English
Related papers

Related papers: Advanced Fabrication Processes for Superconducting…

200 papers

We have fabricated arrays of High-T$_c$ Superconducting Quantum Interference Devices (SQUIDs) with randomly distributed loop sizes as sensitive antennas for Radio-Frequency (RF) waves. These sub-wavelength size devices known as…

We have integrated single and coupled superconducting transmon qubits into flip-chip modules. Each module consists of two chips -- one quantum chip and one control chip -- that are bump-bonded together. We demonstrate time-averaged…

Single-layer superconductors are ideal materials for fabricating superconducting nano devices. However, up to date, very few single-layer elemental superconductors have been predicted and especially no one has been successfully synthesized…

Materials Science · Physics 2019-08-06 Qinyan Gu , Dingyu Xing , Jian Sun

We studied phase separation in a single-crystalline antiferromagnetic superconductor Rb2Fe4Se5 (RFS) using a combination of scattering-type scanning near-field optical microscopy (s-SNOM) and low-energy muon spin rotation (LE-\mu SR). We…

The discovery of high-temperature superconductivity in FeSe/SrTiO3 has sparked significant interests in exploring new superconducting systems with engineered interfaces. Here, using molecular beam epitaxy growth, we successfully fabricate…

Superconductivity · Physics 2025-02-20 Yunkai Guo , Xuanyu Long , Jingming Yan , Zheng Liu , Qi-Kun Xue , Wei Li

We have used a neon focused-ion-beam to fabricate both nanoscale Nb Dayem bridges and NbN phase-slip nanowires located at the short-circuited end of quarter-wavelength coplanar waveguide resonators. The Dayem bridge devices show…

Superconductivity · Physics 2020-11-05 Jamie A. Potter , Oscar W. Kennedy , Jonathan C. Fenton , Paul A. Warburton

Inherent properties of superconducting Bi2Sr2CaCu2O8+x films, such as the high superconducting transition temperature Tc, efficient Josephson coupling between neighboring CuO layers, and fast quasiparticle relaxation dynamics, make them a…

Josephson junctions form the essential non-linearity for almost all superconducting qubits. The junction is formed when two superconducting electrodes come within $\sim$1 nm of each other. Although the capacitance of these electrodes is a…

The superconducting qubit is one of the promising directions in realizing fault-tolerant quantum computing (FTQC), which requires many high-quality qubits. To achieve this, it is desirable to leverage modern semiconductor industry…

Single-Flux Quantum (SFQ) digital logic is typically energy efficient and fast, and logic that uses ballistic and reversible principles provides a new platform to improve efficiency. We are studying long Josephson junctions (long JJs), SFQs…

Applied Physics · Physics 2026-04-08 Han Cai , Liuqi Yu , Waltraut Wustmann , Ryan Clarke , Kevin D. Osborn

Compared to traditional semiconductor control electronics (TSCE) located at room temperature, cryogenic single flux quantum (SFQ) electronics can provide qubit measurement and control alternatives that address critical issues related to…

We present fast tunable superconducting microwave resonators fabricated from planar NbN on a sapphire substrate. The $3\lambda/4$ wavelength resonators are tuning fork shaped and tuned by passing a dc current which controls the kinetic…

Applied Physics · Physics 2020-10-28 S. Mahashabde , E. Otto , D. Montemurro , S. de Graaf , S. Kubatkin , A. Danilov

We describe a fabrication stackup for digital logic with 16 superconducting NbTiN layers, self-shunted a-silicon barrier Josephson Junctions (JJs), and low loss, high-$\kappa$ tunable HZO capacitors. The stack enables 400 MJJ/cm$^2$ device…

Robust porous silicon substrates were employed for generating interconnected networks of superconducting ultrathin Nb nanowires. Scanning electron microscopy analysis was performed to investigate the morphology of the samples, which…

Superconductivity · Physics 2015-06-11 C. Cirillo , M. Trezza , F. Chiarella , A. Vecchione , V. P. Bondarenko , S. L. Prischepa , C. Attanasio

We report on the fabrication and electrical transport properties of superconducting quantum interference devices (SQUIDs) made from a (Bi_{1-x}Sb_x)_2Se_3 topological insulator (TI) nanoribbon (NR) connected with Pb0.5In0.5 superconducting…

Superconductivity · Physics 2018-01-25 Nam-Hee Kim , Hong-Seok Kim , Yiming Yang , Xingyue Peng , Dong Yu , Yong-Joo Doh

A reliable process has been developed for the fabrication of all-Nb single-electron circuits, based on spin-on glass planarization. The process steps are the in situ growth of Nb/AlOx/Nb sandwich, definition of the patterns of junctions,…

Mesoscale and Nanoscale Physics · Physics 2009-10-31 Alexey B. Pavolotsky , Thomas Weimann , Hansjoerg Scherer , Vladimir A. Krupenin , Juergen Niemeyer , Alexander B. Zorin

We fabricate and characterize superconducting through-silicon vias and electrodes suitable for superconducting quantum processors. We measure internal quality factors of a million for test resonators excited at single-photon levels, on…

We have developed a novel fabrication process for ultra-small, full-epitaxial NbN Josephson junctions on a silicon (Si) substrate. A full-epitaxial NbN/AlN/NbN tri-layer was grown on a Si (100) wafer with a (200)-oriented TiN buffer layer.…

Superconductivity · Physics 2020-12-02 Wei Qiu , Hirotaka Terai

Josephson junctions form the core circuit element in superconducting quantum computing circuits, single flux quantum digital logic circuits, and sensing devices such as SQUIDs. Aluminum oxide has typically been used as the tunnel barrier.…

This paper presents the fabrication and characterization of superconducting qubit components from titanium nitride (TiN) and aluminum nitride (AlN) layers to create Josephson junctions and superconducting resonators in an all-nitride…

Applied Physics · Physics 2025-08-05 Benedikt Schoof , Moritz Singer , Simon Lang , Harsh Gupta , Daniela Zahn , Johannes Weber , Marc Tornow