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We present nanofabrication and mechanical measurements of single-crystal diamond cantilevers with thickness down to 85 nm, thickness uniformity better than 20 nm, and lateral dimensions up to 240 um. Quality factors exceeding one million…
We report on the design, fabrication, and implementation of ultrasensitive micromechanical oscillators. Our ultrathin single-crystal silicon cantilevers with integrated magnetic structures are the first of their kind: They are fabricated…
We describe a transducer for low-temperature atomic force microscopy based on electromechanical coupling due to a strain-dependent kinetic inductance of a superconducting nanowire. The force sensor is a bending triangular plate (cantilever)…
In recent years, self-assembled semiconductor nanowires have been successfully used as ultra-sensitive cantilevers in a number of unique scanning probe microscopy (SPM) settings. We describe the fabrication of ultra-low dissipation…
Nanomechanical resonator-based sensing devices are used in medical diagnostics based on their high-frequency dynamic behavior. Cantilevers fall into the category of Nanomechanical resonators. It also resembles a resonator whose shape is…
Nanometer-scale structures with high aspect ratio such as nanowires and nanotubes combine low mechanical dissipation with high resonance frequencies, making them ideal force transducers and scanning probes in applications requiring the…
Single-crystal diamond nanomechanical resonators are being developed for countless applications. A number of these applications require that the resonator be operated in a fluid, i.e., a gas or a liquid. Here, we investigate the fluid…
Sensitive transduction of the motion of a microscale cantilever is central to many applications in mass, force, magnetic resonance, and displacement sensing. Reducing cantilever size to nanoscale dimensions can improve the bandwidth and…
We present a detailed modeling and characterization of our scalable microwave nanoprobe, which is a micro-fabricated cantilever-based scanning microwave probe with separated excitation and sensing electrodes. Using finite-element analysis,…
In strained mechanical resonators, the concurrence of tensile stress and geometric nonlinearity dramatically reduces dissipation. This phenomenon, dissipation dilution, is employed in mirror suspensions of gravitational wave interferometers…
We developed a process to fabricate nanoscale metallic gate electrodes on scanning probe cantilevers, including on the irregular surface of protruding cantilever tips. The process includes a floating-layer technique to coat the cantilevers…
We have fabricated disordered superconducting nanowires of molybdenium silicide. A molybdenium nanowire is first deposited on top of silicon, and the alloy is formed by rapid thermal annealing. The method allows tuning of the crystal growth…
With its host of outstanding material properties, single-crystal diamond is an attractive material for nanomechanical systems. Here, the mechanical resonance characteristics of freestanding, single-crystal diamond nanobeams fabricated by an…
Nanodiamond reinforced silver matrix nanocomposites with different nanodiamond content are produced from pure silver and nanodiamond powders by a combination of two severe plastic deformation methods, ball-milling and high-pressure torsion…
We report actuation and detection of gigahertz-range resonance frequencies in nano-crystalline diamond mechanical resonators. High order transverse vibration modes are measured in coupled-beam resonators exhibiting frequencies up to 1.441…
We report on the production of nanodiamonds (NDs) with 70-80 nm size via bead assisted sonic disintegration (BASD) of a polycrystalline chemical vapor deposition (CVD) film. The NDs display high crystalline quality as well as intense…
The applications of nanomechanical resonators range from biomolecule mass sensing to hybrid quantum interfaces. Their performance is often limited by internal material damping, which can be greatly reduced by using crystalline materials.…
In force sensing, optomechanics, and quantum motion experiments, it is typically advantageous to create lightweight, compliant mechanical elements with the lowest possible force noise. Here we report wafer-scale batch fabrication and…
The small mass and high coherence of nanomechanical resonators render them the ultimate force probe, with applications ranging from biosensing and magnetic resonance force microscopy, to quantum optomechanics. A notorious challenge in these…
The electronic spin of the nitrogen vacancy (NV) center in diamond forms an atomically sized, highly sensitive sensor for magnetic fields. To harness the full potential of individual NV centers for sensing with high sensitivity and…