Using kinetic Monte-Carlo simulations of a Solid-on-Solid model we investigate the influence of step edge diffusion (SED) and evaporation on Molecular Beam Epitaxy (MBE). Based on these investigations we propose two strategies to optimize MBE-growth. The strategies are applicable in different growth regimes: during layer-by-layer growth one can reduce the desorption rate using a pulsed flux. In three-dimensional (3D) growth the SED can help to grow large, smooth structures. For this purpose the flux has to be reduced with time according to a power law.
@article{arxiv.cond-mat/9810007,
title = {Evaporation and Step Edge Diffusion in MBE},
author = {S. Schinzer and M. Sokolowski and M. Biehl and W. Kinzel},
journal= {arXiv preprint arXiv:cond-mat/9810007},
year = {2009}
}