Piezoelectric SPDT NEMS Switch for Complementary Logic

Off-state current leakage and switching delay has become the main challenge for continued complementary metal-oxide-semiconductor (CMOS) technology scaling. Previous work proposes a "see-saw" relay structure to mimic the operation of CMOS. This paper presents a novel single-pole double-throw (SPDT) switch structure based on AlN piezoelectric cantilever beam to improve the former "see-saw" relay structure. Geometry parameters are given and key switch parameters such as actuation voltage, switching time and contact force have been calculated and compared with previous "see-saw" relay structure. Analysis and design process is shown and micro-fabrication process is described as well.