Related papers: Three-dimensional nanoimprint lithography using tw…
The present work illustrates a novel approach for the maskless and resistless fabrication of nanopatterned metal layers on Si substrates, based on the combination of nanomechanical surface modification techniques (such as nanoindentation…
Hybrid nanophotonics based on metal-dielectric nanostructures unifies the advantages of plasmonics and all-dielectric nanophotonics providing strong localization of light, magnetic optical response and specifically designed scattering…
Nanoimprint lithography (NIL) is a widely used high-throughput fabrication technique for photonic devices, yet its reliability is often compromised by the inevitable imperfections that arise during the demolding process. Topological…
Four-dimensional (4D) printing of shape memory polymer (SMP) imparts time responsive properties to 3D structures. Here, we explore 4D printing of a SMP in the submicron length scale, extending its applications to nanophononics. We report a…
Photopolymerization-based additive manufacturing enables cost-effective, high-speed fabrication of complex 3D structures but is constrained by a trade-off between resolution and printing speed. Single-photon polymerization ensures rapid…
Lithography-free metasurfaces composed of a nano-layered stack of materials are attractive not only due to their optical properties but also by virtue of fabrication simplicity and cost reduction of devices based on such structures. We…
In a comprehensive study on several samples we demonstrate for our laboratory-based computed tomography system resolutions down to 150nm. The achieved resolution is validated by imaging com-mon test structures in 2D and Fourier Shell…
The democratization of fabrication equipment has spurred recent interest in maskless grayscale lithography for both 2D and 3D microfabrication. However, the design of suitable template images remains a challenge. This work presents a…
We report the design, nanofabrication, and characterization of high-quality polymer-based micromirror structures employing the 3D two-photon polymerization lithography technique. Compared to conventional microcavity approaches, our…
Patterned substrates for optics, electronics, sensing, lab-on-chip technologies, bioanalytics, clinical diagnostics as well as translational and personalized medicine are typically prepared by additive substrate manufacturing including…
Two-dimensional materials can be combined by placing individual layers on top of each other, so that they are bound only by their van der Waals interaction. The sequence of layers can be chosen arbitrarily, enabling an essentially…
The technique of laser-assisted nanoimprinting lithography (LAN) has been proposed to utilize an excimer laser to irradiate through a quartz mold and melts a thin polymer film on the substrate for micro- to nano-scaled fabrications. In the…
The 3D printing technology based on digital light processing (DLP) has highlighted its powerful manufacturing capabilities for optical components. However, the printing structure obtained by DLP based down projection printing is easily…
The combination of metasurfaces with chalcogenide phase-change materials is a highly promising route towards the development of multifunctional and reconfigurable nanophotonic devices. However, their transition into real-world devices is…
Ordered graphene nanodisk arrays have been successfully fabricated by combining nanosphere lithography (NSL) and reactive ion etching (RIE) processes. The dimension of graphene nanodisks can be effectively tuned by varying the size of…
Additive manufacturing, also known as 3D printing, is an advanced manufacturing technique that allows the fabrication of arbitrary macroscopic and microscopic objects. All 3D printing systems require large optical elements or nozzles in…
Nature has exhibited numerous soft-interactive botanical or zoological systems with self-adaptivenss or reconfigurable shape, however, artificial micro/nano materials of same merit are formidable due to material/structural limitations,…
Three-dimensional (3D) printing has allowed for production of geometrically complex 3D objects with extreme flexibility, which is currently undergoing rapid expansions in terms of materials, functionalities, as well as areas of application.…
Building nanotechnological analogues of naturally occurring magnetic structures has proven to be a powerful approach to studying topics like geometry-induced magnetic frustration and to provide model systems for statistical physics.…
Nanostructuring hard optical crystals has so far been exclusively feasible at their surface, as stress induced crack formation and propagation has rendered high precision volume processes ineffective. We show that the inner chemical etching…