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In this paper, 20nm - 80nm channel length (Lch) InGaAs gate- all-around (GAA) nanowire MOSFETs with record high on- state and off-state performance have been demonstrated by equivalent oxide thickness (EOT) and nanowire width (WNW) scaling…

Mesoscale and Nanoscale Physics · Physics 2012-12-19 J. J. Gu , X. W. Wang , H. Wu , J. Shao , A. T. Neal , M. J. Manfra , R. G. Gordon , P. D. Ye

The first inversion-mode gate-all-around (GAA) III-V MOSFETs are experimentally demonstrated with a high mobility In0.53Ga0.47As channel and atomic-layer-deposited (ALD) Al2O3/WN gate stacks by a top-down approach. A well-controlled InGaAs…

Mesoscale and Nanoscale Physics · Physics 2016-11-17 Jiangjiang Gu , Yiqun Liu , Yanqing Wu , Robert Colby , Roy G. Gordon , Peide D. Ye

In this paper, we have experimentally demonstrated, for the first time, III-V 4D transistors with vertically stacked InGaAs nanowire (NW) channels and gate-all-around (GAA) architecture. Novel process technology enabling the transition from…

Mesoscale and Nanoscale Physics · Physics 2012-12-19 J. J. Gu , X. W. Wang , J. Shao , A. T. Neal , M. J. Manfra , R. G. Gordon , P. D. Ye

Gate-all-around (GAA) nanowire (NW) field-effect transistor (FET) is a promising device architecture due to its superior gate controllability than that of the conventional FinFET architecture. The significantly higher electron mobility of…

Materials Science · Physics 2023-10-18 Linqiang Xu , Lianqiang Xu , Qiuhui Li , Shibo Fang , Ying Li , Ying Guo , Aili Wang , Ruge Quhe , Yee Sin Ang , Jing Lu

In this work, we demonstrate atomic-layer-deposited (ALD) single-channel indium oxide (In2O3) gate-all-around (GAA) nanoribbon FETs in a back-end-of-line (BEOL) compatible process. A maximum on-state current (ION) of 19.3 mA/{\mu}m (near 20…

Difficulties in obtaining high-performance p-type transistors and gate insulator charge-trapping effects present two major challenges for III-V complementary metal-oxide semiconductor (CMOS) electronics. We report a p-GaAs nanowire…

Mesoscale and Nanoscale Physics · Physics 2018-09-28 A. R. Ullah , F. Meyer , J. G. Gluschke , S. Naureen , P. Caroff , P. Krogstrup , J. Nygard , A. P. Micolich

InGaAs gate-all-around nanowire MOSFETs with channel length down to 50nm have been experimentally demonstrated by top-down approach. The nanowire size-dependent transport properties have been systematically investigated. It is found that…

Mesoscale and Nanoscale Physics · Physics 2015-06-04 Jiangjiang J. Gu , Heng Wu , Yiqun Liu , Adam T. Neal , Roy G. Gordon , Peide D. Ye

This letter reports high-performance $\mathrm{\beta} Ga2O3 thin channel MOSFETs with T-gate and degenerately doped source/drain contacts regrown by MOCVD. Gate length scaling (LG= 160-200 nm) leads to a peak drain current (ID,MAX) of 285…

Nano-membrane tri-gate beta-gallium oxide (\b{eta}-Ga2O3) field-effect transistors (FETs) on SiO2/Si substrate fabricated via exfoliation have been demonstrated for the first time. By employing electron beam lithography, the minimum-sized…

Applied Physics · Physics 2022-01-05 Hagyoul Bae , Tae Joon Park , Jinhyun Noh , Wonil Chung , Mengwei Si , Shriram Ramanathan , Peide D. Ye

We develop a robust and versatile platform to define nanostructures at oxide interfaces via patterned top gates. Using LaAlO$_3$/SrTiO$_3$ as a model system, we demonstrate controllable electrostatic confinement of electrons to nanoscale…

