Related papers: Extreme Ultraviolet (EUV) Sources for Lithography …
High-order harmonics generation (HHG) is the only process that enables table-top-size sources of extreme-ultraviolet (XUV) light. The HHG process typically involves light interactions with gases or plasma-material phases that hinder wider…
Ptychographic extreme ultraviolet (EUV) diffractive imaging has emerged as a promising candidate for the next-generation metrology solutions in the semiconductor industry, as it can image wafer samples in reflection geometry at the…
To generate laser with short wavelength is a bottle-neck problem in laser technology. The extreme ultraviolet (EUV) lasers are usually produced with low efficiency by nonlinear multi-photon process. Here we show the generation of 58.4 nm…
We present a novel design for an ultra-compact, passive light source capable of generating ultraviolet and X-ray radiation, based on the interaction of free electrons with the magnetic near-field of a ferromagnet. Our design is motivated by…
EUV Lithography is the technology of choice for High-Volume Manufacturing (HVM) of sub-10nm lithography. One of the challenges is to enable in-situ cleaning of functional surfaces such as sensors, fiducials and interferometer mirrors…
We report experimental results of vacuum ultraviolet (VUV) emission from the plasma of an electron cyclotron resonance (ECR) discharge in hydrogen, sustained by powerful millimeter-wavelength radiation of a gyrotron. Distinctive features of…
Using the illuminator for high numerical aperture (NA) extreme ultraviolet (EUV) exposure tool in EUV lithography can lead to support volume production of sub-2 nm logic nodes and leading-edge DRAM nodes. However, the typical design method…
Synchrotron light sources can provide the required spatial coherence, stability and control that is required to support the development of advanced lithography at the extreme ultraviolet and soft X-ray wavelengths that are relevant to…
Despite much observational and theoretical effort little is presently known about the nature of the luminous non-nuclear X-ray sources which appear to largely surpass the Eddington limit of a few solar masses. Here we present first results…
We study the prompt phase of low-luminosity Gamma-Ray Bursts (ll-GRBs) as potential source of very-high-energy (VHE) gamma rays and Ultra-High-Energy Cosmic Rays (UHECRs). Within the internal shock model we choose parameters for the…
High-repetition-rate, fully coherent extreme-ultraviolet (EUV) and X-ray free-electron lasers (FELs) are essential for advanced time-resolved ultrafast spectroscopies. While external seeding serves as the standard technique to achieve…
We propose and demonstrate that a gamma-gamma collider with W_gg < 12 GeV can be added to the European XFEL with a minimal disruption to its main program. High-energy photons will be obtained by Compton scattering of 0.5 micron laser…
We demonstrate by numerical flux calculations that neutrino beams producing the observed highest energy cosmic rays by weak interactions with the relic neutrino background require a non-uniform distribution of sources. Such sources have to…
A major prediction of most super-Eddington accretion theories is the presence of anisotropic emission from supercritical disks, but the degree of anisotropy and its dependency with energy remain poorly constrained observationally. A key…
We present the experimental realization of spectrally tunable, ultrashort, quasi-monochromatic extreme ultraviolet (XUV) pulses generated at 100 kHz repetition rate in a user-oriented gas high harmonic generation (GHHG) beamline of the…
Very high energy (VHE; $E \geq$ 100GeV) $\gamma-$ray from cosmological distances are attenuated by the extragalactic background light (EBL) in the IR to UV band. By contrasting measured versus intrinsic emission, the EBL photon density can…
We have re-examined the most luminous X-ray sources in the starburst galaxy NGC 4631, using XMM-Newton, Chandra and ROSAT data. The most interesting source is a highly variable supersoft ULX. We suggest that its bolometric luminosity ~ a…
The temporal resolution of MeV ultrafast electron diffraction (UED) is fundamentally constrained by the electron bunch length at the sample, motivating the development of new electron sources capable of producing femtosecond scale bunches.…
The Xenon-Argon Technology (X-ArT) collaboration presents a study on the dynamics of pure and xenon-doped liquid argon (LAr) scintillation. Using two types of silicon photomultipliers sensitive to different wavelength ranges, we provide…
Ultrahigh-energy gamma rays ($E_{\gamma}>100 \, {\rm TeV}$) have been detected from a handful of astrophysical sources. Due to the Klein-Nishina suppression of inverse Compton scattering at such high energies, it has sometimes been argued…