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The very significant growth of the wireless communication industry has spawned tremendous interest in the development of high performances radio frequencies (RF) components. Micro Electro Mechanical Systems (MEMS) are good candidates to…

Other Computer Science · Computer Science 2008-02-22 C. Durand , F. Casset , P. Ancey , F. Judong , A. Talbot , R. Quenouillere , D. Renaud , S. Borel , B. Florin , L. Buchaillot

Over the past few years, microelectromechanical system (MEMS) based on-chip resonators have shown significant potential for sensing and high frequency signal processing applications. This is due to their excellent features like small size,…

Other Computer Science · Computer Science 2013-01-15 Joydeep Basu , Tarun Kanti Bhattacharyya

Microelectromechanical system (MEMS) based on-chip resonators offer great potential for sensing and high frequency signal processing applications due to their exceptional features like small size, large frequency-quality factor product,…

Other Computer Science · Computer Science 2012-02-15 Ritesh Ray Chaudhuri , Joydeep Basu , Tarun Kanti Bhattacharyya

In this paper, a new generation of magnet-free circulators with high performance is proposed. Circulators are crucial devices in modern communication systems due to their ability to enable full-duplexing and double the spectral efficiency…

Signal Processing · Electrical Eng. & Systems 2020-02-19 Yao Yu , Giuseppe Michetti , Michele Pirro , Ahmed Kord , Dimitrios Sounas , Zhicheng Xiao , Cristian Cassella , Andrea Alu , Matteo Rinaldi

A novel frequency modulated MEMS magnetometer is presented. The new device is inspired by the magnetic force microscopy technique, it combines standard MEMS technology with magnetic elements to obtain a magnetometer with potential for low…

Instrumentation and Detectors · Physics 2021-09-08 Federico Maspero , Gabriele Gatani , Simone Cuccurullo , Riccardo Bertacco

CMOS-MEMS resonators seamlessly integrated in advanced integrated circuit (IC) technology have the unique capability to enable unprecedented integration of stable frequency references, acoustic spectral processors, and physical sensors.…

Applied Physics · Physics 2023-04-13 Udit Rawat , Jackson Anderson , Dana Weinstein

Very small electromechanical coupling coefficient in micro-electromechanical systems (MEMS) or acoustic resonators is quite of a concern for oscillator performance, specially at mmWave frequencies. This small coefficient is the…

Signal Processing · Electrical Eng. & Systems 2020-05-15 Abhishek Srivastava , Baibhab Chatterjee , Udit Rawat , Yanbo He , Dana Weinstein , Shreyas Sen

Nonreciprocal circuit elements form an integral part of modern measurement and communication systems. Mathematically they require breaking of time-reversal symmetry, typically achieved using magnetic materials and more recently using the…

Quantum Physics · Physics 2017-10-24 S. Barzanjeh , M. Wulf , M. Peruzzo , M. Kalaee , P. B. Dieterle , O. Painter , J. M. Fink

Microelectromechanical system (MEMS) based on-chip resonators offer great potential for high frequency signal processing circuits like reference oscillators and filters. This is due to their exceptional features like small size, large…

Other Computer Science · Computer Science 2012-10-15 Joydeep Basu , Tarun K. Bhattacharyya

(RFT) allows very high-Q active mode resonators, promising crystal-less monolithic clock generation for mmWave systems. However, there is a strong need for design of mmWave oscillators that utilize the high-Q of active-mode RFT (AM-RFT)…

Signal Processing · Electrical Eng. & Systems 2021-07-06 Abhishek Srivastava , Baibhab Chatterjee , Udit Rawat , Yanbo He , Dana Weinstein , Shreyas Sen

In this paper, we discuss recent progress in magnet-free non-reciprocal structures based on a synthetic form of angular momentum bias imparted via spatiotemporal modulation. We discuss how such components can support metrics of performance…

Signal Processing · Electrical Eng. & Systems 2021-12-22 Ahmed Kord , Andrea Alu

This article presents several design techniques to fabricate micro-electro-mechanical systems (MEMS) using standard complementary metal-oxide semiconductor (CMOS) processes. They were applied to fabricate high yield CMOS-MEMS shielded…

Instrumentation and Detectors · Physics 2021-09-24 Juan Valle , Josep-María Sánchez-Chiva , Daniel Fernández , Jordi Madrenas

Microelectromechanical systems (MEMS) can offer a competitive alternative for conventional technology in electrical precision measurements. This article summarises recent work in development of MEMS solutions for electrical metrology.…

Instrumentation and Detectors · Physics 2007-07-05 Antti Manninen , Anu Karkkainen , Nadine Pesonen , Aarne Oja , Heikki Seppa

We have designed and characterized micro-electro-mechanical systems (MEMS) for applications at low temperatures. The mechanical resonators were fabricated using a surface micromachining process. The devices consist of a pair of parallel…

Mesoscale and Nanoscale Physics · Physics 2013-01-24 M. Gonzalez , P. Zheng , E. Garcell , Y. Lee , H. B. Chan

In this paper, we discuss the design rationale and guidelines to build magnet-less circulators based on spatio-temporal modulation of resonant junctions consisting of first-order bandstop filters connected in a delta topology. Without…

Signal Processing · Electrical Eng. & Systems 2018-08-10 Ahmed Kord , Dimitrios L. Sounas , Andrea Alù

This work presents a differential FBAR circulator that uses the bending mode to mechanically modulate the FBAR mode without any varactors or switches. The differential FBAR circulator achieves a 61.5 dB isolation (IX) with an insertion loss…

Signal Processing · Electrical Eng. & Systems 2019-09-27 Mustafa Mert Torunbalci , Suresh Sridaran , Richard Ruby , Sunil Bhave

A High-Q microwave (K band) MEMS resonator is presented, which empolys substrate integrated waveguide (SIW) and micromachined via-hole arrays by ICP process. Nonradiation dielectric waveguide (NRD) is formed by metal filled via-hole arrays…

Other Computer Science · Computer Science 2008-02-22 Z. Jian , Y. Yuanwei , Z. Yong , Chen Chen , J. Shixing

In this paper, we explore theoretically and experimentally broadband spatiotemporally modulated (STM) magnet-less circulators realized by combining three-port non-reciprocal junctions with three identical bandpass filters. We develop a…

Signal Processing · Electrical Eng. & Systems 2018-12-26 Ahmed Kord , Dimitrios L. Sounas , Zhicheng Xiao , Andrea Alu

Nonreciprocal devices such as circulators and isolators belong to an important class of microwave components employed in applications like the measurement of mesoscopic circuits at cryogenic temperatures. The measurement protocols usually…

Mesoscale and Nanoscale Physics · Physics 2011-04-05 Archana Kamal , John Clarke , Michel Devoret

We propose a design to realize integrated broadband nonreciprocal microwave isolators and circulators using superconducting circuit elements without any magnetic materials. To obtain a broadband response, we develop a waveguide-based design…

Quantum Physics · Physics 2021-06-08 Dengke Zhang , Jaw-Shen Tsai
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