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Steep-slope Hysteresis-free Negative Capacitance MoS2 Transistors

Mesoscale and Nanoscale Physics 2018-01-31 v2 Materials Science

Abstract

The so-called Boltzmann Tyranny defines the fundamental thermionic limit of the subthreshold slope (SS) of a metal-oxide-semiconductor field-effect transistor (MOSFET) at 60 mV/dec at room temperature and, therefore, precludes the lowering of the supply voltage and the overall power consumption. Adding a ferroelectric negative capacitor to the gate stack of a MOSFET may offer a promising solution to bypassing this fundamental barrier. Meanwhile, two-dimensional (2D) semiconductors, such as atomically thin transition metal dichalcogenides (TMDs) due to their low dielectric constant, and ease of integration in a junctionless transistor topology, offer enhanced electrostatic control of the channel. Here, we combine these two advantages and demonstrate for the first time a molybdenum disulfide (MoS2) 2D steep slope transistor with a ferroelectric hafnium zirconium oxide layer (HZO) in the gate dielectric stack. This device exhibits excellent performance in both on- and off-states, with maximum drain current of 510 {\mu}A/{\mu}m, sub-thermionic subthreshold slope and is essentially hysteresis-free. Negative differential resistance (NDR) was observed at room temperature in the MoS2 negative capacitance field-effect-transistors (NC-FETs) as the result of negative capacitance due to the negative drain-induced-barrier-lowering (DIBL). High on-current induced self-heating effect was also observed and studied.

Keywords

Cite

@article{arxiv.1704.06865,
  title  = {Steep-slope Hysteresis-free Negative Capacitance MoS2 Transistors},
  author = {Mengwei Si and Chun-Jung Su and Chunsheng Jiang and Nathan J. Conrad and Hong Zhou and Kerry D. Maize and Gang Qiu and Chien-Ting Wu and Ali Shakouri and Muhammad A. Alam and Peide D. Ye},
  journal= {arXiv preprint arXiv:1704.06865},
  year   = {2018}
}

Comments

23 pages, 14 figures

R2 v1 2026-06-22T19:24:45.852Z