English

Ab-initio simulations on growth and interface properties of epitaxial oxides on silicon

Materials Science 2007-05-23 v1

Abstract

The replacement of SiO2 by so-called high-k oxides is one of the major challenges for the semiconductor industry to date. Based on electronic structure calculations and ab-initio molecular dynamics simulations, we are able to provide a consistent picture of the growth process of a class of epitaxial oxides around SrO and SrTiO3. The detailed understanding of the interfacial binding principles has also allowed us to propose a way to engineer the band-offsets between the oxide and the silicon substrate.

Keywords

Cite

@article{arxiv.cond-mat/0504256,
  title  = {Ab-initio simulations on growth and interface properties of epitaxial oxides on silicon},
  author = {Clemens J. Foerst and Christopher R. Ashman and Karlheinz Schwarz and Peter E. Bloechl},
  journal= {arXiv preprint arXiv:cond-mat/0504256},
  year   = {2007}
}

Comments

6 pages, 6 figures, proceeding for the INFOS2005 conference (http://www.imec.be/infos/)