Mesoscale and Nanoscale Physics · Physics 2015-04-10 Srijit Goswami , Emre Mulazimoglu , Lieven M. K. Vandersypen , Andrea D. Caviglia

We report Beta-AlGaO/Ga2O3 tri-gate heterostructure MOSHEMTs incorporating a thin 5 nm Al2O3 gate oxide layer for improved gate control and reduced leakage. The devices were fabricated on AlGaO/GaO heterostructures grown by ozone MBE on…

Materials Science · Physics 2026-01-21 Noor Jahan Nipu , Chinmoy Nath Saha , Uttam Singisetti

In this work, we demonstrate high performance indium-tin-oxide (ITO) transistors with the channel thickness down to 1 nm and ferroelectric Hf0.5Zr0.5O2 as gate dielectric. On-current of 0.243 A/mm is achieved on sub-micron gate-length ITO…

Applied Physics · Physics 2020-12-24 Mengwei Si , Joseph Andler , Xiao Lyu , Chang Niu , Suman Datta , Rakesh Agrawal , Peide D. Ye

The atomic-level structural detail and the quantum effects are becoming crucial to device performance as the emerging advanced transistors, representatively GAAFETs, are scaling down towards sub-3nm nodes. However, a multiscale simulation…

Applied Physics · Physics 2023-08-17 Yue-Yang Liu , Haoran Lu , Zirui Wang , Hui-Xiong Deng , Lang Zeng , Zhongming Wei , Jun-Wei Luo , Runsheng Wang

Few-layer phosphorene MOSFETs with 0.3-um-long gate and 15-nm-thick Al2O3 gate insulator was found to exhibit a forward-current cutoff frequency of 2 GHz and a maximum oscillation frequency of 8 GHz after de-embedding for the parasitic…

Mesoscale and Nanoscale Physics · Physics 2016-10-19 Xi Luo , Kuanchen Xiong , James C. M. Hwang , Yuchen Du , PeiDe Ye

A Low-Power Variable Gain (VG) mm-Wave Low Noise Amplifier (LNA) is designed and simulated in a 28-nm CMOS process. The LNA utilizes a simple, yet novel, technique presented in this paper to vary the small-signal output resistance to…

Signal Processing · Electrical Eng. & Systems 2025-12-02 Harshith Reddy , Pankaj Arora

We report on the growth of axial InAs-on-GaAs nanowire heterostructures on silicon by molecular beam epitaxy using 20 nm diameter Au catalysts. First, the growth parameters of the GaAs nanowire segment were optimized to achieve a pure…

Materials Science · Physics 2017-08-17 Daria V. Beznasyuk , Eric Robin , Martien Den Hertog , Julien Claudon , Moïra Hocevar

As silicon transistors scale toward future technology nodes, three-dimensional architectures -- including gate-all-around (GAA) nanoribbon and complementary field-effect transistors (CFETs) -- require channel widths in the tens of…

We present a systematic characterization of fluctuations in submicron Hall devices based on GaAs/AlGaAs two-dimensional electron gas heterostructures at temperatures between 1.5 K to 60 K. A large variety of noise spectra, from 1/f to…

Mesoscale and Nanoscale Physics · Physics 2007-05-23 Yongqing Li , Cong Ren , Peng Xiong , Stephan von Molnar , Yuzo Ohno , Hideo Ohno

GaAs was central to the development of quantum devices but is rarely used for nanowire-based quantum devices with InAs, InSb and SiGe instead taking the leading role. p-type GaAs nanowires offer a path to studying strongly-confined 0D and…

Mesoscale and Nanoscale Physics · Physics 2017-04-14 A. R. Ullah , J. G. Gluschke , P. Krogstrup , C. B. Sørensen , J. Nygård , A. P. Micolich

Nanoscale semiconductor materials have been extensively investigated as the channel materials of transistors for energy-efficient low-power logic switches to enable scaling to smaller dimensions. On the opposite end of transistor…

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