Related papers: Advanced Fabrication Processes for Superconducting…
We have developed a quantum annealing processor, based on an array of tunably coupled rf-SQUID flux qubits, fabricated in a superconducting integrated circuit process [1]. Implementing this type of processor at a scale of 512 qubits and…
A variety of superconductor integrated circuits comprising six ac-powered SFQ shift registers with a total of 27078 bits and 108500 Josephson junctions (JJs) per 5 mm x 5 mm chip have been designed, fabricated, and tested to characterize…
A fabrication process has been developed for fully planarized Nb-based superconducting inter-layer connections (vias) with minimum size down to 250 nm for superconductor very large scale integrated (VLSI) circuits with 8 and 10…
We report on a device that integrates eight superconducting transmon qubits in lambda/4 superconducting coplanar waveguide resonators fed from a common feedline. Using this multiplexing architecture, each resonator and qubit can be…
Superconductor electronics fabrication technology developed at MIT Lincoln Laboratory enables the development of VLSI digital circuits with millions of Josephson junctions per square centimeter. However, conventional DC and multi-phase AC…
As quantum computing processors increase in size, there is growing interest in developing cryogenic electronics to overcome significant challenges to system scaling. Single flux-quantum (SFQ) circuits offer a promising alternative to…
Superconducting quantum interference devices (SQUIDs) are used for applications ranging from sensitive magnetometers to low-temperature electronics and quantum computation. We introduce a planar nano SQUID that was made with a single…
We investigated current-voltage characteristics of unshunted and externally shunted Josephson junctions (JJs) with high critical current densities, Jc, in order to extract their basic parameters and statistical characteristics for JJ…
Superconductor electronics (SCE) appear promising for low energy applications. However, the achieved and projected circuit densities are insufficient for direct competition with CMOS technology. Original algorithms and nontraditional…
Recent progress of Reciprocal Quantum Logic (RQL) has renewed interest in AC powering of superconductor digital circuits, which had been abandoned since the famous IBM project of 1970s. In this work we propose and demonstrate new AC-biased…
Single flux quantum (SFQ) technology has garnered significant attention due to its low switching power and high operational speed. Researchers have been actively pursuing more advanced devices and technologies to further reduce the reliance…
We describe an approach to the integrated control and measurement of a large-scale superconducting multiqubit circuit using a proximal coprocessor based on the Single Flux Quantum (SFQ) digital logic family. Coherent control is realized by…
Modern Superconducting QUantum Interference Devices (SQUIDs) are commonly fabricated from either Al or Nb electrodes, with an in-situ oxidation process to create a weak link between them. However, common problems of such planar nano- and…
We present measurements of the self- and mutual inductance of NbN and bilayer NbN/Nb inductors with Nb ground plane(s) fabricated in an advanced process for superconductor electronics developed at MIT Lincoln Laboratory. In this process,…
Conventional semiconductor-based integrated circuits are gradually approaching fundamental scaling limits. Many prospective solutions have recently emerged to supplement or replace both the technology on which basic devices are built and…
We present the fabrication and characterization of transmon qubits formed from aluminum Josephson junctions on two different silicon-based substrates: (i) high-resistivity silicon (Si) and (ii) silicon-on-insulator (SOI). Key to the qubit…
To reach large-scale quantum computing, three-dimensional integration of scalable qubit arrays and their control electronics in multi-chip assemblies is promising. Within these assemblies, the use of superconducting interconnections, as…
For high-performance superconducting quantum devices based on Josephson junctions (JJs) decreasing lateral sizes is of great importance. Fabrication of sub-\mu m JJs is challenging due to non-flat surfaces with step heights of up to several…
Planar Josephson junctions (JJs) based on InSb nanoflags have recently emerged as an intriguing platform in superconducting electronics. This letter presents the fabrication and investigation of superconducting quantum interference devices…
Josephson junction transistors and 50-junction arrays with linear junction dimensions from 200 nm down to 70 nm were fabricated from standard Nb/AlOx/Nb trilayers. The fabrication process includes electron beam lithography, dry etching,…