Related papers: A High-Q Microwave MEMS Resonator
We present results for a photonic microwave resonator designed and fabricated at 17.4GHz with a record high Quality factor (Q = 26,400) at room temperature over a mode volume smaller than one cubic wavelength. The cavity is uniquely…
We report on the design and fabrication of a new type of microtoroid high-Q silica resonators monolithically coupled to on-chip silicon nanowire waveguides. In order to enable monolithic waveguide coupling, the microtoroid geometry is…
Circuit quantum electrodynamics (QED) employs superconducting microwave resonators as quantum buses. In circuit QED with semiconductor quantum-dot-based qubits, increasing the resonator impedance is desirable as it enhances the coupling to…
We describe the fabrication and measurement of microwave coplanar waveguide resonators with internal quality factors above 10 million at high microwave powers and over 1 million at low powers, with the best low power results approaching 2…
We report on the microwave (mw) properties of coaxial cavities built by using bulk MgB2 superconductor prepared by reactive liquid Mg infiltration technology. We have assembled a homogeneous cavity, by using an outer MgB2 cylinder and an…
Over the past few years, significant growth has been observed in using MEMS based passive components in the RF microelectronics domain, especially in transceiver components. This is due to some excellent properties of the MEMS devices like…
We present a compact on-chip resonator enhanced silicon-MSM photodetector in $850$ $nm$ wavelength band for communication and lab-on-chip bio-sensing applications. We report the highest responsivity of 0.81 A/W for a 5 $\mu m$ long device.…
In many hybrid quantum systems, a superconducting circuit is required that combines DC-control with a coplanar waveguide (CPW) microwave resonator. The strategy thus far for applying a DC voltage or current bias to microwave resonators has…
We demonstrate fabrication of a microtoroid resonator of a high-quality (high-Q) factor using femtosecond laser three-dimensional (3D) micromachining. A fiber taper is reliably assembled to the microtoroid using CO2 laser welding.…
High Q optical resonators are a key component for ultra-narrow linewidth lasers, frequency stabilization, precision spectroscopy and quantum applications. Integration of these resonators in a photonic waveguide wafer-scale platform is key…
We report on fabrication of a microtoroid resonator of high-quality (high-Q) factor integrated with an on-chip microheater. Both the microresonator and microheater are fabricated using femtosecond laser three-dimensional (3D)…
We have fabricated superconducting microwave resonators in a lumped element geometry using single crystal silicon dielectric parallel plate capacitors with C >2 pF. Aluminum devices with resonant frequencies between 4.0 and 6.5 GHz…
We demonstrate photonic devices based on standard 3C SiC epitaxially grown on silicon. We achieve high optical confinement by taking advantage of the high stiffness of SiC and undercutting the underlying silicon substrate. We demonstrate a…
Developing the field of neuromorphic quantum computing necessitates designing scalable quantum memory devices. Here, we propose a superconducting quantum memory device in the microwave regime, termed as a microwave quantum memcapacitor. It…
We introduce a microwave circuit architecture for quantum signal processing combining design principles borrowed from high-Q 3D resonators in the quantum regime and from planar structures fabricated with standard lithography. The resulting…
Ultra-high-Q resonators are fundamentally important to optics and microwave photonics. Up to now, it is still very challenging to boost the Q factor while maintaining a compact size for a resonator. Herein, we proposed and demonstrated an…
We present a device demonstrating a lithographically patterned transmon integrated with a micromachined cavity resonator. Our two-cavity, one-qubit device is a multilayer microwave integrated quantum circuit (MMIQC), comprising a basic unit…
The Substrate Integrated Waveguide (SIW) technology is a very promising technique with which we can take the advantages of both waveguides and planar transmission lines. Therefore, in [2.1-3] GHz band various microwave components and…
We report on fabrication of on-chip calcium fluoride (CaF2) microdisk resonators using water-assisted femtosecond laser micromachining. Focused ion beam (FIB) milling is used to create ultra-smooth sidewalls. The quality (Q)-factors of the…
This paper introduces a novel atmospheric pressure and frequency-tunable microwave plasma jet utilizing evanescent-mode cavity resonator technology. The design uses a substrate-integrated waveguide approach, where two PCB substrates are…