Related papers: Hyper Resolution Two Photon Direct Laser Writing u…
Nanochannels with high width-to-height aspect ratios are desirable for many applications, particularly those requiring optical access, but remain challenging to fabricate. In this work, the direct laser writing of such channels between…
Mask-based pattern generation is a crucial step in microchip production. The next-generation extreme-ultraviolet- (EUV) lithography instruments with a wavelength of \SI{13.5}{\nano\meter} is currently under development. In principle, this…
In this paper, we present a unique multi-functional super-resolution instrument, the SuperNANO system, which integrates real-time super-resolution imaging with direct laser nanofabrication capabilities. Central to the func-tionality of the…
The advancement of liquid phase electron beam induced deposition has enabled an effective direct-write approach for functional nanostructure synthesis with the possibility of three-dimensional control of morphology. For formation of a…
In the present article we substantially expand on our recent study about the fabrication of mesoscale polymeric templates of disordered photonic network materials. We present a detailed analysis and discussion of important technical aspects…
To overcome the limit of diffraction while achieving the superresolution technique, solid immersion lenses are the key optical elements for data storage and nanophotonics applications. Recent demonstrations have shown how different…
Stimulated emission depletion microscopy inspired direct laser writing (STED-DLW) processes can offer diffraction-unlimited fabrication of 3D-structures, not possible with traditional electron-beam or optical lithography. We propose a…
We report on the fabrication of three-dimensional (3D) high-Q whispering gallery microcavities on a fused silica chip by femtosecond laser microfabriction, enabled by the 3D nature of femtosecond laser direct writing. The processing mainly…
A two-dimensional (2D) ZnS photonic crystal was deposited on the surface of a one-dimensional (1D) III-nitride micro cavity light-emitting diode (LED), to intermix the light extraction features of both structures (1D+2D). The deposition of…
Two-photon photopolymerization of UV curing resins is an attractive method for the fabrication of microscopic transparent objects with size in the tens of micrometers range. We have been using this method to produce three-dimensional…
A powerful fabrication strategy based on three-dimensional direct laser writing for the rapid prototyping of opto-mechanical components with critical features ranging from several hundred nm to a few mm is demonstrated here. As an example,…
The future success of integrated circuits (IC) technology relies on the continuing miniaturization of the feature size, allowing more components per chip and higher speed. Extreme anisotropy opens new opportunities for spatial pattern…
Nowadays three-dimensional (3D) printing has been widely used for producing geometrically complex 3D structures from a broad range of materials such as ceramics, metals, polymers, semiconductors, etc. Although it has been demonstrated that…
In a comprehensive study on several samples we demonstrate for our laboratory-based computed tomography system resolutions down to 150nm. The achieved resolution is validated by imaging com-mon test structures in 2D and Fourier Shell…
Van der Waals (vdW) materials have garnered growing interest for use as nanophotonic building blocks that offer precise control over light-matter interaction at the nanoscale, such as optical metasurfaces hosting sharp quasi-bound states in…
As demonstrated by Boto et al. [Phys. Rev. Lett. 85, 2733 (2000)], quantum lithography offers an increase in resolution below the diffraction limit. Here, we generalize this procedure in order to create patterns in one and two dimensions.…
The great flexibility of direct laser writing arises from the possibility to fabricate precise three-dimensional structures on very small scales as well as the broad range of applicable materials. However, there is still a vast number of…
Multilayer metasurfaces provide substantially greater spectral design freedom than single-layer devices, yet their implementation in the visible and near-infrared remains limited by the complexity, cost, and low throughput of conventional…
Aberration-corrected optics have made electron microscopy at atomic-resolution a widespread and often essential tool for nanocharacterization. Image resolution is dominated by beam energy and the numerical aperture of the lens ({\alpha}),…
Featured by prominent flexibility and fidelity in producing sophisticated stereoscopic structures transdimensionally, three-dimensional (3D) laser printing technique has vastly extended the toolkit for delivering diverse functional devices.…