Related papers: Calibration of shielded microwave probes using bul…
We have developed a noncontact method for measurement of the interline capacitance in Cu/low-k interconnect. It is based on a miniature test vehicle with net capacitance of a few femto-Farads formed by two 20-\mu m-long parallel wires…
The nonlinear surface impedance of a thin superconducting strip carrying a microwave current has been calculated numerically from first principles based upon flux penetration due to a current-induced critical state. The calculations…
Molecular and atomic imaging required the development of electron and scanning probe microscopies to surpass the physical limits dictated by diffraction. Nano-infrared experiments and pico-cavity tip-enhanced Raman spectroscopy imaging…
A metamaterial composed of thin metallic strips as an efficient broadband absorber in the mid-infrared spectrum is investigated. Here the matching between dielectric and geometrical properties of the individual elements is critical to…
In order to develop a new structure microwave probe, the fabrication of AFM probe on the GaAs wafer was studied. A waveguide was introduced by evaporating Au film on the top and bottom surfaces of the GaAs AFM probe. A tip having 8…
We describe here the implementation of an interferometer-based microwave impedance microscope on a home-built tuning-fork based scanning probe microscope (SPM). Tuning-fork based SPMs, requiring only two electrical contacts for…
Microwave sensors can probe intrinsic material properties of analytes in a microfluidic channel at physiologically relevant ion concentrations. While microwave sensors have been used to detect single cells and microparticles in earlier…
Planar superconducting microwave resonators are key elements in a variety of technical applications and also act as sensitive probes for microwave spectroscopy of various materials of interest. Here superconducting Pb is a suitable material…
In the past years quasi-conformal mapping has been typically used to design broadband electromagnetic cloaks. However, this technique has some inherit practical limitations such as the lateral beam shift, rendering the device visible or…
Near-field scanning optical microscopy is a powerful technique for imaging below the diffraction limit, which has been extensively used in bio-medical imaging and nanophotonics. However, when the electromagnetic fields under measurement are…
Microwave impedance microscopy (MIM) is a near-field imaging technique that has been used to visualize the local conductivity of materials with nanoscale resolution across the GHz regime. In recent years, MIM has shown great promise for the…
We present a numerical method to model electric field sensitive scanning probe microscopy measurements which allows for a tip of arbtrary shape and invokes image charges to exactly account for a sample dielectric overlayer. The method is…
In recent years, interesting materials have emerged which are only available as micron-scale flakes, and whose novel physics might be better understood through broadband microwave spectroscopy; examples include twisted bilayer graphene [1],…
We present a method for noncontact, noninvasive measurements of dielectric constant, k, of 100-nm- to 1.5-\mu m-thick blanket low-k interconnect films on up to 300 mm in diameter wafers. The method has about 10 micron sampling spot size,…
We report the instrumentation and experimental results of a cryogenic scanning microwave impedance microscope. The microwave probe and the scanning stage are located inside the variable temperature insert of a helium cryostat. Microwave…
Micromanipulations, perfusions and measurements performed using glass microelectrodes filled with an electrolyte is a conventional technique for experimental morphological and membrane electrophysiological studies at a single cell and…
We describe the design, fabrication and testing of a surface-electrode ion trap, which incorporates microwave waveguides, resonators and coupling elements for the manipulation of trapped ion qubits using near-field microwaves. The trap is…
We present a method for extracting high-spatial resolution dielectric constant data at microwave frequencies. A scanning near field microwave microscope probes a sample and acquires data in the form of the frequency and quality factor…
Scattering scanning near-field optical microscopy enables optical imaging and characterization of plasmonic devices with nanometer-scale resolution well below the diffraction limit. This technique enables developers to probe and understand…
In this work, a complementary resonant structure etched on the ground plane of a microstrip line is proposed for characterizing dielectric materials. The resonant sensor is designed to operate in S-band (2 to 4 GHz). The sensor is designed…