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Electrostatic actuators are simple but important switching devices for MEMS applications. Due to the difficulties associated with the electrostatic nonlinearity, precise mathematical description is often hard to obtain for the dynamics of…

Dynamical Systems · Mathematics 2012-01-27 Yisong Yang , Ruifeng Zhang , Le Zhao

This paper presents the design, simulation, and analytical modeling of the single proposed axis MEMSbased capacitive accelerometer. Analytical modeling has been done for frequency and displacement sensitivity. The performance of the…

Systems and Control · Electrical Eng. & Systems 2021-11-09 Veena. S , Newton Rai , H. L. Suresh , Veda Sandeep Nagaraja

We propose an energy-based framework to analyze the statics and dynamics of a ferroelectric negative capacitance-hybrid Microelectromechanical System (MEMS) actuator. A mapping function that relates the charge on the ferroelectric to…

Systems and Control · Electrical Eng. & Systems 2022-06-28 Raghuram Tattamangalam Raman , Jeffin Shibu , Revathy Padmanabhan , Arvind Ajoy

A common way to analyze electrostatic microelectromechanical systems (MEMS) actuators is to use their energy-displacement landscape. Here, we describe an alternative approach to analyze electrostatic MEMS actuators using their energy-charge…

Applied Physics · Physics 2020-10-26 Raghuram Tattamangalam Raman , Arvind Ajoy , Revathy Padmanabhan

This paper presents the analysis of an efficient alternative interface circuit for MEMS electrostatic energy harvesters. It is entirely composed by diodes and capacitors. Based on modeling and simulation, the anti-phase gap-closing…

Applied Physics · Physics 2017-09-27 Binh Duc Truong , Cuong Phu Le , Einar Halvorsen

We propose a framework to model ferroelectric negative capacitance: electrostatic Micro Electro Mechanical Systems (MEMS) hybrid actuators and analyze their dynamic (step input) response. Using this framework, we report the first proposal…

Applied Physics · Physics 2020-11-05 Raghuram TR , Arvind Ajoy

Micro-Electro-Mechanical Systems (MEMS) normally have fixed or moving structures with cross-sections of the order of microns ($\mu m$) and lengths of the order of tens or hundreds of microns. These structures are often plates or array of…

Computational Physics · Physics 2007-05-23 N. Majumdar , S. Mukhopadhyay

An excitation method for MEMS devices with planar electrodes is described. The stationary part of the device (the stator) consists of three electrode arrays arranged in the 'ABCABC' order. 'A', 'B', and 'C' carry time-independent potentials…

Chaotic Dynamics · Physics 2013-04-04 Pavel Kornilovitch , Robert Walmsley

Microelectromechanical systems (MEMS) can offer a competitive alternative for conventional technology in electrical precision measurements. This article summarises recent work in development of MEMS solutions for electrical metrology.…

Instrumentation and Detectors · Physics 2007-07-05 Antti Manninen , Anu Karkkainen , Nadine Pesonen , Aarne Oja , Heikki Seppa

This document contains two presentations which describe the working principles of a class of electrostatic multidimensional sensors and force actuators. The subject of the study is the search of the most effective methods for measuring the…

Instrumentation and Detectors · Physics 2007-05-23 Giorgio Fontana

The present study presents a new micro electromagnetic actuator utilizing a PDMS membrane with a magnet. The actuator is integrated with micro coils to electromagnetically actuate the membrane and results in a large deflection. The micro…

Other Computer Science · Computer Science 2008-12-18 C. -Y. Lee , Zgen-Hui Chen , Hsien-Tseng Chang , Chiang-Ho Cheng , Chih-Yung Wen

We study the local well-posedness of the solution to a coupled nonlinear elliptic-parabolic system which models electrical discharge in a Micro-Electro-Mechanical System (MEMS). A simple MEMS capacitor device contains two plates acting as…

Analysis of PDEs · Mathematics 2026-02-26 Heiko Gimperlein , Runan He , Andrew A. Lacey

We suggest electronic circuits with memristors (resistors with memory) that operate as memcapacitors (capacitors with memory) and meminductors (inductors with memory). Using a memristor emulator, the suggested circuits have been built and…

Instrumentation and Detectors · Physics 2014-11-20 Yuriy V. Pershin , Massimiliano Di Ventra

Temporal modulation unlocks possibilities to dynamically control and modify the response of electromagnetic systems. Employing explicit dependencies of circuit or surface parameters on time enables the engineering of systems with…

Systems and Control · Electrical Eng. & Systems 2023-03-01 Grigorii Ptitcyn , Mohammad Sajjad Mirmoosa , Silvi Hrabar , Sergey Tretyakov

In this paper, we report the advantage of using AC actuating signal for driving MEMS actuators instead of DC voltages. The study is based upon micro mirror devices used in digital mode for optical switching operation. When the pull-in…

Other Computer Science · Computer Science 2008-02-22 H. Camon , C. Ganibal , N. Rapahoz , M. Trzmiel , C. Pisella , C. Martinez , K. Gilbert , S. Valette

In this letter, a reactance-less mono-stable oscillator is introduced for the first time using memristors. By replacing bulky inductors and capacitors with memristors, the novel mono-stable oscillator can be an area-efficient solution for…

Emerging Technologies · Computer Science 2012-07-05 A. T. Bahgat , K. N. Salama

Electrostatic confinement in semiconductors provides a flexible platform for the emulation of interacting electrons in a two-dimensional lattice, including in the presence of gauge fields. This combination offers the potential to realize a…

Mesoscale and Nanoscale Physics · Physics 2019-06-04 T. Hensgens , U. Mukhopadhyay , P. Barthelemy , S. Fallahi , G. C. Gardner , C. Reichl , W. Wegscheider , M. J. Manfra , L. M. K. Vandersypen

This paper presents theoretical analysis of a MEMS electrostatic energy harvester configured as the Bennet's doubler. Steady-state operation of the doubler circuit can be approximated by a right-angled trapezoid Q-V cycle. A similarity…

Applied Physics · Physics 2017-09-27 Binh Duc Truong , Cuong Phu Le , Einar Halvorsen

Microelectromechanical systems (MEMS) that require contact of moving parts to implement complex functions exhibit limits to their performance and reliability. Here, we advance our particle tracking method to measure MEMS motion in operando…

Applied Physics · Physics 2018-11-21 Craig R. Copeland , Craig D. McGray , Jon Geist , Samuel M. Stavis

A novel frequency modulated MEMS magnetometer is presented. The new device is inspired by the magnetic force microscopy technique, it combines standard MEMS technology with magnetic elements to obtain a magnetometer with potential for low…

Instrumentation and Detectors · Physics 2021-09-08 Federico Maspero , Gabriele Gatani , Simone Cuccurullo , Riccardo Bertacco
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