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Thermal silica is a common dielectric used in all silicon-photonic circuits. And bound hydroxyl ions (Si-OH) can provide a significant component of optical loss in this material on account of the wet nature of the thermal oxidation process.…

We demonstrate wheel-shaped silicon optomechanical resonators for resonant operation in ambient air. The high finesse of optical whispering gallery modes (loaded optical Q factor above 500,000) allows for efficient transduction of the wheel…

Silicon nitride (SiN) drumhead resonators offer a promising platform for thermal sensing due to their high mechanical quality factor and the high temperature sensitivity of their resonance frequency. As such, gaining an understanding of…

Applied Physics · Physics 2021-11-12 Nikaya Snell , Chang Zhang , Gengyang Mu , Alexandre Bouchard , Raphael St-Gelais

Titanium nitride is an attractive material for a range of superconducting quantum-circuit applications owing to its low microwave losses, high surface inductance, and chemical stability. The physical properties and device performance,…

Applied Physics · Physics 2023-11-27 Ran Gao , Wenlong Yu , Hao Deng , Hsiang-Sheng Ku , Zhisheng Li , Minghua Wang , Xiaohe Miao , Yue Lin , Chunqing Deng

The coherence properties of mechanical resonators are often limited by multiple unavoidable forms of loss -- including phonon-phonon and phonon-defect scattering -- which result in the scattering of sound into other resonant modes and into…

Quantum Physics · Physics 2016-12-30 Xunnong Xu , Seunghwi Kim , Gaurav Bahl , Jacob M. Taylor

The performance of superconducting circuits for quantum computing is limited by materials losses. In particular, coherence times are typically bounded by two-level system (TLS) losses at single photon powers and millikelvin temperatures.…

Ultralow dissipation plays an important role in sensing applications and exploring macroscopic quantum phenomena using micro-and nano-mechanical systems. We report a diamagnetic-levitated micro-mechanical oscillator operating at a low…

We present a highly reflective, sub-wavelength-thick membrane resonator featuring high mechanical quality factor and discuss its applicability for cavity optomechanics. The $88.5~\text{nm}$ thin stoichiometric silicon-nitride membrane,…

This study investigates the use of spiral geometry in superconducting resonators to achieve high intrinsic quality factors, crucial for applications in quantum computation and quantum sensing. We fabricated Archimedean Spiral Resonators…

Quantum Physics · Physics 2025-04-08 Yusuke Tominaga , Shotaro Shirai , Yuji Hishida , Hirotaka Terai , Atsushi Noguchi

We investigate the dynamics of mechanical resonators subject to excitations comprising of an oscillating or harmonic part, whose amplitude decays exponentially in time. We call these complex frequency excitations and show that the resulting…

Classical Physics · Physics 2025-12-11 Wenbo Li , Skriptyan Syuhri , Pablo Tarazaga , Raj Kumar Pal

We demonstrate photonic devices based on standard 3C SiC epitaxially grown on silicon. We achieve high optical confinement by taking advantage of the high stiffness of SiC and undercutting the underlying silicon substrate. We demonstrate a…

We demonstrate a silicon photonic platform using thin buried oxide silicon-on-insulator (SOI) substrates using localized substrate removal. We show high confinement silicon strip waveguides, micro-ring resonators and nanotapers using this…

Optics · Physics 2010-03-30 Suresh Sridaran , Sunil A. Bhave

UV and visible photonics enable applications ranging from spectroscopic sensing to communication and quantum information processing. Photonics structures in these wavelength regimes, however, tend to experience higher loss than their IR…

We present measurements of the dissipation and frequency shift in nanomechanical gold resonators at temperatures down to 10 mK. The resonators were fabricated as doubly-clamped beams above a GaAs substrate and actuated magnetomotively.…

Mesoscale and Nanoscale Physics · Physics 2015-05-14 A. Venkatesan , K. J. Lulla , M. J. Patton , A. D. Armour , C. J. Mellor , J. R. Owers-Bradley

Free-standing silicon nitride (SiN) mechanical resonators are of central interests in applications such as temperature and mass sensing, and for fundamental optomechanical reasearch. Understanding thermal coupling between a membrane…

Applied Physics · Physics 2021-07-08 Chang Zhang , Mathieu Giroux , Thea Abdul Nour , Raphael St-Gelais

Feedback-based control techniques are useful tools in precision measurements as they allow to actively shape the mechanical response of high quality factor oscillators used in force detection measurements. In this paper we implement a…

Applied Physics · Physics 2021-07-28 Antonio Borrielli , Michele Bonaldi , Enrico Serra , Pasqualina Maria Sarro , Bruno Morana

We introduce a novel physical mechanism for achieving giant quality factors ($Q$-factors) in finite-length periodic arrays of subwavelength optical resonators. The underlying physics is based on interference between the band-edge mode and…

High-aspect-ratio mechanical resonators are pivotal in precision sensing, from macroscopic gravitational wave detectors to nanoscale acoustics. However, fabrication challenges and high computational costs have limited the…

Mesoscale and Nanoscale Physics · Physics 2024-06-17 Andrea Cupertino , Dongil Shin , Leo Guo , Peter G. Steeneken , Miguel A. Bessa , Richard A. Norte

We experimentally demonstrate the high-sensitivity optical monitoring of a micro-mechanical resonator and its cooling by active control. Coating a low-loss mirror upon the resonator, we have built an optomechanical sensor based on a very…

We study theoretically dynamics of a driven-dissipative qubit-resonator system. Specifically, a transmon qubit is coupled to a transmission-line resonator; this system is considered to be probed via a resonator, by means of either…

Mesoscale and Nanoscale Physics · Physics 2018-07-25 S. N. Shevchenko , D. S. Karpov