English

Chip-level CMP Modeling and Smart Dummy for HDP and Conformal CVD Films

Computational Engineering, Finance, and Science 2007-05-23 v1
Authors: George Yong Liu , Ray F. Zhang , Kelvin Hsu , Lawrence Camilletti
View on arXiv ↗ PDF ↗

Abstract

Chip-level CMP modeling is investigated to obtain the post-CMP film profile thickness across a die from its design layout file and a few film deposition and CMP parameters. The work covers both HDP and conformal CVD film. The experimental CMP results agree well with the modeled results. Different algorithms for filling of dummy structure are compared. A smart algorithm for dummy filling is presented, which achieves maximal pattern-density uniformity and CMP planarity.

Cite

@article{arxiv.cs/0011014,
  title  = {Chip-level CMP Modeling and Smart Dummy for HDP and Conformal CVD Films},
  author = {George Yong Liu and Ray F. Zhang and Kelvin Hsu and Lawrence Camilletti},
  journal= {arXiv preprint arXiv:cs/0011014},
  year   = {2007}
}

Comments

10 pages, 7 figures; for used software, see http://www.cmptechnology.com/

Related papers

View all related →
Machine Learning · Computer Science
Full-chip CMP modelling based on Fully Convolutional Network leveraging White Light Interferometry
Jules Exbrayat, Renan Bouis, Elie Sezestre, Viorel Balan +3
2026-05-07
Computer Vision and Pattern Recognition · Computer Science
CuMPerLay: Learning Cubical Multiparameter Persistence Vectorizations
Caner Korkmaz, Brighton Nuwagira, Barış Coşkunuzer, Tolga Birdal
2025-10-15
Computer Vision and Pattern Recognition · Computer Science
Colorimetric Calibration of a Digital Camera
Renata Rychtarikova, Pavel Soucek, Dalibor Stys
2017-08-17
Hardware Architecture · Computer Science
3D Cache Hierarchy Optimization
Leonid Yavits, Amir Morad, Ran Ginosar
2013-11-08
Applied Physics · Physics
Chemical Mechanical Planarization for Ta-based Superconducting Quantum Devices
Ekta Bhatia, Soumen Kar, Jakub Nalaskowski, Tuan Vo +8
2023-04-11
Computer Vision and Pattern Recognition · Computer Science
HCPM: Hierarchical Candidates Pruning for Efficient Detector-Free Matching
Ying Chen, Yong Liu, Kai Wu, Qiang Nie +4
2024-03-20
Optics · Physics
Complex Coupled Mode theory (C-CMT) of planar multilayer waveguides
Shahram Moradi
2020-01-06
Instrumentation and Detectors · Physics
Capacitances in micro-strip detectors: a conformal mapping approach
Paolo Walter Cattaneo
2010-02-18
Computer Vision and Pattern Recognition · Computer Science
Deep Matching Prior: Test-Time Optimization for Dense Correspondence
Sunghwan Hong, Seungryong Kim
2021-12-16
Image and Video Processing · Electrical Eng. & Systems
Deep Learning-enabled Spatial Phase Unwrapping for 3D Measurement
Xiaolong Luo, Wanzhong Song, Songlin Bai, Yu Li +1
2023-03-14
Applied Physics · Physics
Machine learning and high-throughput robust design of P3HT-CNT composite thin films for high electrical conductivity
Daniil Bash, Yongqiang Cai, Vijila Chellappan, Swee Liang Wong +15
2020-11-23
Computer Vision and Pattern Recognition · Computer Science
Fully-Trainable Deep Matching
James Thewlis, Shuai Zheng, Philip H. S. Torr, Andrea Vedaldi
2016-09-13
Computer Vision and Pattern Recognition · Computer Science
Towards Interpretable Deep Metric Learning with Structural Matching
Wenliang Zhao, Yongming Rao, Ziyi Wang, Jiwen Lu +1
2021-08-13
Computer Vision and Pattern Recognition · Computer Science
Weakly Supervised Complementary Parts Models for Fine-Grained Image Classification from the Bottom Up
Weifeng Ge, Xiangru Lin, Yizhou Yu
2019-03-08
Computer Vision and Pattern Recognition · Computer Science
Rethinking Fully Convolutional Networks for the Analysis of Photoluminescence Wafer Images
Maike Lorena Stern, Hans Lindberg, Klaus Meyer-Wegener
2020-03-03
Programming Languages · Computer Science
CI/CD Efforts for Validation, Verification and Benchmarking OpenMP Implementations
Aaron Jarmusch, Felipe Cabarcas, Swaroop Pophale, Andrew Kallai +5
2024-08-22
Computer Vision and Pattern Recognition · Computer Science
An Adaptive Sampling Scheme to Efficiently Train Fully Convolutional Networks for Semantic Segmentation
Lorenz Berger, Eoin Hyde, M. Jorge Cardoso, Sebastien Ourselin
2017-12-25
Machine Learning · Computer Science
Exact Optimization of Conformal Predictors via Incremental and Decremental Learning
Giovanni Cherubin, Konstantinos Chatzikokolakis, Martin Jaggi
2021-10-06
Hardware Architecture · Computer Science
Evaluating Cache Coherent Shared Virtual Memory for Heterogeneous Multicore Chips
Blake A. Hechtman, Daniel J. Sorin
2013-10-30
Computer Vision and Pattern Recognition · Computer Science
CDPM: Convolutional Deformable Part Models for Semantically Aligned Person Re-identification
Kan Wang, Changxing Ding, Stephen J. Maybank, Dacheng Tao
2019-12-16
Artificial Intelligence · Computer Science
CLP-based protein fragment assembly
Alessandro Dal Palu', Agostino Dovier, Federico Fogolari, Enrico Pontelli
2010-08-02
Computer Vision and Pattern Recognition · Computer Science
Robust pose tracking with a joint model of appearance and shape
Yuliang Guo, Lakshmi Narasimhan Govindarajan, Benjamin Kimia, Thomas Serre
2018-06-29
Materials Science · Physics
Multimodal Machine Learning for Integrating Heterogeneous Analytical Systems
Shun Muroga, Hideaki Nakajima, Taiyo Shimizu, Kazufumi Kobashi +1
2026-02-03
Computer Vision and Pattern Recognition · Computer Science
AdaCBM: An Adaptive Concept Bottleneck Model for Explainable and Accurate Diagnosis
Townim F. Chowdhury, Vu Minh Hieu Phan, Kewen Liao, Minh-Son To +4
2024-08-06
Graphics · Computer Science
Temporal Upsampling of Depth Maps Using a Hybrid Camera
Ming-Ze Yuan, Lin Gao, Hongbo Fu, Shihong Xia
2018-11-06
R2 v1 2026-07-22T12:18:32.001Z