We report on the development of multi-beam RF linear ion accelerators that are formed from stacks of low cost wafers and describe the status of beam power scale-up using an array of 120 beams. The total argon ion current extracted from the 120-beamlet extraction column was 0.5 mA. The measured energy gain in each RF gap reached as high as 7.25 keV. We present a path of using this technology to achieve ion currents >1 mA and ion energies >100 keV for applications in materials processing.
@article{arxiv.2105.10611,
title = {Beam power scale-up in MEMS based multi-beam ion accelerators},
author = {Q. Ji and K. K. Afridi and T. Bauer and G. Giesbrecht and Y. Hou and A. Lal and D. Ni and A. Persaud and Z. Qin and P. Seidl and S. Sinha and T. Schenkel},
journal= {arXiv preprint arXiv:2105.10611},
year = {2022}
}