Three-dimensional MEMS magnetometers with use of residual stresses in thin multilayers cantilevers are presented. Half-loop cantilevers based on Lorentz-force deflection convert magnetic flux in changes, thanks to piezoresistive transducers mounted in Wheatstone bridge. Magnetic field in the order of 10 Gauss was measured with a sensitivity of 0.015 mV/Gauss. A Finite Element Model of the device has been developed with Ansys for static and dynamic simulations. Novel out-of-plane ferromagnetic nickel plate magnetometer is also presented.
@article{arxiv.0802.3077,
title = {Out-of-Plane Cmos Compatible Magnetometers},
author = {M. El Ghorba and N. André and S. Sobieski and J. -P. Raskin},
journal= {arXiv preprint arXiv:0802.3077},
year = {2008}
}
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