We demonstrate three-dimensional (3-D) nanoimprint lithography using master samples initially structured by two-photon lithography. Complex geometries like micro prisms, micro parabolic concentrators, micro lenses and other micrometer sized objects with nanoscale features are three-dimensionally fabricated using two-photon lithography. Stamps made out of polydimethylsiloxane are then cast using the two-photon lithographically structured samples as master samples. Hereby, expensive serial nano 3-D printing is transformed into scalable parallel 3-D nanoimprint lithography. Furthermore, the transition from two-photon lithography to imprint lithography increases the freedom in substrate and ink choice significantly. We demonstrate printing on textured surfaces as well as residue-free printing with silver ink using capillary action.
Cite
@article{arxiv.1702.04012,
title = {Three-dimensional nanoimprint lithography using two-photon lithography master samples},
author = {Rebecca Saive and Colton R. Bukowsky and Harry A. Atwater},
journal= {arXiv preprint arXiv:1702.04012},
year = {2017}
}