English

LNoS: Lithium Niobate on Silicon Spatial Light Modulator

Optics 2024-02-23 v1 Applied Physics Instrumentation and Detectors

Abstract

Programmable spatiotemporal control of light is crucial for advancements in optical communications, imaging, and quantum technologies. Commercial spatial light modulators (SLMs) typically have megapixel-scale apertures but are limited to ~kHz operational speeds. Developing a device that controls a similar number of spatial modes at high speeds could potentially transform fields such as imaging through scattering media, quantum computing with cold atoms and ions, and high-speed machine vision, but to date remains an open challenge. In this work we introduce and demonstrate a free-form, resonant electro-optic (EO) modulator with megapixel apertures using CMOS integration. The optical layer features a Lithium Niobate (LN) thin-film integrated with a photonic crystal (PhC), yielding a guided mode resonance (GMR) with a Q-factor>1000, a field overlap coefficient ~90% and a 1.6 GHz 3-dB modulation bandwidth (detector limited). To realize a free-form and scalable SLM, we fabricate the PhC via interference lithography and develop a procedure to bond the device to a megapixel CMOS backplane. We identify limitations in existing EO materials and CMOS backplanes that must be overcome to simultaneously achieve megapixel-scale, GHz-rate operation. The `LN on Silicon' (LNoS) architecture we present is a blueprint towards realizing such devices.

Keywords

Cite

@article{arxiv.2402.14608,
  title  = {LNoS: Lithium Niobate on Silicon Spatial Light Modulator},
  author = {Sivan Trajtenberg-Mills and Mohamed ElKabbash and Cole J. Brabec and Christopher L. Panuski and Ian Christen and Dirk Englund},
  journal= {arXiv preprint arXiv:2402.14608},
  year   = {2024}
}
R2 v1 2026-06-28T14:57:13.106Z