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Related papers: Secondary Electron Count Imaging in SEM

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Scanning electron microscopy is a powerful tool for nanoscale imaging of organic and inorganic materials. An important metric for characterizing the limits of performance of these microscopes is the Detective Quantum Efficiency (DQE), which…

Instrumentation and Detectors · Physics 2020-08-17 Akshay Agarwal , John Simonaitis , Karl K. Berggren

Scanning Electron Microscopy (SEM) is critical in nanotechnology, materials science, and biological imaging due to its high spatial resolution and depth of focus. Signal-to-noise ratio (SNR) is an essential parameter in SEM because it…

Machine Learning · Computer Science 2025-10-10 K. S. Sim , I. Bukhori , D. C. Y. Ong , K. B. Gan

Modern science is dependent on imaging on the nanoscale, often achieved through processes that detect secondary electrons created by a highly focused incident charged particle beam. Multiple types of measurement noise limit the ultimate…

Scanning electron microscopy (SEM), a century-old technique, is today a ubiquitous method of imaging the surface of nanostructures. However, most SEM detectors simply count the number of secondary electrons from a material of interest, and…

The scanning electron microscope (SEM) produces an image of a sample by scanning it with a focused beam of electrons. The electrons interact with the atoms in the sample, which emit secondary electrons that contain information about the…

Computer Vision and Pattern Recognition · Computer Science 2017-09-08 Shahar Tsiper , Or Dicker , Idan Kaizerman , Zeev Zohar , Mordechai Segev , Yonina C. Eldar

Secondary electron (SE) imaging techniques, such as scanning electron microscopy and helium ion microscopy (HIM), use electrons emitted by a sample in response to a focused beam of charged particles incident at a grid of raster scan…

Signal Processing · Electrical Eng. & Systems 2026-03-12 Vaibhav Choudhary , Akshay Agarwal , Vivek K Goyal

Scanning Electron Microscopy (SEM) is pivotal in revealing intricate micro- and nanoscale features across various research fields. However, obtaining high-resolution SEM images presents challenges, including prolonged scanning durations and…

Image and Video Processing · Electrical Eng. & Systems 2024-10-08 Tom Reclik , Setareh Medghalchi , Philipp Schumacher , Maximilian Wollenweber , Talal Al-Samman , Sandra Korte-Kerzel , Ulrich Kerzel

Secondary electron (SE) imaging offers a powerful complementary capabilities to conventional scanning transmission electron microscopy (STEM) by providing surface-sensitive, pseudo-3D topographic information. However, contrast…

Applied Physics · Physics 2025-11-19 Evgenii Vlasov , Wouter Heyvaert , Tom Stoops , Sandra Van Aert , Johan Verbeeck , Sara Bals

A growing need exists for efficient and accurate methods for detecting defects in semiconductor materials and devices. These defects can have a detrimental impact on the efficiency of the manufacturing process, because they cause critical…

Computer Vision and Pattern Recognition · Computer Science 2023-08-21 Thibault Lechien , Enrique Dehaerne , Bappaditya Dey , Victor Blanco , Sandip Halder , Stefan De Gendt , Wannes Meert

We report resolution enhancement in scanning electron microscopy (SEM) images using a generative adversarial network. We demonstrate the veracity of this deep learning-based super-resolution technique by inferring unresolved features in…

Computer Vision and Pattern Recognition · Computer Science 2019-08-21 Kevin de Haan , Zachary S. Ballard , Yair Rivenson , Yichen Wu , Aydogan Ozcan

We report our detailed investigation of high-resolution imaging using secondary electrons (SE) with a subnanometer probe in an aberration-corrected transmission electron microscope, Hitachi HD2700C. This instrument also allows us to acquire…

Materials Science · Physics 2010-08-31 H. Inada , D. Su , R. F. Egerton , M. Konno , L. Wu , J. Ciston , J. Wall , Y. Zhu

The scanning electron microscope (SEM) recordings of dynamic nano-electromechanical systems (NEMS) are difficult to analyze due to the noise caused by low frame rate, insufficient resolution and blurriness induced by applied electric…

Image and Video Processing · Electrical Eng. & Systems 2023-07-19 Ege Erdem , Berke Demiralp , Hadi S Pisheh , Peyman Firoozy , Ahmet Hakan Karakurt , M. Selim Hanay

Photon counting is a mode of processing astronomical observations of low-signal targets that have been observed using an electron-multiplying charge-coupled device (EMCCD). In photon counting, the EMCCD amplifies the signal, and a…

Instrumentation and Methods for Astrophysics · Physics 2024-01-02 Kevin Ludwick

Recent studies of secondary electron (SE) emission in scanning transmission electron microscopes suggest that material's properties such as electrical conductivity, connectivity, and work function can be probed with atomic scale resolution…

Materials Science · Physics 2023-11-01 Ondrej Dyck , Jawaher Almutlaq , Jacob L. Swett , Andrew R. Lupini , Dirk Englund , Stephen Jesse

Over the last few years, a new mode for imaging in the scanning transmission electron microscope (STEM) has gained attention as it permits the direct visualization of sample conductivity and electrical connectivity. When the electron beam…

Materials Science · Physics 2023-02-01 Ondrej Dyck , Jacob L. Swett , Charalambos Evangeli , Andrew R. Lupini , Jan Mol , Stephen Jesse

Scanning Electron Microscopy (SEM) is indispensable in modern materials science, enabling high-resolution imaging across a wide range of structural, chemical, and functional investigations. However, SEM imaging remains constrained by…

Scanning Electron Microscopy (SEM) is a widely used tool for nanoparticle characterization, but long-term directional drift can compromise image quality. We present a novel algorithm for post-imaging drift correction in SEM nanoparticle…

Single-beam scanning electron microscopes (SEM) are widely used to acquire massive data sets for biomedical study, material analysis, and fabrication inspection. Datasets are typically acquired with uniform acquisition: applying the…

Image and Video Processing · Electrical Eng. & Systems 2021-01-11 Lu Mi , Hao Wang , Yaron Meirovitch , Richard Schalek , Srinivas C. Turaga , Jeff W. Lichtman , Aravinthan D. T. Samuel , Nir Shavit

The Scanning electron microscope (SEM) and Electron-Dispersive Spectroscope (EDS) are two highly effective instruments in the field of nanoscience and nanotechnology. The quality of these instruments is determined by various factors, with…

Applied Physics · Physics 2023-10-24 Hamidreza Moradi , Fatemeh Mehradnia

Particle beam microscopy (PBM) performs nanoscale imaging by pixelwise capture of scalar values representing noisy measurements of the response from secondary electrons (SEs) integrated over a dwell time. Extended to metrology, goals…

Data Analysis, Statistics and Probability · Physics 2023-08-15 Akshay Agarwal , Minxu Peng , Vivek K. Goyal
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