Sub-$\mu$ structured Lotus Surfaces Manufacturing
Other Computer Science
2008-12-18 v1
Abstract
Sub-micro structured surfaces allow modifying the behavior of polymer films or components. Especially in micro fluidics a lotus-like characteristic is requested for many applications. Structure details with a high aspect ratio are necessary to decouple the bottom and the top of the functional layer. Unlike to stochastic methods, patterning with a LIGA-mold insert it is possible to structure surfaces very uniformly or even with controlled variations (e.g. with gradients). In this paper we present the process chain to realize polymer sub-micro structures with minimum lateral feature size of 400 nm and up to 4 micrometers high.
Keywords
Cite
@article{arxiv.0805.0854,
title = {Sub-$\mu$ structured Lotus Surfaces Manufacturing},
author = {M. Worgull and M. Heckele and T. Mappes and B. Matthis and G. Tosello and T. Metz and J. Gavillet and P. Koltay and H. N. Hansen},
journal= {arXiv preprint arXiv:0805.0854},
year = {2008}
}
Comments
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)