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Chromium Self-Traceable Length Standard: Investigating Geometry and Diffraction for Length Traceability Chain

Instrumentation and Detectors 2023-06-27 v1 Optics

Abstract

Natural constant-based metrology methods offer an effective approach to achieving traceability in nanometric measurements. The Cr grating, fabricated by atom lithography and featuring a pitch of d=212.7705±0.0049 nmd=212.7705\pm0.0049~{\rm nm} traceable to the Cr transition frequency 7S3^{7}S_{3} \rightarrow 7P40^{7}P_{4}^{0}, demonstrates potential as a self-traceable length standard in nano-length metrology by grating interferometer. This research aims to analyze and engineer the diffraction characteristics that enhance the Cr grating as a self-traceable length standard within the length traceability chain based on the Cr transition frequency. Accordingly, we investigate the geometric morphology and diffraction characteristics of the Cr grating, analyzes the influence of the grating's polarization-sensitive characteristics on the Littrow configuration grating interferometer, and establishes the criteria for Cr grating fabrication. Experimentally, we fabricate an expanded Cr grating by scanning atom lithography, characterize its diffraction performance, and conduct preliminary verification of length measurement in a self-traceable grating interferometer. This work adheres to the international trend of flattened metrology development, offering a valuable reference for advancing subsequent metrological technologies throughout the new traceability chain.

Keywords

Cite

@article{arxiv.2306.14083,
  title  = {Chromium Self-Traceable Length Standard: Investigating Geometry and Diffraction for Length Traceability Chain},
  author = {Zichao Lin and Yulin Yao and Zhangning Xie and Dongbai Xue and Tong Zhou and Zhaohui Tang and Lihua Lei and Tao Jin and Xiong Dun and Xiao Deng and Xinbin Cheng and Tongbao Li},
  journal= {arXiv preprint arXiv:2306.14083},
  year   = {2023}
}

Comments

14 pages, 14 figures, 1 table

R2 v1 2026-06-28T11:13:37.933Z