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Epitaxial copper thin films were deposited by magnetron sputtering. The adatoms during deposition are influenced by deposition parameters which cause variations in thin film properties. XRD and FESEM studies were done to get an insight into…

Materials Science · Physics 2015-09-22 A. S. Bhattacharyya , S. Kumar , S. Jana , P. Y. Kommu , K. Gaurav , S. Prabha , V. S. Kujur , P. Bharadwaj

In this work, amorphous thin films in Mg-Si-O-N system were prepared in order to investigate the dependence of optical and mechanical properties on Mg composition. Reactive RF magnetron co-sputtering from magnesium and silicon targets were…

In this paper we report the deposition of epitaxial thin films of Nd1-xSrxCoO3 with x=0, 0.2 and 0.5 on single crystalline substrates (SrTiO3 and LaAlO3) carried out by means of rf-magnetron sputtering. The deposited films are all…

This paper presents the development of scientific instrumentation for the fabrication of ferromagnetic thin films, by sputtering technique, for the use of 2-inch-diameter targets. Thin films were deposited using Permalloy alloy (Ni80Fe20)…

Ga2O3 thin films were deposited by reactive magnetron sputtering from a liquid gallium target. The influence of deposition temperature, substrate type, and discharge parameters on the structural and electrical properties was systematically…

Materials Science · Physics 2026-05-01 Petr Novak , Jan Koloros , Stanislav Haviar , Jiri Rezek , Pavel Baroch

The synthesis of the photochromic YHO films is based on the oxidation of deposited yttrium hydride in ambient conditions. The actual state of the films during the deposition process, which is influenced by the deposition pressure and the…

In order to get homogeneous nanostructured Aluminum Nitride deposits, thin films were grown at room temperature on [001] Si substrates by radio frequency magnetron reactive sputtering. The deposits were analysed by Transmission Electron…

Materials Science · Physics 2019-09-05 Valerie Brien , P. Pigeat

Thin films of the recently discovered magnesium diboride (MgB2) intermetalic superconducting compound have been grown using a magnetron sputtering deposition technique followed by in-situ annealing at 830 C. High quality films were obtained…

Superconductivity · Physics 2009-11-07 R. Vaglio , M. G. Maglione , R. Di Capua

Entropy stabilization has garnered significant attention as a new approach to designing novel materials. Much of the work in this area has focused on bulk ceramic processing, leaving entropy-stabilized thin films relatively underexplored.…

Materials Science · Physics 2020-06-29 Valerie Jacobson , Dave Diercks , Bobby To , Andriy Zakutayev , Geoff Brennecka

A comparative study of the structural, optical and morphological properties of Cu2ZnSnS4 (CZTS) thin films prepared by two different techniques was performed. One consists of sequential evaporation of the elemental metallic precursors under…

Co and CoO thin films were deposited by magnetron sputtering in the form of multilayers. They were irradiated with Ar and Si ion beams of different energies and fluences. The magnetic properties were investigated.

Materials Science · Physics 2016-08-22 A. S. Bhattacharyya

Platinum, Silver-Platinum embedded Zirconia (Pt/Ag-Pt ZrO2) thin films have been fabricated on silicon wafers and glass substrates using the plasma co-sputtering method. Zirconia thin films are of significant technological importance due to…

Copper deposition has been carried out at various time span on glass slide and silicon substrate by using indigenously developed unbalanced type DC magnetron sputtering system. The main objective of this work is to study the crystalline…

Applied Physics · Physics 2020-01-27 Soumik Kumar Kundu , Samit Karmakar , G. S. Taki

Metal hydrides have earlier been suggested for utilization in solar cells. With this as a motivation we have prepared thin films of yttrium hydride by reactive magnetron sputter deposition. The resulting films are metallic for low partial…

Materials Science · Physics 2011-09-14 T. Mongstad , C. Platzer-Björkman , S. Zh. Karazhanov , A. Holt , J. P. Maehlen , B. C. Hauback

We report the crystallographic texture of ZnO thin films comprising nanorods grown by a microwave irradiation assisted method. Different substrates were used, namely Si, Ge, metal coated Si, PMMA coated Si and ITO coated glass, to examine…

Materials Science · Physics 2017-09-29 Piyush Jaiswal , Sanjaya Brahma , K. S. Suresh , S. A. Shivashankar , Satyam Suwas

An experimental investigation was conducted to explore spectroscopic and structural characterization of semiconducting yttrium oxide thin film deposited at 623 K (+/- 5K) utilizing reactive pulsed direct current magnetron sputtering. Based…

Materials Science · Physics 2023-05-12 H. Arslan , I. Aulika , A. Sarakovskis , L. Bikse , M. Zubkins , A. Azarov , J. Gabrusenoks , J. Purans

The article consists of four sections all dealing with the computational modeling of the sputtering process. The first section deals with the difference in Bismuth atomic layer deposition at different polar angle and ion flounce. In the…

A theoretical framework is developed to describe experiments on the structure of epitaxial thin films, particularly niobium on sapphire. We extend the hypothesis of dynamical scaling to apply to the structure of thin films from its…

Statistical Mechanics · Physics 2009-11-07 Anita Mehta , R. A. Cowley

High–quality epitaxial YNixMn1-xO3 thin films have been successfully grown on SrTiO3 (100) (STO) by pulsed laser deposition. X-ray diffraction studies showed that the films deposited on STO are fully c-axis oriented and exhibit…

Strongly Correlated Electrons · Physics 2009-11-10 Yanwei Ma , M. Guilloux-Viry , O. Pena , C. Moure

We report the reduction in residual stress of AlN thin films and also the crystal structure, surface morphology and nanomechanical properties of magnetron sputtered as a function of substrate temperature (Ts, 35 - 600 ?C). The residual…

Materials Science · Physics 2017-07-25 Padmalochan Panda , R. Ramaseshan , N Ravi , G. Mangamma , Feby Jose , S. Dash , K. Suzuki , H. Suematsu
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