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This paper is the first report of the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO$_{3}$) MEMS resonator array up to 500{\deg}C in air. After a high-temperature burn-in treatment, device…

Sputtered Nb thin-film LC resonators for low frequencies at 0.5 MHz have been fabricated and tested in the temperature range 0.05--1 K in magnetic fields up to 30 mT. Their Q value increases towards decreasing temperature as sqrt(T) and…

Instrumentation and Detectors · Physics 2009-11-06 A. Finne , L. Groenberg , R. Blaauwgeers , V. B. Eltsov , G. Eska , M. Krusius , J. J. Ruohio , R. Schanen , I. Suni

Here we find the increase in 1/f noise of superconducting resonators at low temperatures to be completely incompatible with the standard tunneling model (STM) of Two Level Systems (TLS), which has been used to describe low-frequency noise…

High quality micro- and nano-mechanical resonators are widely used in sensing, communications and timing, and have future applications in quantum technologies and fundamental studies of quantum physics. Crystalline thin-films are…

We have discovered a memory effect in the temperature sensitivity of a cryogenic sapphire microwave resonator, at the heart of the ultra-stable Cryogenic Sapphire Oscillators (CSOs). Such effect is due to the relaxaxtion time of Cr3+…

Instrumentation and Detectors · Physics 2026-05-11 Mohamed-Yacine Hachani , Christophe Fluhr , Benoit Dubois , Guillaume Le Têtu , Gonzalo Cabodevila , Vincent Giordano

Carrier Selective (CS) Silicon solar cells are increasingly explored as a low cost alternative to PN junction Silicon solar cells. While the recent trends on power conversion efficiency are encouraging, the temperature coefficient and hence…

Applied Physics · Physics 2021-01-28 Nithin Chatterji , Aldrin Antony , Pradeep R. Nair

We have fabricated superconducting microwave resonators in a lumped element geometry using single crystal silicon dielectric parallel plate capacitors with C >2 pF. Aluminum devices with resonant frequencies between 4.0 and 6.5 GHz…

Mesoscale and Nanoscale Physics · Physics 2011-06-21 S. Weber , K. W. Murch , D. H. Slichter , R. Vijay , I. Siddiqi

The development and characterisation of a piezoelectric actuated high-frequency MEMS scanning mirror with on-chip frequency tuning capability is reported. The resonant scanner operates at frequencies in excess of 140 kHz, generating scan…

Applied Physics · Physics 2022-06-15 Paul Janin , Deepak Uttamchandani , Ralf Bauer

We propose a method for frequency stabilization of a resonant opto-mechanical oscillator utilizing the different temperature and strain dependence of the optical and mechanical modes. In particular, we show that the temperature of the…

Optics · Physics 2010-06-29 A. B. Matsko , A. A. Savchenkov , V. S. Ilchenko , D. Seidel , L. Maleki

The position noise spectra of six drums on a single chip were measured on a single cooldown below 1.3 kelvin. Cryostat temperatures as low as 0.7 mK were achieved. The temperature dependence of the resonance frequency and linewidth of the…

Mesoscale and Nanoscale Physics · Physics 2026-02-26 Amir Youssefi , Mahdi Chegnizadeh , Francis Bettsworth , Richard Pedurand , Eddy Collin , Tobias J. Kippenberg , Andrew Fefferman

We have designed and characterized micro-electro-mechanical systems (MEMS) for applications at low temperatures. The mechanical resonators were fabricated using a surface micromachining process. The devices consist of a pair of parallel…

Mesoscale and Nanoscale Physics · Physics 2013-01-24 M. Gonzalez , P. Zheng , E. Garcell , Y. Lee , H. B. Chan

High-aspect-ratio mechanical resonators are pivotal in precision sensing, from macroscopic gravitational wave detectors to nanoscale acoustics. However, fabrication challenges and high computational costs have limited the…

Mesoscale and Nanoscale Physics · Physics 2024-06-17 Andrea Cupertino , Dongil Shin , Leo Guo , Peter G. Steeneken , Miguel A. Bessa , Richard A. Norte

We demonstrate that soft-clamped silicon nitride strings with large aspect ratio can be operated at \si{\milli\kelvin} temperatures. The quality factors ($Q$) of two measured devices show consistent dependency on the cryostat temperature,…

Resonance properties of nanomechanical resonators based on doubly clamped silicon nanowires, fabricated from silicon-on-insulator and coated with a thin layer of aluminum, were experimentally investigated. Resonance frequencies of the…

Mesoscale and Nanoscale Physics · Physics 2018-11-14 D. E. Presnov , S. Kafanov , A. A. Dorofeev , I. V. Bozhev , A. S. Trifonov , Yu. A. Pashkin , V. A. Krupenin

Measuring thermodynamic quantities can be easy or not, depending on the system that is being studied. For a macroscopic object, measuring temperatures can be as simple as measuring how much a column of mercury rises when in contact with the…

Quantum Physics · Physics 2015-09-15 O. P. de Sá Neto , M. C. de Oliveira , G. J. Milburn

A split post dielectric resonator in a copper enclosure and a single post dielectric resonator in a cavity with superconducting end-plates have been constructed and used for the complex permittivity measurements of single crystal…

Materials Science · Physics 2012-09-04 Janina E. Mazierska , Mohan V. Jacob , Dimitri O. Ledenyov , Jerzy Krupka

Microelectromechanical (MEMS) resonators are widely used in timekeeping applications, and recent advances in fabrication, materials, and encapsulation technology have advanced their potential as high stability frequency references. However,…

This article reports the design, the breadboarding and the validation of an ultra-stable Cryogenic Sapphire Oscillator operated in an autonomous cryocooler. The objective of this project was to demonstrate the feasibility of a frequency…

Instrumentation and Detectors · Physics 2014-11-20 S. Grop , P. Y. Bourgeois , N. Bazin , Y. Kersale , E. Rubiola , C. Langham , M. Oxborrow , D. Clapton , S. Walker , J. De Vicente , V. Giordano

Fabrication processes involving anhydrous hydrofluoric vapor etching are developed to create high-$Q$ aluminum superconducting microwave resonators on free-standing silicon membranes formed from a silicon-on-insulator wafer. Using this…

Quantum Physics · Physics 2016-01-18 Paul B. Dieterle , Mahmoud Kalaee , Johannes Fink , Oskar Painter

This paper describes a temperature sensitivity or thermal sag measurement of a geometric anti-spring based micro-electromechanical system (MEMS) gravimeter (Wee-g). The Wee-g MEMS gravimeter is currently fabricated on a (100) silicon wafer…