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We have designed and characterized micro-electro-mechanical systems (MEMS) for applications at low temperatures. The mechanical resonators were fabricated using a surface micromachining process. The devices consist of a pair of parallel…

Mesoscale and Nanoscale Physics · Physics 2013-01-24 M. Gonzalez , P. Zheng , E. Garcell , Y. Lee , H. B. Chan

Microelectromechanical systems (MEMS) resonators serve as frequency selective components in applications ranging from biology to communications. In this paper, the dynamic behavior of an RF MEMS disk resonator is formulated using an…

Mesoscale and Nanoscale Physics · Physics 2016-12-07 Hamid T. Chorsi , Meysam T. Chorsi , Stephen D. Gedney

Scanning tunneling microscopy (STM) and micro-electromechanical systems (MEMS) have traditionally addressed vastly different length scales - one resolving atoms, the other engineering macroscopic motion. Here we unite these two fields to…

Mesoscale and Nanoscale Physics · Physics 2026-01-09 R. J. G. Elbertse , M. Xu , A. Keşkekler , S. Otte , R. A. Norte

Microelectromechanical systems (MEMS) can offer a competitive alternative for conventional technology in electrical precision measurements. This article summarises recent work in development of MEMS solutions for electrical metrology.…

Instrumentation and Detectors · Physics 2007-07-05 Antti Manninen , Anu Karkkainen , Nadine Pesonen , Aarne Oja , Heikki Seppa

Over the past few years, microelectromechanical system (MEMS) based on-chip resonators have shown significant potential for sensing and high frequency signal processing applications. This is due to their excellent features like small size,…

Other Computer Science · Computer Science 2013-01-15 Joydeep Basu , Tarun Kanti Bhattacharyya

Energy dissipation is an unavoidable phenomenon of physical systems that are directly coupled to an external environmental bath. The ability to engineer the processes responsible for dissipation and coupling is fundamental to manipulate the…

Classical Physics · Physics 2017-06-28 Changyao Chen , Damián H. Zanette , David Czaplewski , Steven Shaw , Daniel López

Microelectromechanical system (MEMS) based on-chip resonators offer great potential for sensing and high frequency signal processing applications due to their exceptional features like small size, large frequency-quality factor product,…

Other Computer Science · Computer Science 2012-02-15 Ritesh Ray Chaudhuri , Joydeep Basu , Tarun Kanti Bhattacharyya

The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices in which electric as well as mechanical and fluid phenomena…

Other Computer Science · Computer Science 2007-11-29 V. Rochus , J. -C. Golinval , C. Louis , C. Mendez , I. Klapka

For the numerical simulations of physical and mechanical behaviors of materials at the micro-nano scale, a coupled model with the effect of local quantum is presented in this paper. Unlike traditional methods, the transition region is not…

Materials Science · Physics 2014-07-03 Tiansi Han , Junzhi Cui

Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the…

Applied Physics · Physics 2023-03-22 Daehun Lee , Shahin Jahanbani , Jack Kramer , Ruochen Lu , Keji Lai

Micro-Electro-Mechanical Systems (MEMS) normally have fixed or moving structures with cross-sections of the order of microns ($\mu m$) and lengths of the order of tens or hundreds of microns. These structures are often plates or array of…

Computational Physics · Physics 2007-05-23 N. Majumdar , S. Mukhopadhyay

Atomistic-continuum multiscale modelling is becoming an increasingly popular tool for simulating the behaviour of materials due to its computational efficiency and reliable accuracy. In the case of ferromagnetic materials, the atomistic…

Computational Physics · Physics 2019-02-01 Doghonay Arjmand , Mikhail Poluektov , Gunilla Kreiss

Studying the dynamical behavior of micro- and nano-mechanical systems (MEMS and NEMS) is essential in various fields from nonlinear dynamics to quantum technologies. Hence, it is important to be able to precisely monitor the mechanical…

Optics · Physics 2025-12-09 Agnes Zinth , Samer Houri , Menno Poot

This paper presents a detailed noise analysis and a noise-based optimization procedure for resonant MEMS structures. A design for high sensitivity of MEMS structures needs to take into account the noise shaping induced by damping phenomena…

Other Computer Science · Computer Science 2008-12-18 Mrigank Sharma , Akila Kannan , Edmond Cretu

We present a multiscale modeling approach that concurrently couples quantum mechanical, classical atomistic and continuum mechanics simulations in a unified fashion for metals. This approach is particular useful for systems where chemical…

Materials Science · Physics 2009-11-11 Gang Lu , E. B. Tadmor , Efthimios Kaxiras

Due to the rapid growth in demand for power for sensing devices located in remote locations, scientists' attention has been drawn to vibration energy harvesting as an alternative to batteries. As a result of over two decades of micro-scale…

Instrumentation and Detectors · Physics 2018-05-15 Masoud Derakhshani , Brian E. Allgeier , Thomas A. Berfield

This paper is a computational bifurcation analysis of a non-linear partial differential equation (PDE) characterizing equilibrium configurations in Micro electromechanical Systems (MEMS). MEMS are engineering systems that utilize…

Dynamical Systems · Mathematics 2024-01-24 Charles Naudet , Alan E. Lindsay

Microelectromechanical systems (MEMS) that require contact of moving parts to implement complex functions exhibit limits to their performance and reliability. Here, we advance our particle tracking method to measure MEMS motion in operando…

Applied Physics · Physics 2018-11-21 Craig R. Copeland , Craig D. McGray , Jon Geist , Samuel M. Stavis

Very small electromechanical coupling coefficient in micro-electromechanical systems (MEMS) or acoustic resonators is quite of a concern for oscillator performance, specially at mmWave frequencies. This small coefficient is the…

Signal Processing · Electrical Eng. & Systems 2020-05-15 Abhishek Srivastava , Baibhab Chatterjee , Udit Rawat , Yanbo He , Dana Weinstein , Shreyas Sen

This work presents the mathematical modeling and numerical investigation of a thermo-controlled Micro-Electro-Mechanical System (MEMS) obtained by coupling an HP memristor with mechanical and electrical resonators. Using the linear drift HP…

Chaotic Dynamics · Physics 2026-05-29 N. G. Koudafokê , Thierry Njougouo , Hilda A. Cerdeira , C. H. Miwadinou
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