Related papers: Engineering the dissipation of crystalline microme…
We report low-temperature measurements of dissipation in megahertz-range, suspended, single-crystal nanomechanical oscillators. At millikelvin temperatures, both dissipation (inverse quality factor) and shift in the resonance frequency…
Controllable geometric manipulation via micromachining techniques provides a promising tool for enhancing useful topological electrical responses relevant to future applications such as quantum information science. Here we present…
Recent advances in the design and fabrication of on-chip optical microresonators has greatly expanded their applications in photonics, enabling metrology, communications, and on-chip lasers. Designs for these applications require fine…
Research on diamond has intensified due to its exceptional thermal, optical, and mechanical properties, making it a key material in quantum technologies and high-power applications. Diamonds with engineered nitrogen-vacancy (NV) centers…
The semicylindrical microresonator with relatively simple excitation with a plane wave is studied. The resonator is formed on the base of the dielectric/metal/dielectric structure, where the wave energy penetrates into resonator through a…
Superconducting thin films with high intrinsic kinetic inductance are of great importance for photon detectors, achieving strong coupling in hybrid systems, and protected qubits. We report on the performance of titanium nitride resonators,…
We present an experimental approach for cryogenic dielectric measurements on ultra-thin insulating films. Based on a coplanar microwave waveguide design we implement superconducting quarter-wave resonators with inductive coupling, which…
Resonance properties of nanomechanical resonators based on doubly clamped silicon nanowires, fabricated from silicon-on-insulator and coated with a thin layer of aluminum, were experimentally investigated. Resonance frequencies of the…
Polygon resonators are promising candidates for nanomechanical applications due to their compact architecture and high force sensitivity. Here, we develop an analytical framework to predict the resonance frequencies and dissipation dilution…
As silicon transistors scale toward future technology nodes, three-dimensional architectures -- including gate-all-around (GAA) nanoribbon and complementary field-effect transistors (CFETs) -- require channel widths in the tens of…
Over the last few years there has been a growing interest toward the use of superconducting microwave microresonators operated in quasi-thermal equilibrium mode, especially applied to single particle detection. Indeed, previous devices…
We present nanofabrication and mechanical measurements of single-crystal diamond cantilevers with thickness down to 85 nm, thickness uniformity better than 20 nm, and lateral dimensions up to 240 um. Quality factors exceeding one million…
Control of thermal emission is important in a number of applications from thermal energy harvesting and management and sensing of gas and chemical to thermal camouflage. Semiconductor-based devices can be engineered to enable electrical…
We present the first observation of optomechanical coupling in ultra-high Q crystalline whispering-gallery-mode (WGM) resonators. The high purity of the crystalline material enables optical quality factors in excess of 10^{10} and finesse…
The realization of semiconductor structures with stable excitons at room temperature is crucial for the development of excitonics and polaritonics. Quantum confinement has commonly been employed for enhancing excitonic effects in…
We propose and demonstrate a convenient and sensitive technique for precise engineering of group-velocity dispersion in high-Q silicon microresonators. By accurately controlling the surface-oxidation thickness of silicon microdisk…
We present a superconducting micro-resonator array fabrication method that is scalable, reconfigurable, and has been optimized for high multiplexing factors. The method uses uniformly sized tiles patterned on stepper photolithography…
Quantum systems can provide outstanding performance in various sensing applications, ranging from bioscience to nanotechnology. Atomic-scale defects in silicon carbide are very attractive in this respect because of the technological…
The quest to create superconductors with higher transition temperatures is as old as superconductivity itself. One strategy, popular after the realization that (conventional) superconductivity is mediated by phonons, is to chemically…
The dielectric loss of silicon nitride (Si$_3$N$_4$) limits the performance of microwave-frequency devices that rely on this material for sensing, signal processing, and quantum communication. Using superconducting resonant circuits, we…