We report on the development of new 3D pixel sensors for the Phase 2 Upgrades at the High-Luminosity LHC (HL-LHC). To cope with the requirements of increased pixel granularity (e.g., 50x50 or 25x100 um2 pixel size) and extreme radiation hardness (up to a fluence of 2e16 neq cm-2), thinner 3D sensors (~100 um) with electrodes having narrower size (~ 5 um) and reduced spacing (~ 30 um) are considered. The paper covers TCAD simulations, as well as technological and design aspects relevant to the first batch of these 3D sensors, that is currently being fabricated at FBK on 6-inch wafers.
@article{arxiv.1612.00608,
title = {Development of New 3D Pixel Sensors for Phase 2 Upgrades at LHC},
author = {Gian-Franco Dalla Betta and Maurizio Boscardin and Roberto Mendicino and Sabina Ronchin and DMS Sultan and Nicola Zorzi},
journal= {arXiv preprint arXiv:1612.00608},
year = {2016}
}
Comments
4 pages, 8 figures, 2015 IEEE Nuclear Science Symposium and Medical Imaging Conference