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Related papers: Versatile sputtering technology for Al2O3 gate ins…

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We fabricate and characterize dual-gated graphene field-effect transistors (FETs) using Al2O3 as top-gate dielectric. We use a thin Al film as a nucleation layer to enable the atomic layer deposition of Al2O3. Our devices show mobility…

Mesoscale and Nanoscale Physics · Physics 2009-11-13 Seyoung Kim , Junghyo Nah , Insun Jo , Davood Shahrjerdi , Luigi Colombo , Zhen Yao , Emanuel Tutuc , Sanjay K. Banerjee

We report on an extensive structural and electrical characterization of under-gate dielectric oxide insulators Al2O3 and HfO2 grown by Atomic Layer Deposition (ALD). We elaborate the ALD growth window for these oxides, finding that the…

We report on the transport properties of hybrid devices obtained by depositing graphene on a LaAlO3/SrTiO3 oxide junction hosting a 4 nm-deep two-dimensional electron system. At low graphene-oxide inter-layer bias the two electron systems…

Mesoscale and Nanoscale Physics · Physics 2016-07-14 I. Aliaj , I. Torre , V. Miseikis , E. di Gennaro , A. Sambri , A. Gamucci , C. Coletti , F. Beltram , F. M. Granozio , M. Polini , V. Pellegrini , S. Roddaro

We report Beta-AlGaO/Ga2O3 tri-gate heterostructure MOSHEMTs incorporating a thin 5 nm Al2O3 gate oxide layer for improved gate control and reduced leakage. The devices were fabricated on AlGaO/GaO heterostructures grown by ozone MBE on…

Materials Science · Physics 2026-01-21 Noor Jahan Nipu , Chinmoy Nath Saha , Uttam Singisetti

Electronic properties of low dimensional superconductors are determined by many-body-effects. This physics has been studied traditionally with superconducting thin films, and in recent times with two-dimensional electron gases (2DEGs) at…

We demonstrate the atomic layer deposition of high-quality HfO2 film on graphene and report the magnitude of remote oxide phonon (ROP) scattering in dual-oxide graphene transistors. Top gates with 30 nm HfO2 oxide layer exhibit excellent…

Materials Science · Physics 2010-09-17 Ke Zou , Xia Hong , Derek Keefer , Jun Zhu

We discuss transport through double gated single and few layer graphene devices. This kind of device configuration has been used to investigate the modulation of the energy band structure through the application of an external perpendicular…

Mesoscale and Nanoscale Physics · Physics 2015-05-13 S. Russo , M. F. Craciun , M. Yamamoto , S. Tarucha , A. F. Morpurgo

We report on our investigation of the electrical properties of metal/Al2O3/GaN metal-insulator-semiconductor (MIS) capacitors. We determined the conduction band offset and interface charge density of the alumina/GaN interface by analyzing…

Mesoscale and Nanoscale Physics · Physics 2015-05-30 Michele Esposto , Sriram Krishnamoorthy , Digbijoy N. Nath , Sanyam Bajaj , Ting-Hsiang Hung , Siddharth Rajan

We report dual-gate modulation of topological insulator field-effect transistors (TI FETs) made on Bi2Te3 thin flakes with integration of atomic-layer-deposited (ALD) Al2O3 high-k dielectric. Atomic force microscopy study shows that ALD…

Materials Science · Physics 2011-08-08 Han Liu , Peide D. Ye

Deposition of various materials onto graphene without causing any disorder is highly desirable for graphene applications. Especially, sputtering is a versatile technique to deposit various metals and insulators for spintronics, and indium…

Despite the prevalence of sputter deposition in the microelectronics industry, it has seen very limited applications for graphene electronics. In this letter, we report systematic investigation of the sputtering induced damages in graphene…

Mesoscale and Nanoscale Physics · Physics 2014-10-29 Ching-Tzu Chen , Emanuele A. Casu , Martin Gajek , Simone Raoux

Dielectrics featuring a high relative permittivity, i.e., high-k dielectrics, have become the standard insulators in gate architectures, enhancing the electrical performance of both room temperature and cryogenic electronics. This study…

A gate induced insulating behavior at zero magnetic field is observed in a high mobility suspended monolayer graphene near the charge neutrality point. The graphene device initially cleaned by a current annealing technique was undergone a…

Mesoscale and Nanoscale Physics · Physics 2021-03-03 Cenk Yanik , Vahid Sazgari , Abdulkadir Canatar , Yaser Vaheb , Ismet I. Kaya

Nano-membrane tri-gate beta-gallium oxide (\b{eta}-Ga2O3) field-effect transistors (FETs) on SiO2/Si substrate fabricated via exfoliation have been demonstrated for the first time. By employing electron beam lithography, the minimum-sized…

Applied Physics · Physics 2022-01-05 Hagyoul Bae , Tae Joon Park , Jinhyun Noh , Wonil Chung , Mengwei Si , Shriram Ramanathan , Peide D. Ye

We studied the magneto-transport properties of graphene prepared by exfoliation on a III V semiconductor substrate. Tuneability of the carrier density of graphene was achieved by using a doped GaAs substrate as a back-gate. A GaAs/AlAs…

Mesoscale and Nanoscale Physics · Physics 2014-08-25 Mirosław Woszczyna , Miriam Friedemann , Klaus Pierz , Thomas Weimann , Franz J. Ahlers

Realisation of practical spintronic devices relies on the ability to create and detect pure spin currents. In graphene-based spin valves this is usually achieved by injection of spin-polarized electrons from ferromagnetic contacts via a…

Electron-beam deposition of an insulating granular aluminium or of an off-stoichiometric amorphous alumina layer on a $SrTiO_3$ surface is a simple way to get a metallic interface from insulating materials. No heating nor specific…

Materials Science · Physics 2016-09-21 Julien Delahaye , Thierry Grenet

Electrical transport in monolayer graphene on SrTiO3 (STO) thin film is examined in order to promote gate-voltage scaling using a high-k dielectric material. The atomically flat surface of thin STO layer epitaxially grown on Nb-doped STO…

Materials Science · Physics 2016-02-17 Jeongmin Park , Haeyong Kang , Kyeong Tae Kang , Yoojoo Yun , Young Hee Lee , Woo Seok Choi , Dongseok Suh

Metallization of Schottky surface gates by sputtering Au on strained Si/SiGe heterojunctions enables the depletion of the two dimensional electron gas (2DEG) at a relatively small voltage while maintaining an extremely low level of leakage…

Mesoscale and Nanoscale Physics · Physics 2009-11-11 G. D. Scott , M. Xiao , E. T. Croke , E. Yablonovitch , H. W. Jiang

We measure transport through a Ga[Al]As heterostructure at temperatures between 0.1 K and 30 K. Increasing the temperature enhances the electron-electron scattering rate and viscous effects in the two-dimensional electron gas arise. To…

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