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We present measurements of silicon (Si) metal-oxide-semiconductor (MOS) nanostructures that are fabricated using a process that facilitates essentially arbitrary gate geometries. Stable Coulomb blockade behavior free from the effects of…

Enhancement-mode Si/SiGe electron quantum dots have been pursued extensively by many groups for \revEdit{their} potential in quantum computing. Most of the reported dot designs utilize multiple metal-gate layers and use Si/SiGe…

Mesoscale and Nanoscale Physics · Physics 2016-09-21 T. M. Lu , J. K. Gamble , R. P. Muller , E. Nielsen , D. Bethke , G. A. Ten Eyck , T. Pluym , J. R. Wendt , J. Dominguez , M. P. Lilly , M. S. Carroll , M. C. Wanke

We present transport measurements of a tunable silicon metal-oxide-semiconductor double quantum dot device with lateral geometry. Experimentally extracted gate-to-dot capacitances show that the device is largely symmetric under the gate…

We report a robust process for fabrication of surface-gated Si/SiGe quantum dots (QDs) with an integrated superconducting single-electron transistor (S-SET) charge sensor. A combination of a deep mesa etch and AlOx backfill is used to…

Mesoscale and Nanoscale Physics · Physics 2011-04-08 Mingyun Yuan , Feng Pan , Zhen Yang , T. J. Gilheart , Fei Chen , D. E. Savage , M. G. Lagally , M. A. Eriksson , A. J. Rimberg

We report the fabrication and characterization of a gate-defined double quantum dot formed in a Si/SiGe nanomembrane. In the past, all gate-defined quantum dots in Si/SiGe heterostructures were formed on top of strain-graded virtual…

We report the fabrication and electrical characterization of depletion-mode quantum dots in a two-dimensional hole gas (2DHG) in intrinsic silicon. We use fixed charge in a SiO$_2$/Al$_2$O$_3$ dielectric stack to induce a 2DHG at the…

Mesoscale and Nanoscale Physics · Physics 2018-02-06 Sergey V. Amitonov , Paul C. Spruijtenburg , Max W. S. Vervoort , Wilfred G. van der Wiel , Floris A. Zwanenburg

We report on the fabrication and characterization of quantum dot devices in a Schottky-gated silicon/silicon-germanium two-dimensional electron gas (2DEG). The dots are confined laterally inside an etch-defined channel, while their…

Mesoscale and Nanoscale Physics · Physics 2015-06-25 K A Slinker , K L M Lewis , C C Haselby , S Goswami , L J Klein , J O Chu , S N Coppersmith , Robert Joynt , R H Blick , Mark Friesen , M A Eriksson

We report on a quantum dot device design that combines the low disorder properties of undoped SiGe heterostructure materials with an overlapping gate stack in which each electrostatic gate has a dominant and unique function -- control of…

A split gate technique is used to form a lateral quantum dot in a two-dimensional electron gas of a modulation-doped silicon/silicon-germanium heterostructure. e-beam lithography was employed to produce split gates. By applying negative…

We demonstrate a 12 quantum dot device fabricated on an undoped Si/SiGe heterostructure as a proof-of-concept for a scalable, linear gate architecture for semiconductor quantum dots. The device consists of 9 quantum dots in a linear array…

Mesoscale and Nanoscale Physics · Physics 2016-12-07 D. M. Zajac , T. M. Hazard , X. Mi , E. Nielsen , J. R. Petta

We develop quantum dots in a single layered MOS structure using an undoped Si/SiGe wafer. By applying a positive bias on the surface gates, electrons are accumulated in the Si channel. Clear Coulomb diamond and double dot charge stability…

Mesoscale and Nanoscale Physics · Physics 2013-11-13 T. Obata , K. Takeda , J. Kamioka , T. Kodera , W. M. Akhtar , K. Sawano , S. Oda , Y. Shiraki , S. Tarucha

Strained Ge ($\epsilon$-Ge) and strained Si ($\epsilon$-Si) buried quantum wells have enabled advanced spin-qubit quantum processors. However, in the absence of suitable lattice-matched substrates, $\epsilon$-Ge and $\epsilon$-Si are…

Solid-state quantum technologies such as quantum dot qubits and quantum electrical metrology circuits rely on quantum phenomena at ultra-low energies, making them highly sensitive to various forms of environmental noise. Conventional…

We report the fabrication and electrical characterization of a single electron transistor in a modulation doped silicon/silicon-germanium heterostructure. The quantum dot is fabricated by electron beam lithography and subsequent reactive…

In this letter we not only show improvement in the performance but also in the reliability of 30nm thick biaxially strained SiGe (20%Ge) channel on Si p-MOSFETs. Compared to Si channel, strained SiGe channel allows larger hole mobility…

Mesoscale and Nanoscale Physics · Physics 2015-05-20 Shweta Deora , Abhijeet Paul , R. Bijesh , Jeff Huang , Gerhard Klimeck , Gennadi Bersuker , P. D. Krisch , Raj Jammy

Even as today's most prominent spin-based qubit technologies are maturing in terms of capability and sophistication, there is growing interest in exploring alternate material platforms that may provide advantages, such as enhanced qubit…

Mesoscale and Nanoscale Physics · Physics 2019-03-20 Will J. Hardy , C. Thomas Harris , Yi-Hsin Su , Yen Chuang , Jonathan Moussa , Leon N. Maurer , Jiun-Yun Li , Tzu-Ming Lu , Dwight R. Luhman

Due to presence of magnetic field gradient needed for coherent spin control, dephasing of single-electron spin qubits in silicon quantum dots is often dominated by $1/f$ charge noise. We investigate theoretically fluctuations of ground…

Mesoscale and Nanoscale Physics · Physics 2024-08-09 Marcin Kępa , Niels Focke , Łukasz Cywiński , Jan. A. Krzywda

We investigate coherent transport in Si:MOSFETs with nominal gate lengths 50 to 100nm and various widths at very low temperature. Independent of the geometry, localized states appear when G=e^{2}/h and transport is dominated by resonant…

Mesoscale and Nanoscale Physics · Physics 2009-10-31 M. Sanquer , M. Specht , L. Ghenim , S. Deleonibus , G. Guegan

We introduce a silicon metal-oxide-semiconductor quantum dot architecture based on a single polysilicon gate stack. The elementary structure consists of two enhancement gates separated spatially by a gap, one gate forming a reservoir and…

Mesoscale and Nanoscale Physics · Physics 2019-03-07 S. Rochette , M. Rudolph , A. -M. Roy , M. Curry , G. Ten Eyck , R. Manginell , J. Wendt , T. Pluym , S. M. Carr , D. Ward , M. P. Lilly , M. S. Carroll , M. Pioro-Ladrière

We propose and demonstrate experimentally a novel design of single-electron quantum dots. The structure consists of a narrow band gap quantum well that can undergo a transition from the hole accumulation regime to the electron inversion…

Other Condensed Matter · Physics 2009-11-11 G. M. Jones , B. H. Hu , C. H. Yang , M. J. Yang , Y. B. Lyanda-Geller
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