Related papers: High aspect ratio silicon structures by Displaceme…
Developing a suitable production method for three-dimensional periodic nanostructures with high aspect ratios is a subject of growing interest. For mass production, Talbot lithography offers many advantages. However, one disadvantage is…
Structuring Si in arrays of vertical high aspect ratio pillars, ranging from nanoscale to macroscale feature dimensions, is essential for producing functional interfaces for many applications. Arrays of silicon 3D nanostructures are needed…
X-ray grating interferometry is an excellent technique for X-ray phase contrast imaging and X-ray wavefront sensing with applications in materials science, biology and medical diagnosis. Among other requirements, the method depends on the…
High-resolution patterning of periodic structures over large areas has several applications in science and technology. One such method, based on the long-known Talbot effect observed with diffraction gratings, is achromatic Talbot…
Qubit information processors are increasing in footprint but currently rely on e-beam lithography for patterning the required Josephson junctions (JJs). Advanced optical lithography is an alternative patterning method, and we report on the…
Conventional projection Talbot lithography usually employs opaque (amplitude) or transparent (phase) masks for creating a periodic array of Fresnel diffraction fringes in the photosensitive substrate. For particular mask design the…
In this paper, we simulate a front surface inverted pyramidal grating texture on 2 to 400 micron thick silicon and optimize it to derive maximum photocurrent density from the cell. We identify a one size fits all front grating period of…
Controlled and precise fabrication of structures with heights in the range of single digit nanometres is one of the challenges for diffraction gratings operating near-normal incidence in the extreme ultraviolet (EUV) and soft X-ray range.…
Talbot length, the distance between two consecutive self-image planes along the propagation axis for a periodic diffraction object (grating) illuminated by a plane wave, depends on the period of the object and the wavelength of…
Diffractive optical elements such as periodic gratings are fundamental devices in X-ray imaging - a technique that medical, material science and security scans rely upon. Fabrication of such structures with high aspect ratios at the…
Subwavelength grating micro-polarizer arrays, as a type of focal plane division simultaneous detection method, are significantly advancing the development and practical application of polarization imaging technology. Based on the…
Grayscale lithography allows the creation of micrometer-scale features with spatially-controlled height in a process that is fully compatible with standard lithography. Here, solid immersion lenses are demonstrated in silicon carbide using…
The measured experimental results of optical diffraction of 10, 5 and 3.4 micrometer period plasmonic surface relief grating are presented for the application of band-pass filter in visible spectral range. Conventional scanning electron…
Future observatories utilizing reflection grating spectrometers for extreme ultraviolet (EUV) and soft X-ray (SXR) spectroscopy require high-fidelity gratings with both blazed groove facets and custom groove layouts that are often fanned or…
Diffraction gratings with high upward diffraction efficiency and large effective length are required for chip-scale light detection and ranging. In this paper, we propose a diffraction grating based on a multilayer silicon nitride…
Medical differential phase contrast x-ray imaging (DPCI) promises improved soft-tissue contrast at lower x-ray dose. The dose strongly depends on both the angular sensitivity and on the visibility of a grating-based Talbot-Lau…
Fabrication of X-ray gratings has surged in the last two decades thanks to their vast employment in X-ray Phase Contrast Imaging, an imaging technique able to boost X-ray sensitivity to detect otherwise invisible details. These high aspect…
Nanofabrication research pursues the miniaturization of patterned feature size. In the current state of the art, micron scale areas can be patterned with features down to ~ 30 nm pitch using electron beam lithography. Our work demonstrates…
Grating-based X-ray phase-contrast interferometry has a high application impact in material science and medicine for imaging of weakly absorbing (low Z) materials and soft tissues. For the absorbing gratings, casting of highly x-ray…
Gratings enable dispersive spectroscopy from the X-ray to the optical, and feature prominently in proposed flagships and SmallSats alike. The exacting performance requirements of these future missions necessitate assessing whether the…