Related papers: Integrating MEMS and ICs
This paper presents an integrated multiphysics simulation approach of piezoelectric micropumps. Micropumps and micro blowers are essential devices in various cutting-edge industries like laboratory equipment, medical devices, and fuel…
Today, the realization of large optical interferometer schemes is necessary for many sophisticated information processing algorithms. In this work, we propose a modular interferometer architecture possible when the number of input channels…
As photonics breaks away from today's device level toward large scale of integration and complex systems-on-a-chip, concepts like monitoring, control and stabilization of photonic integrated circuits emerge as new paradigms. Here, we show…
Optical scanning is a prevalent technique for optical neural interfaces where light delivery with high spatial and temporal precision is desired. However, due to the sequential nature of point-scanning techniques, the settling time of…
This paper outlines the issues related to RF MEMS packaging and low actuation voltage. An original approach is presented concerning the modeling of capacitive contacts using multiphysics simulation and advanced characterization. A similar…
In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's…
Recording reliably extracellular neural activities isan essential prerequisite for the development of bioelectronicsand neuroprosthetic applications. Recently, a fully differential,2-stage, integrating pre-amplifier was proposed for…
Motivated by the dynamics of micro-scale oscillators with thermo-optical feedback, a simplified third order model, capturing the key features of these oscillators is developed, where each oscillator consists of a displacement variable…
A growing need exists for efficient and accurate methods for detecting defects in semiconductor materials and devices. These defects can have a detrimental impact on the efficiency of the manufacturing process, because they cause critical…
Digital MemComputing machines (DMMs), which employ nonlinear dynamical systems with memory (time non-locality), have proven to be a robust and scalable unconventional computing approach for solving a wide variety of combinatorial…
Iontronics combines ions as charge carriers with electronic-like operations, enabling unique information processing, chemical regulation, and enhanced bio-integrability. Standard simulation tools encounter difficulties in effectively…
Integrating nanophotonics with electronics promises revolutionary applications, from LiDAR to holographic displays. Although silicon photonics is maturing, realizing active nanophotonics in the ubiquitous bulk CMOS processes remains…
Multisets are an intuitive extension of the traditional concept of sets that allow repetition of elements, with the number of times each element appears being understood as the respective multiplicity. Recent generalizations of multisets to…
The globalization of the semiconductor industry has introduced security challenges to Integrated Circuits (ICs), particularly those related to the threat of Hardware Trojans (HTs) - malicious logic that can be introduced during IC…
The dynamic behavior of a capacitive micro-electro-mechanical (MEMS) accelerometer is evaluated by using a theoretical approach which makes use of a squeeze film damping (SFD) model and ideal gas approach. The study investigates the…
Integrated photonic technologies have recently shown significant advances, enabling the possibility to implement reconfigurable interferometers with increasing size. One of the main tasks to fully exploit the capabilities of reconfigurable…
The CMS Silicon Strip tracker is a very large scale tracker entirely based on silicon strip detectors technology. The integration of modules, electronics, mechanics and services has been completed within the last eighteen months; first…
Besides being the foundational material for microelectronics, in optics, crystalline silicon has long been used for making infrared lenses and mirrors. More recently, silicon has become the key material to achieve large-scale integration of…
Computational meta-imagers synergize metamaterial hardware with advanced signal processing approaches such as compressed sensing. Recent advances in artificial intelligence (AI) are gradually reshaping the landscape of meta-imaging. Most…
In the Reverse Engineering and Hardware Assurance domain, a majority of the data acquisition is done through electron microscopy techniques such as Scanning Electron Microscopy (SEM). However, unlike its counterparts in optical imaging,…