Related papers: Integrated RF MEMS/CMOS Devices
Over the past few years, significant growth has been observed in using MEMS based passive components in the RF microelectronics domain, especially in transceiver components. This is due to some excellent properties of the MEMS devices like…
Tunable, low-loss, narrowband, and frequency-stabilized filters play a critical role in the realization of transceivers for efficient signal processing in telecommunications and sensing applications in the presence of strong interference…
Microelectromechanical system (MEMS) based on-chip resonators offer great potential for high frequency signal processing circuits like reference oscillators and filters. This is due to their exceptional features like small size, large…
Photonic integrated circuits that exploit nonlinear optics in order to generate and process signals all-optically have achieved performance far superior to that possible electronically - particularly with respect to speed. We review the…
Wafer-level testing is an important step for process and quality control of electronic chips in integrated circuit (IC) manufacturing which occurs before packaging. The process of wafer probing in its conventional contacting schemes,…
This article presents several design techniques to fabricate micro-electro-mechanical systems (MEMS) using standard complementary metal-oxide semiconductor (CMOS) processes. They were applied to fabricate high yield CMOS-MEMS shielded…
A High-Q microwave (K band) MEMS resonator is presented, which empolys substrate integrated waveguide (SIW) and micromachined via-hole arrays by ICP process. Nonradiation dielectric waveguide (NRD) is formed by metal filled via-hole arrays…
Over the past few years, microelectromechanical system (MEMS) based on-chip resonators have shown significant potential for sensing and high frequency signal processing applications. This is due to their excellent features like small size,…
Photonic methods of radio-frequency waveform generation and processing provide performance and flexibility over electronic methods due to the ultrawide bandwidth offered by the optical carriers. However, they suffer from lack of integration…
This study investigates a high Q-factor spiral inductor fabricated by the CMOS (complementary metal oxide semiconductor) process and a post-process. The spiral inductor is manufactured on silicon substrate using the 0.35 micrometers CMOS…
We present design, fabrication and characterization of a MEMS VCSEL which utilizes a silicon-on-insulator wafer for the microelectromechanical system and encapsulates the MEMS by direct InP wafer bonding, which improves the protection and…
In RF (Radio Frequency) domain, one of the limitations of using MEMS (Micro Electromechanical Systems) switching devices for medium power applications is RF power. Failure phenomena appear even for 500 mW. A design of MEMS switched…
In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's…
Realizing multiply resonant photonic crystal cavities with large free spectral range is key to achieve integrated devices with highly efficient nonlinear response, such as frequency conversion, four-wave mixing, and parametric oscillation.…
This paper presents a new class of micro-electro-mechanical system (MEMS) C-band filters for 5G front-ends. The filter is comprised of resonators based on the first-order asymmetric Lamb wave (A1) mode in thin film lithium niobate. Two…
We demonstrate chip-scale flat-top filters at near-infrared wavelengths using negative index photonic crystal based Mach Zehnder interferometers. Supported by full three-dimensional numerical simulations, we experimentally demonstrate a new…
The subwavelength mode volumes of plasmonic filters are well matched to the small size of state-of-the-art active pixels (~ 1 {\mu}m) in CMOS image sensor arrays used in portable electronic devices. Typical plasmonic filters exhibit broad…
A new class of wideband bandpass filters based on using thick metallic bars as microwave resonators, instead of common microstrip lines, is presented. These bars provide a series of advantages over fully planar printed technologies,…
Photonic integration, advanced functionality, reconfigurability, and high RF performance are key features in integrated microwave photonic systems that are still difficult to achieve simultaneously. In this work, we demonstrate an…
We describe a highly-integrated CMOS transceiver for active structural health monitoring (SHM). The chip actuates piezoelectric transducers and also senses ultrasound waves received by the same or another transducer. The transmitter uses an…