English
Related papers

Related papers: Computation of Electrostatic Properties of 3D MEMS…

200 papers

Micro-Electro-Mechanical Systems (MEMS) normally have fixed or moving structures (plates or array of thin beams) with cross-sections of the order of microns and lengths of the order of tens or hundreds of microns. Electrostatic forces play…

Computational Physics · Physics 2007-05-23 N. Majumdar , S. Mukhopadhyay

Efficient design and performance of electrically actuated MEMS devices necessitate accurate estimation of electrostatic forces on the MEMS structures. This in turn requires thorough study of the capacitance of the structures and finally the…

Computational Physics · Physics 2007-05-23 N. Majumdar , S. Mukhopadhyay

Micro-Electro-Mechanical Systems (MEMS) comb drives are used for both as sensors and actuators. As a result, they have been considered to be very important in MEMS technology and has been under intense study for last few years. The…

Computational Physics · Physics 2007-05-23 S. Mukhopadhyay , N. Majumdar

The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices in which electric as well as mechanical and fluid phenomena…

Other Computer Science · Computer Science 2007-11-29 V. Rochus , J. -C. Golinval , C. Louis , C. Mendez , I. Klapka

This paper is a computational bifurcation analysis of a non-linear partial differential equation (PDE) characterizing equilibrium configurations in Micro electromechanical Systems (MEMS). MEMS are engineering systems that utilize…

Dynamical Systems · Mathematics 2024-01-24 Charles Naudet , Alan E. Lindsay

The structure and function of biological molecules are strongly influenced by the water and dissolved ions that surround them. This aqueous solution (solvent) exerts significant electrostatic forces in response to the biomolecule's…

Numerical Analysis · Mathematics 2015-12-29 Matthew G. Knepley , Jaydeep P. Bardhan

Microelectromechanical systems (MEMS) can offer a competitive alternative for conventional technology in electrical precision measurements. This article summarises recent work in development of MEMS solutions for electrical metrology.…

Instrumentation and Detectors · Physics 2007-07-05 Antti Manninen , Anu Karkkainen , Nadine Pesonen , Aarne Oja , Heikki Seppa

This paper introduces an accurate edge-based smoothed finite element method (ES-FEM) for electromagnetic analysis for both two dimensional cylindrical and three dimensional cartesian systems, which shows much better performance in terms of…

Computational Engineering, Finance, and Science · Computer Science 2019-10-30 Yangfan Zhang , Pengfei Wang , Wenping Li , Shunchuan Yang

An idealized electrostatically actuated microelectromechanical system (MEMS) involving an elastic plate with a heterogeneous dielectric material is considered. Starting from the electrostatic and mechanical energies, the governing evolution…

Analysis of PDEs · Mathematics 2017-07-06 Philippe Laurencot , Christoph Walker

Non-linearities play an important role in micro- and nano- electromechanical system (MEMS and NEMS) design. In common electrostatic and magnetic actuators, the forces and voltages can depend in a non-linear way on position, charge, current…

Mesoscale and Nanoscale Physics · Physics 2013-08-14 Peter G. Steeneken , Jiri Stulemeijer

Well-posedness of a free boundary problem for electrostatic microelectromechanical systems (MEMS) is investigated when nonlinear bending effects are taken into account. The model describes the evolution of the deflection of an electrically…

Analysis of PDEs · Mathematics 2014-09-26 Philippe Laurencot , Christoph Walker

This work focuses on model preparation for electrostatic simulations of CAD designs to realize a rapid virtual prototyping concept. We present a boundary element method (BEM) allowing discontinuous fields between surfaces. The corresponding…

Computational Engineering, Finance, and Science · Computer Science 2024-12-13 Benjamin Marussig , Thomas Rüberg , Jürgen Zechner , Lars Kielhorn , Thomas-Peter Fries

Microelectromechanical systems (MEMS) technologies are developing rapidly with increasing study of the design, fabrication and commercialization of microscale systems and devices. Accurate mechanical properties are important for successful…

Other Computer Science · Computer Science 2007-11-29 Ming-Tzer Lin , Chi-Jia Tong , Chung-Hsun Chiang

The boundary element method (BEM) enables solving three-dimensional electromagnetic problems using a two-dimensional surface mesh, making it appealing for applications ranging from electrical interconnect analysis to the design of…

Numerical Analysis · Mathematics 2021-12-14 Shashwat Sharma , Piero Triverio

Scanning transmission electron microscopy (STEM) has advanced rapidly in the last decade thanks to the ability to correct the major aberrations of the probe forming lens. Now atomic-sized beams are routine, even at accelerating voltages as…

The Boundary Element Method (BEM) is a powerful numerical approach for solving 3D elastostatic problems, particularly useful for crack propagation in fracture mechanics and half-space problems. A key challenge in BEM lies in handling…

Numerical Analysis · Mathematics 2025-10-30 Vibudha Lakshmi Keshava , Martin Schanz

A common way to analyze electrostatic microelectromechanical systems (MEMS) actuators is to use their energy-displacement landscape. Here, we describe an alternative approach to analyze electrostatic MEMS actuators using their energy-charge…

Applied Physics · Physics 2020-10-26 Raghuram Tattamangalam Raman , Arvind Ajoy , Revathy Padmanabhan

Electrical machines commonly consist of moving and stationary parts. The field simulation of such devices can be very demanding if the underlying numerical scheme is solely based on a domain discretization, such as in case of the Finite…

Computational Engineering, Finance, and Science · Computer Science 2017-09-18 Lars Kielhorn , Thomas Rüberg , Jürgen Zechner

Electrostatic actuators are simple but important switching devices for MEMS applications. Due to the difficulties associated with the electrostatic nonlinearity, precise mathematical description is often hard to obtain for the dynamics of…

Dynamical Systems · Mathematics 2012-01-27 Yisong Yang , Ruifeng Zhang , Le Zhao

This paper concerns the experimental validation of some mathematical models previously developed by the authors, to predict the static behaviour of microelectrostatic actuators, basically free-clamped microbeams. This layout is currently…

Other Computer Science · Computer Science 2008-02-22 A. Ballestra , E. Brusa , M. G. Munteanu , A. Soma
‹ Prev 1 2 3 10 Next ›