Related papers: High Aspect Pattern Formation by Integration of Mi…
Recently-demonstrated high-quality three-dimensional (3D) subsurface laser processing inside crystalline silicon (c-Si) wafers opens a door to a wide range of novel applications in multidisciplinary research areas. Using this technique, a…
We demonstrate the back-end integration of broadband, high-NA GaN micro-lenses by micro-assembly onto non-native semiconductor substrates. We developed a highly parallel micro-fabrication process flow to suspend micron scale plano-convex…
Chemical vapor deposited graphene is nanopatterned by a spherical block-copolymer etch mask. The use of spherical rather than cylindrical block copolymers allows homogeneous patterning of cm-scale areas without any substrate surface…
Methods to fabricate and characterize monodisperse magnetic nanoplatelets for fluid/bio-based applications based on spintronic thin-film principles are a challenge. This is due to the required top-down approach where the transfer of…
The reliability of perovskite material LSCF to be used as cathode parts in solid oxide fuel cells also relies on its mechanical properties. Adequate surface conditions are desired when the as-sintered porous thin films are subjected to…
We report on the fabrication and mid-infrared transmission properties of free-standing thin metal films, periodically patterned with holes at periods down to 2 microns and area of 3x3 mm2. Square grids were fabricated by electron beam…
We propose a light-sheet based plane-selective fabrication technique that enables fabrication of nano-electronic/nano-fluidic components (nano-wires, nano-waveguides, nano-gratings and nano-channels) with specificity, selectivity on a…
The 3D printing technology based on digital light processing (DLP) has highlighted its powerful manufacturing capabilities for optical components. However, the printing structure obtained by DLP based down projection printing is easily…
The heterogeneous integration of lithium niobate photonic waveguide devices onto a silicon nitride waveguide platform via a transfer-printing approach has been demonstrated for the first time. A fabrication process was developed to make…
Electrodes with higher transparency that can also align liquid crystals (LCs) are of high importance for improved costs and energy consumption of LC displays. Here we demonstrate for the first time alignment of liquid crystals on…
Metasurfaces enable precise control over the properties of light and hold promise for commercial applications. However, fabricating visible metasurfaces suitable for high-volume production is challenging and requires scalable processes.…
In this paper, we will report our achievements in developing large area patterning of multilayered ceramic green composites using roller embossing. The aim of our research is to pattern large area ceramic green composites using a modified…
The advances in novel low-loss "on insulator" integrated photonics platforms beyond silicon, such as thin-film LiNbO3, LiTaO3, GaP and BaTiO3 have demonstrated major potential across a wide range of applications, due to their unique…
In additive manufacturing, infill structures are commonly used to reduce the weight and cost of a solid part. Currently, most infill structure generation methods are based on the conventional 2.5-axis printing configuration, which, although…
We demonstrate noncontact, high quality surface modification with spatial resolution of ~20 nm. The nanowriting is based on the interaction between the surface and the tip of an Atomic force microscope illuminated by a focused laser beam…
Patterning of diamond-like carbon (DLC) and DLC:metal nanocomposites is of interest for an increasing number of applications. We demonstrate a nanoimprint lithography process based on silicon containing thermoplastic resist combined with…
Titanium silicide is a key contact material in advanced three-dimensional semiconductor device architectures. Here, we examine the formation of ultrathin Ti-silicide on Si(100) using a combination of non-destructive in-situ and ex-situ ion…
An in situ tip preparation procedure compatible with ultra-low temperature and high magnetic field scanning tunneling microscopes is presented. This procedure does not require additional preparation techniques such as thermal annealing or…
Magneto-plasmonic nanostructures have emerged as promising candidates for advanced sensing applications. However, conventional fabrication methods, such as lithography and sputtering, often involve high costs and complex processes. This…
Reducing the fabrication cost of photonic integrated circuits while maintaining low optical losses and technological simplicity is essential for their wider implementation. In conventional manufacturing methods, the dielectric cladding…