Monolithically integrated waveguide-coupled silica microtoroids
Optics
2015-12-23 v1
Abstract
We report on the design and fabrication of a new type of microtoroid high-Q silica resonators monolithically coupled to on-chip silicon nanowire waveguides. In order to enable monolithic waveguide coupling, the microtoroid geometry is inverted such that the resonator is formed by thermal reflow at the circumference of a hole etched in a suspended SiO2 membrane. This configuration is shown to be conducive to integration with a fully functional Silicon Photonics technology platform.
Cite
@article{arxiv.1510.07407,
title = {Monolithically integrated waveguide-coupled silica microtoroids},
author = {Jens Richter and Maziar Pourabdollah Nezhad and Jeremy Witzens},
journal= {arXiv preprint arXiv:1510.07407},
year = {2015}
}