Related papers: Highly-Linear Magnet-Free Microelectromechanical C…
Autonomous oscillators, such as clocks and lasers, produce periodic signals \emph{without} any external frequency reference. In order to sustain stable periodic motions, there needs to be external energy supply as well as nonlinearity built…
In RF (Radio Frequency) domain, one of the limitations of using MEMS (Micro Electromechanical Systems) switching devices for medium power applications is RF power. Failure phenomena appear even for 500 mW. A design of MEMS switched…
Compact inductor-capacitor (LC) resonators, in contrast to coplanar waveguide (CPW) resonators, have a simple lumped-element circuit representation but usually call for sophisticated finite-element method (FEM) simulations for an accurate…
The extensive research and development of micromechanical resonators is trying to allow the use of these devices for highly sensitive applications. Microcantilevers are some of the simplest MEMS structure and had been proved to be a good…
We demonstrate a non-volatile magnetoelectric magnonic memory (MEMM) that enables fully electrical write/read via direct magnon-driven sensing in an insulating antiferromagnet. A fabricated SrIrO3/La-BiFeO3/SrIrO3 trilayer exhibits sub-100…
We analyze the design of a potential replacement technology for the commercial ferrite circulators that are ubiquitous in contemporary quantum superconducting microwave experiments. The lossless, lumped element design is capable of being…
Silicon-based micro-electromechanical systems (MEMS) can be fabricated using bulk and surface micromachining technology. A micro mirror designed as an oscillatory MEMS constitutes a prominent example. Typically, in order to minimize energy…
Microelectromechanical (MEMS) resonators are widely used in timekeeping applications, and recent advances in fabrication, materials, and encapsulation technology have advanced their potential as high stability frequency references. However,…
Resonators based on two-dimensional (2D) materials have exceptional properties for application as nanomechanical sensors, which allows them to operate at high frequencies with high sensitivity. However, their performance as nanomechanical…
The high-power RF systems for the Accelerator Production of Tritium (APT) program require high-power circulators at 350 MHz and 700 MHz to protect 1 MW Continuous Wave (CW) klystrons from reflected power. The 350 MHz circulator is based on…
Millimeter-wave superconducting resonators are a useful tool for studying quantum device coherence in a new frequency domain. However, improving resonators is difficult without a robust and reliable method for coupling millimeter-wave…
A maskless post-processing technique for CMOS chips is developed that enables the fabrication of RF MEMS parallel-plate capacitors with a high quality factor and a very compact size. Simulations and measured results are presented for…
We present a novel mode of operation for Duffing-type nonlinear microelectromechanical (MEMS) devices whereby a self-sustained multi-frequency output is generated. This new librator regime creates a limit cycle around a dynamical fixed…
The present study presents a new micro electromagnetic actuator utilizing a PDMS membrane with a magnet. The actuator is integrated with micro coils to electromagnetically actuate the membrane and results in a large deflection. The micro…
Micro-mechanical resonators are widely used in modern sensing technology due to their high quality-factor (Q), enabling sensitive detection of various stimuli. However, the performance of these resonators in fluid environments is limited by…
An ultra-low-voltage crystal quartz oscillator is proposed. The approach to its design is essentially based on using a HEMT operating in unsaturated dc regime and a quartz resonator as a resonant impedance transformer. The 25 MHz prototype…
In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's…
We have produced high-quality complex microwave circuits, such as multiplexed resonators and superconducting phase qubits, using a "vacuum-gap" technology that eliminates lossy dielectric materials. We have improved our design and…
The smart integrated systems of tomorrow would demand a combination of micromechanical components and traditional electronics. On-chip solutions will be the ultimate goal. One way of making such systems is to implement the mechanical parts…
We fabricate a microscale electromechanical system, in which a suspended superconducting membrane, treated as a mechanical oscillator, capacitively couples to a superconducting microwave resonator. As the microwave driving power increases,…