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Electrically Controlled Reversible Strain Modulation in MoS$_2$ Field-effect Transistors via an Electro-mechanically Coupled Piezoelectric Thin Film

Applied Physics 2023-04-27 v1

Abstract

Strain can efficiently modulate the bandgap and carrier mobilities in two-dimensional (2D) materials. Conventional mechanical strain-application methodologies that rely on flexible, patterned or nano-indented substrates are severely limited by low thermal tolerance, lack of tunability and/or poor scalability. Here, we leverage the converse piezoelectric effect to electrically generate and control strain transfer from a piezoelectric thin film to electro-mechanically coupled ultra-thin 2D MoS2_2. Electrical bias polarity change across the piezoelectric film tunes the nature of strain transferred to MoS2_2 from compressive \sim0.23% to tensile \sim0.14% as verified through peak shifts in Raman and photoluminescence spectroscopies and substantiated by density functional theory calculations. The device architecture, built on a silicon substrate, uniquely integrates an MoS2_2 field-effect transistor on top of a metal-piezoelectric-metal stack enabling strain modulation of transistor drain current 130×\times, on/off current ratio 150×\times, and mobility 1.19×\times with high precision, reversibility and resolution. Large, tunable tensile (1056) and compressive (-1498) strain gauge factors, easy electrical strain modulation, high thermal tolerance and substrate compatibility make this technique promising for integration with silicon-based CMOS and micro-electro-mechanical systems.

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Cite

@article{arxiv.2304.13154,
  title  = {Electrically Controlled Reversible Strain Modulation in MoS$_2$ Field-effect Transistors via an Electro-mechanically Coupled Piezoelectric Thin Film},
  author = {Abin Varghese and Adityanarayan Pandey and Pooja Sharma and Yuefeng Yin and Nikhil Medhekar and Saurabh Lodha},
  journal= {arXiv preprint arXiv:2304.13154},
  year   = {2023}
}

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