Related papers: High aspect ratio silicon structures by Displaceme…
Future NASA X-ray spectroscopy missions will require high throughput, high resolution grating spectrometers. Off-plane reflection gratings are capable of meeting the performance requirements needed to realize the scientific goals of these…
Efficient imaging of biomolecules, 2D materials and electromagnetic fields depends on retrieval of the phase of transmitted electrons. We demonstrate a method to measure phase in a scanning transmission electron microscope using a…
In this work, we show the feasibility of extreme ultraviolet (EUV) patterning on an HF-treated Si(100) surface in the absence of a photoresist. EUV lithography is the leading lithography technique in semiconductor manufacturing due to its…
High-resolution ($R = \lambda /\Delta \lambda > 2000$) x-ray absorption and emission line spectroscopy in the soft x-ray band is a crucial diagnostic for the exploration of the properties of ubiquitous warm and hot plasmas and their…
Silicon immersion gratings and grisms enable compact, near-infrared spectrographs with high throughput. These instruments find use in ground-based efforts to characterize stellar and exoplanet atmospheres, and in space-based observatories.…
The most direct definition of a patterning process' resolution is the smallest half-pitch feature it is capable of transferring onto the substrate. Here we demonstrate that thermal Scanning Probe Lithography (t-SPL) is capable of…
In this paper, we demonstrate a radiation-strength-chirped metasurface centimeter-long grating antenna, whose beam quality is approaching the diffraction limit in its footprint with 90 percent efficiency.Instead of chirping the duty cycle…
Self-imaging in near-field diffraction is a practical application of coherent manipulation of matter waves in Talbot interferometry. In this work, near-field diffraction of protons by a nanostructured metallic grating under the influence of…
High angular resolution electron backscatter diffraction (HR-EBSD) affords an increase in angular resolution, as compared to 'conventional' Hough transform based EBSD, of two orders of magnitude, enabling measurements of relative…
Volumetric lithography offers a path to scalable fabrication of complex three-dimensional (3D) micro- and nanoscale architectures, yet existing approaches are limited by quasi-two-dimensional exposure physics or slow serial writing. We…
We have developed low-dispersion (1480 l/mm), resonance-free, diffraction gratings made of dielectric materials resistant to femtosecond laser damage $(SiO_{2}/HfO_{2})$. A 14 cm diameter sample was fabricated resulting in a mean…
Transformation optics methods and gradient index electromagnetic structures rely upon spatially varied arbitrary permittivity. This, along with recent interest in millimeter-wave lens-based antennas demands high spatial resolution…
The Talbot effect, in which a wave imprinted with transverse periodicity reconstructs itself at regular intervals, is a diffraction phenomenon that occurs in many physical systems. Here we present the first observation of the Talbot effect…
Large-area gratings play a crucial role in various engineering fields. However, traditional interference lithography is limited by the size of optical component apertures, making large-area fabrication a challenging task. Here, a method for…
Metal microstructured optical elements for grating-based X-ray phase-contrast interferometry were fabricated by using an innovative approach of microcasting: hot embossing technology with low melting temperature (280{\deg}C) metal alloy…
Laser cutting of semiconductor wafers and transparent dielectrics has become a dominant process in manufacturing industries, encompassing a wide range of applications from flat display panels to microelectronic chips. Limited by the…
In this paper, we report measurements of diffraction efficiency and angular dispersion for a large format (~ 25 cm diameter) Volume-Phase Holographic (VPH) grating optimized for near-infrared wavelengths (0.9 -- 1.8 micron). The aim of this…
Miniaturizing nonlinear optical components is essential for integrating advanced light manipulation into compact photonic devices, enabling scalable and cost-effective applications. While monocrystalline lithium niobate thin films advance…
Metallic gratings were fabricated using high energy laser interference lithography with a frequency tripled Nd:YAG nanosecond laser. The grating structures were first recorded in a photosensitive layer and afterwards transferred to an Au…
We demonstrate first- and second-order spatial differentiation of an optical beam transverse profile using thin suspended subwavelength gratings. Highly reflective one-dimensional gratings are patterned on suspended 200 nm-thick silicon…