A Review of Proximity Effect Correction in Electron-beam Lithography
Mesoscale and Nanoscale Physics
2015-09-18 v1
Authors:
Pengcheng Li
Abstract
I review the work of proximity effect correction (PEC) in electron-beam (e-beam) lithography with emphasis on dose modification and shape modification PEC techniques.
Cite
@article{arxiv.1509.05169,
title = {A Review of Proximity Effect Correction in Electron-beam Lithography},
author = {Pengcheng Li},
journal= {arXiv preprint arXiv:1509.05169},
year = {2015}
}
Related papers
View all related →
Optics · Physics
Electron Ptychography
L. Clark, P. D. Nellist
2025-03-17
Materials Science · Physics
Quantitative analysis of shadow X-ray Magnetic Circular Dichroism Photo-Emission Electron Microscopy
S. Jamet, S. Da Col, N. Rougemaille, A. Wartelle +9
2015-11-04
Materials Science · Physics
Electron beam irradiation effects on the structure and mechanical properties of PEEK. Part 1
Nurlan Almassov, Bauyrzhan Rakhadilov, Nurzhan Serik, Zhanna Alsar +6
2021-12-07
Image and Video Processing · Electrical Eng. & Systems
Lateral position correction in ptychography with sub-pixel accuracy
P. Dwivedi, A. P. Konijnenberg, S. F. Pereira, H. P. Urbach
2018-04-02
Materials Science · Physics
Physical-chemical characterization of a PEEK surface irradiated with electron beams
Zh. Alsar, B. Rakhadilov, N. Almasov, N. Serik +3
2021-12-07
Applied Physics · Physics
In Situ Study of the Impact of Aberration-Corrected Electron-Beam Lithography on the Electronic Transport of Suspended Graphene Devices
Naomi Mizuno, Fernando Camino, Xu Du
2020-04-06
Materials Science · Physics
Optimization of Spatial Dose Distribution for Controlling Sidewall Shape in Electron-beam Lithography
Pengcheng Li
2015-09-16
Accelerator Physics · Physics
Evaluation of radiative depolarization in the future Circular Electron-Positron Collider
Wenhao Xia, Zhe Duan, Desmond P. Barber, Yiwei Wang +2
2024-01-17
Mesoscale and Nanoscale Physics · Physics
Exploiting and engineering the optical field-enhancement in metal nanoparticle based circuits
Markus A. Mangold, Christoph Weiss, Beate Dirks, Alexander W. Holleitner
2010-04-30
High Energy Physics - Phenomenology · Physics
Radiative Corrections to Deep Inelastic Scattering in the Presence of an Additional Z' at LEP x LHC
J. Bluemlein, A. Leike, T. Riemann
2007-05-23
Materials Science · Physics
Full field electron spectromicroscopy applied to ferroelectric materials
N. Barrett, J. E. Rault, J. L. Wang, C. Mathieu +14
2018-06-14
Materials Science · Physics
Programmable Beam Control for Electron Energy-Loss Spectroscopy and Ptychography
Mariana Palos, Liam Spillane, Geri Topore, Yaqi Li +4
2025-09-16
Instrumentation and Detectors · Physics
Correcting for probe wandering by precession path segmentation
Gregory Nordahl, Lewys Jones, Emil Frang Christiansen, Kasper Aas Hunnestad +1
2025-12-12
Computer Vision and Pattern Recognition · Computer Science
Practical exposure correction via compensation
Long Ma, Nan An, Jinyuan Liu, Xin Fan +3
2026-04-29
High Energy Physics - Phenomenology · Physics
The impact of beamstrahlung on precision measurements at CLIC
Asesh K. Datta, Kyoungchul Kong, Konstantin T. Matchev
2009-10-09
Materials Science · Physics
Design of Electrostatic Aberration Correctors for Scanning Transmission Electron Microscopy
Stephanie M. Ribet, Steven E. Zeltmann, Karen C. Bustillo, Rohan Dhall +5
2023-03-20
Applied Physics · Physics
Beam-Shaping PEC Mirror Phase Corrector Design
Shaolin Liao
2020-07-08
Mesoscale and Nanoscale Physics · Physics
Nanoscale Fabrication by Intrinsic Suppression of Proximity-Electron Exposures and General Considerations for Easy & Effective Top-Down Fabrication
H. Bartolf, K. Inderbitzin, L. B. Gómez, A. Engel +1
2010-11-23
Optics · Physics
Electron Beam Aberration Correction Using Optical Near Fields
Andrea Konečná, F. Javier García de Abajo
2020-07-22
Instrumentation and Detectors · Physics
Emittance Minimization for Aberration Correction I: Aberration correction of an electron microscope without knowing the aberration coefficients
Desheng Ma, Steven E. Zeltmann, Chenyu Zhang, Zhaslan Baraissov +5
2024-12-31
Chemical Physics · Physics
Symmetries and selection rules in photoelectron chiral dichroism from tailored light
Ofer Neufeld
2025-05-23
High Energy Physics - Phenomenology · Physics
Parity violating asymmetries at future lepton colliders
Andrzej Czarnecki, William J. Marciano
2011-04-15
Materials Science · Physics
Investigating the convergence properties of iterative ptychography for atomic-resolution low-dose imaging
Tamazouzt Chennit, Songge Li, Hoelen L. Lalandec Robert, Christoph Hofer +5
2025-09-29
Optics · Physics
Theoretical and practical aspects of the design and production of synthetic holograms for transmission electron microscopy
Paolo Rosi, Federico Venturi, Giacomo Medici, Claudia Menozzi +9
2022-02-02
High Energy Physics - Experiment · Physics
Top and EW Physics at the LHeC
Zhiqing Zhang
2015-11-18