Related papers: Electrostatically-Driven Resonator on Soi with Imp…
This paper is the first report of the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO$_{3}$) MEMS resonator array up to 500{\deg}C in air. After a high-temperature burn-in treatment, device…
Sputtered Nb thin-film LC resonators for low frequencies at 0.5 MHz have been fabricated and tested in the temperature range 0.05--1 K in magnetic fields up to 30 mT. Their Q value increases towards decreasing temperature as sqrt(T) and…
Here we find the increase in 1/f noise of superconducting resonators at low temperatures to be completely incompatible with the standard tunneling model (STM) of Two Level Systems (TLS), which has been used to describe low-frequency noise…
High quality micro- and nano-mechanical resonators are widely used in sensing, communications and timing, and have future applications in quantum technologies and fundamental studies of quantum physics. Crystalline thin-films are…
We have discovered a memory effect in the temperature sensitivity of a cryogenic sapphire microwave resonator, at the heart of the ultra-stable Cryogenic Sapphire Oscillators (CSOs). Such effect is due to the relaxaxtion time of Cr3+…
Carrier Selective (CS) Silicon solar cells are increasingly explored as a low cost alternative to PN junction Silicon solar cells. While the recent trends on power conversion efficiency are encouraging, the temperature coefficient and hence…
We have fabricated superconducting microwave resonators in a lumped element geometry using single crystal silicon dielectric parallel plate capacitors with C >2 pF. Aluminum devices with resonant frequencies between 4.0 and 6.5 GHz…
The development and characterisation of a piezoelectric actuated high-frequency MEMS scanning mirror with on-chip frequency tuning capability is reported. The resonant scanner operates at frequencies in excess of 140 kHz, generating scan…
We propose a method for frequency stabilization of a resonant opto-mechanical oscillator utilizing the different temperature and strain dependence of the optical and mechanical modes. In particular, we show that the temperature of the…
The position noise spectra of six drums on a single chip were measured on a single cooldown below 1.3 kelvin. Cryostat temperatures as low as 0.7 mK were achieved. The temperature dependence of the resonance frequency and linewidth of the…
We have designed and characterized micro-electro-mechanical systems (MEMS) for applications at low temperatures. The mechanical resonators were fabricated using a surface micromachining process. The devices consist of a pair of parallel…
High-aspect-ratio mechanical resonators are pivotal in precision sensing, from macroscopic gravitational wave detectors to nanoscale acoustics. However, fabrication challenges and high computational costs have limited the…
We demonstrate that soft-clamped silicon nitride strings with large aspect ratio can be operated at \si{\milli\kelvin} temperatures. The quality factors ($Q$) of two measured devices show consistent dependency on the cryostat temperature,…
Resonance properties of nanomechanical resonators based on doubly clamped silicon nanowires, fabricated from silicon-on-insulator and coated with a thin layer of aluminum, were experimentally investigated. Resonance frequencies of the…
Measuring thermodynamic quantities can be easy or not, depending on the system that is being studied. For a macroscopic object, measuring temperatures can be as simple as measuring how much a column of mercury rises when in contact with the…
A split post dielectric resonator in a copper enclosure and a single post dielectric resonator in a cavity with superconducting end-plates have been constructed and used for the complex permittivity measurements of single crystal…
Microelectromechanical (MEMS) resonators are widely used in timekeeping applications, and recent advances in fabrication, materials, and encapsulation technology have advanced their potential as high stability frequency references. However,…
This article reports the design, the breadboarding and the validation of an ultra-stable Cryogenic Sapphire Oscillator operated in an autonomous cryocooler. The objective of this project was to demonstrate the feasibility of a frequency…
Fabrication processes involving anhydrous hydrofluoric vapor etching are developed to create high-$Q$ aluminum superconducting microwave resonators on free-standing silicon membranes formed from a silicon-on-insulator wafer. Using this…
This paper describes a temperature sensitivity or thermal sag measurement of a geometric anti-spring based micro-electromechanical system (MEMS) gravimeter (Wee-g). The Wee-g MEMS gravimeter is currently fabricated on a (100) silicon wafer…