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In scanning electron microscopy, the achievable image quality is often limited by a maximum feasible acquisition time per dataset. Particularly with regard to three-dimensional or large field-of-view imaging, a compromise must be found…

Computer Vision and Pattern Recognition · Computer Science 2018-01-15 Patrick Trampert , Faysal Bourghorbel , Pavel Potocek , Maurice Peemen , Christian Schlinkmann , Tim Dahmen , Philipp Slusallek

Aberration correction is an important aspect of modern high-resolution scanning transmission electron microscopy. Most methods of aligning aberration correctors require specialized sample regions and are unsuitable for fine-tuning…

Recently it has been shown that precise dose control and an increase in the overall acquisition speed of atomic resolution scanning transmission electron microscope (STEM) images can be achieved by acquiring only a small fraction of the…

Cryo Focused Ion-Beam Scanning Electron Microscopy (cryo FIB-SEM) enables three-dimensional and nanoscale imaging of biological specimens via a slice and view mechanism. The FIB-SEM experiments are, however, limited by a slow (typically,…

Traditional image acquisition for cryo focused ion-beam scanning electron microscopy tomography often sees thousands of images being captured over a period of many hours, with immense data sets being produced. When imaging beam sensitive…

Here we show that compressive sensing allow 4-dimensional (4-D) STEM data to be obtained and accurately reconstructed with both high-speed and low fluence. The methodology needed to achieve these results compared to conventional 4-D…

Four-dimensional Scanning Transmission Electron Microscopy (4D-STEM) is a powerful technique for high-resolution and high-precision materials characterization at multiple length scales, including the characterization of beam-sensitive…

Applied Physics · Physics 2023-08-11 Hsu-Chih Ni , Renliang Yuan , Jiong Zhang , Jian-Min Zuo

Four dimensional scanning transmission electron microscopy (4D STEM) records the scattering of electrons in a material in great detail. The benefits offered by 4D STEM are substantial, with the wealth of data it provides facilitating for…

Instrumentation and Detectors · Physics 2021-12-09 Daen Jannis , Christoph Hofer , Chuang Gao , Xiaobin Xie , Armand Béché , Timothy J. Pennycook , Jo Verbeeck

Low-electron-dose observation is indispensable for observing various samples using a transmission electron microscope; consequently, image processing has been used to improve transmission electron microscopy (TEM) images. To apply such…

Image and Video Processing · Electrical Eng. & Systems 2022-03-02 Hiroyasu Katsuno , Yuki Kimura , Tomoya Yamazaki , Ichigaku Takigawa

Nowadays, modern electron microscopes deliver images at atomic scale. The precise atomic structure encodes information about material properties. Thus, an important ingredient in the image analysis is to locate the centers of the atoms…

Computer Vision and Pattern Recognition · Computer Science 2017-09-13 Benjamin Berkels , Benedikt Wirth

The challenge of imaging low-density objects in an electron microscope without causing beam damage is significant in modern TEM. This is especially true for life science imaging, where the sample, rather than the instrument, still…

Optics · Physics 2025-01-29 Francisco Vega Ibáñez , Jo Verbeeck

Focused ion beams (FIBs) are widely used in nanofabrication for applications such as circuit repair, ultra-thin lamella preparation, strain engineering, and quantum device prototyping. Although the lateral spread of the ion beam is often…

Instrumentation and Detectors · Physics 2025-11-04 M. G. Masteghin , Z. P. Aslam , A. P. Brown , M. J. Whiting , S. K. Clowes , R. P. Webb , D. C. Cox

While transmission electron microscopes (TEM) can achieve a much higher resolution than optical microscopes, they face challenges of damage to samples during the high energy processes involved. Here, we explore using computational ghost…

Reliable quantitative analysis in scanning (transmission) electron microscopy (S(T)EM) is often hindered by image drift during long-duration spectral mapping for elemental analysis or for various material functions. We here present…

Instrumentation and Detectors · Physics 2026-04-22 Zac Thollar , Kanto Maeda , Tetsuya Kubota , Taka-aki Yano , Qiwen Tan , Takumi Sannomiya

In x-ray microscopy, traditional raster-scanning techniques are used to acquire a microscopic image in a series of step-scans. Alternatively, scanning the x-ray probe along a continuous path, called a fly-scan, reduces scan time and…

Image and Video Processing · Electrical Eng. & Systems 2025-09-23 Yu Lu , Thomas F. Lynn , Ming Du , Zichao Di , Sven Leyffer

Photobleaching is a major limitation of superresolution Stimulated Depletion Emission (STED) microscopy. Fast scanning has long been considered an effective means to reduce photobleaching in fluorescence microscopy, but a careful…

Biological Physics · Physics 2015-10-07 Yong Wu , Xundong Wu , Rong Lu , Jin Zhang , Ligia Toro , Enrico Stefani

Point-spread function of the probe forming optics ($PSF_{optics} $) is reported for the first time in an uncorrected (without multipole correctors) scanning electron microscope (SEM). In an SEM, the electron probe information is lost as the…

Materials Science · Physics 2024-07-02 Surya Kamal , Richard K. Hailstone

Precession electron diffraction has in the past few decades become a powerful technique for structure solving, strain analysis, and orientation mapping, to name a few. One of the benefits of precessing the electron beam, is increased…

Instrumentation and Detectors · Physics 2025-12-12 Gregory Nordahl , Lewys Jones , Emil Frang Christiansen , Kasper Aas Hunnestad , Magnus Nord

Aberration-corrected scanning transmission electron microscopes (STEM) provide sub-angstrom lateral resolution; however, the large convergence angle greatly reduces the depth of field. For microscopes with a small depth of field,…

Materials Science · Physics 2011-12-15 Robert Hovden , Huolin L. Xin , David A. Muller

High-throughput 2D and 3D scanning electron microscopy, which relies on automation and dependable control algorithms, requires high image quality with minimal human intervention. Classical focus and astigmatism correction algorithms attempt…

Instrumentation and Detectors · Physics 2023-05-10 Philipp Johannes Schubert , Rangoli Saxena , Joergen Kornfeld