne , Bappaditya Dey , Victor Blanco , Sandip Halder , Stefan De Gendt , Wannes Meert

This comprehensive review discusses the development of scanning electron microscopy and the application of this technology in different fields such as biology, nanobiotechnology and biomedical science. Besides being a tool for high…

Quantitative Methods · Quantitative Biology 2023-11-02 Aniruddha Acharya

The nature of stacking faults - whether intrinsic or extrinsic - plays a pivotal role in defect-mediated processes in crystalline materials. Yet, current electron microscopy techniques for their reliable analysis remain limited to either…

Scanning Transmission Electron Microscopy (STEM) coupled with Electron Energy Loss Spectroscopy (EELS) presents a powerful platform for detailed material characterization via rich imaging and spectroscopic data. Modern electron microscopes…

Instrumentation and Detectors · Physics 2024-06-18 Utkarsh Pratiush , Austin Houston , Sergei V Kalinin , Gerd Duscher

Synthetic dataset generation in Computer Vision, particularly for industrial applications, is still underexplored. Industrial defect segmentation, for instance, requires highly accurate labels, yet acquiring such data is costly and…

Computer Vision and Pattern Recognition · Computer Science 2026-01-28 Emanuele Caruso , Alessandro Simoni , Francesco Pelosin

Scanning electron microscopy (SEM) has been widely utilized in the field of materials science due to its significant advantages, such as large depth of field, wide field of view, and excellent stereoscopic imaging. However, at high…

Quantitative interpretation of transmission electron microscopy (TEM) data of crystalline specimens often requires the accurate knowledge of the local crystal orientation. A method is presented which exploits momentum-resolved scanning TEM…

On- and off-axis electron energy loss spectroscopy (EELS) is a powerful method for probing local electronic structure on single atom level. However, many materials undergo electron-beam induced transformation during the scanning…

Materials Science · Physics 2023-10-23 Kevin M. Roccapriore , Riccardo Torsi , Joshua Robinson , Sergei V. Kalinin , Maxim Ziatdinov

Electron diffraction through a thin patterned silicon membrane can be used to create complex spatial modulations in electron distributions by varying the intensity of different reflections using parameters such as crystallographic…

Accelerator Physics · Physics 2019-05-30 L. E. Malin , W. S. Graves , M. Holl , J. C. H. Spence , E. A. Nanni , R. K. Li , X. Shen , S. Weathersby

Automated experiments in 4D Scanning Transmission Electron Microscopy are implemented for rapid discovery of local structures, symmetry-breaking distortions, and internal electric and magnetic fields in complex materials. Deep kernel…

Materials Science · Physics 2022-04-22 Kevin M. Roccapriore , Ondrej Dyck , Mark P. Oxley , Maxim Ziatdinov , Sergei V. Kalinin

Electron microscopy is widely used to explore defects in crystal structures, but human detecting of defects is often time-consuming, error-prone, and unreliable, and is not scalable to large numbers of images or real-time analysis. In this…

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