Related papers: Optimization of Spatial Dose Distribution for Cont…
Despite the widespread use of Scanning Transmission Electron Microscopy (STEM) for observing the structure of materials at the atomic scale, a detailed understanding of some relevant electron beam damage mechanisms is limited. Recent…
We propose and analyze in detail a method to measure the in-air spatial spread parameter of clinical electron beams. Measurements are performed at the center of the beam and below the adjustable collimators sited in asymmetrical…
Modern electron linear accelerators are often designed to produce smooth bunch distributions characterized by their macroscopic ensemble-average moments. However, an increasing number of accelerator applications call for finer control over…
The line edge roughness (LER) becomes a issue of e-beam lithography when feature size is reduced into nanometers. Therefore, minimizing the LER is a important method to increase the density of circuit patterns. One of the possible ways is…
In optical metrology, grating-like structures are used as tools to evaluate the performance of lithographic techniques. In particular, several shape parameters characterize those structures. One of them, termed side-wall angle, suffers from…
Deterministic lateral displacement (DLD) is a popular technique for size-based separation of particles. One of the challenges in design of DLD chips is to eliminate the disturbance of fluid flow patterns caused by channel sidewalls…
When a sample is exposed using electron-beam lithography, the electrons scatter deep and far in the substrate, resulting in unwanted deposition of dose at both the nano- and the microscale. This proximity effect can be mitigated by…
Designing a freeform surface to reflect or refract light to achieve a target distribution is a challenging inverse problem. In this paper, we propose an end-to-end optimization strategy for an optical surface mesh. Our formulation leverages…
X-ray CT dose measurement has mainly been performed using an ionization chamber dosimeter. Therefore, the dose distribution has not been sufficiently studied. We investigated the importance of evaluating the two or three-dimensional dose…
I review the work of proximity effect correction (PEC) in electron-beam (e-beam) lithography with emphasis on dose modification and shape modification PEC techniques.
Programmable electron-beam scanning offers new opportunities to improve dose efficiency and suppress scan-induced artifacts in scanning transmission electron microscopy. Here, we systematically benchmark the impact of non-raster…
In this second part of a series we attempt to construct an empirical model that can mimick all experimental observations made regarding the role of an alternative interleaved scan pattern in STEM imaging on the beam damage in a specific…
We show how spatial dispersion can be used as a mechanism to customize the longitudinal profiles of electric fields inside modulated wire media, using a fast and remarkably accurate 1D inhomogeneous model. This customization gives fine…
The design of modular, passive, and static artificial metasurfaces to be used as electromagnetic skins (EMSs) of buildings for improving the coverage in urban millimeter-wave communication scenarios is addressed. Towards this end, an ad-hoc…
One of the main applications of electromagnetic metasurfaces (MSs) is to tailor spatial field distributions. The radiation pattern of a given source can be desirably modified upon reflection on an MS having proper spatial modulation of its…
Using kinetic Monte-Carlo simulations of a Solid-on-Solid model we investigate the influence of step edge diffusion (SED) and evaporation on Molecular Beam Epitaxy (MBE). Based on these investigations we propose two strategies to optimize…
We present a conditional diffusion model for electromagnetic inverse design that generates structured media geometries directly from target differential scattering cross-section profiles, bypassing expensive iterative optimization. Our 1D…
We investigate the influence of step edge diffusion (SED) and desorption on Molecular Beam Epitaxy (MBE) using kinetic Monte-Carlo simulations of the solid-on-solid (SOS) model. Based on these investigations we propose two strategies to…
Diffraction analysis in four dimensional scanning transmission electron microscopy now enables the mapping of local structures including symmetry, strain, and polarization of materials. However, measuring the distribution of these…
The single sideband (SSB) framework of analytical electron ptychography can account for the presence of residual geometrical aberrations induced by the probe-forming lens. However, the accuracy of this aberration correction method is highly…