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Electron beam induced deposition (EBID) currently provides the only direct writing technique for truly three-dimensional nanostructures with geometrical features below 50 nm. Unfortunately, the depositions from metal-organic precursors…

Nanogranular material systems are promising for a variety of applications in research and development. Their physical properties are often determined by grain sizes, shapes, mutual distances and by the chemistry of the embedding matrix With…

Materials Science · Physics 2021-01-11 Cornelia Trummer , Robert Winkler , Harald Plank , Gerald Kothleitner , Georg Haberfehlner

The growth of iron-containing nanostructures in the process of focused electron beam-induced deposition (FEBID) of Fe(CO)$_5$ is studied by means of atomistic irradiation-driven molecular dynamics (IDMD) simulations. The geometrical…

Materials Science · Physics 2023-09-06 Alexey Prosvetov , Alexey V. Verkhovtsev , Gennady Sushko , Andrey V. Solov'yov

This study introduces a novel method for the deterministic fabrication of metallic nanostructures with controlled geometry and composition on suspended, single mode tapered optical nanofibers (TNFs) using a tailored Blurred Electron Beam…

We report on a nanomechanical engineering method to monitor matter growth in real time via e-beam electromechanical coupling. This method relies on the exceptional mass sensing capabilities of nanomechanical resonators. Focused electron…

Plasmonic nanoparticles influence the absorption and emission processes of nearby emitters due to local enhancements of the illuminating radiation and the photonic density of states. Here, we use the plasmon resonance of metal nanoparticles…

Recent advances in nanotechnology have created the need to manufacture three-dimensional nanostructures with controlled material composition. Focused Electron Beam Induced Deposition (FEBID) is a nanoprinting technique offering highest…

Mesoscale and Nanoscale Physics · Physics 2025-09-30 Jakub Jurczyk , Leo Brockhuis , Amalio Fernández-Pacheco , Ivo Utke

This paper presents a detailed computational protocol for atomistic simulation of the formation and growth of metal-containing nanostructures during the Focused Electron Beam Induced Deposition (FEBID) process. The protocol is based upon…

Chemical Physics · Physics 2023-09-06 Alexey Prosvetov , Alexey V. Verkhovtsev , Gennady B. Sushko , Andrey V. Solov'yov

Focused electron beam induced deposition (FEBID) is a powerful technique for 3D-printing of complex nanodevices. However, for resolutions below 10 nm, it struggles to control size, morphology and composition of the structures, due to a lack…

The shape of metal nanoparticles embedded in dielectric matrices influences the optical properties of the composite material. Swift heavy ion irradiation can induce a controllable shape transformation in gold and other metals embedded in…

Materials Science · Physics 2022-04-22 Aleksi A. Leino , Ville E. Jantunen , Flyura Djurabekova

This work presents characterization of focused ion beam induced deposition (FIBID) of platinum using both rubidium and gallium ions. Under similar beam energies, 8.5 keV for Rb$^+$ and 8.0 keV for Ga$^+$, and beam current near 10 pA, the…

Applied Physics · Physics 2023-07-05 Yang Li , Sheng Xu , Meltem Sezen , Feray Bakan Misirlioglu , Edgar Vredenbregt

Limited process control can cause metallurgical defect formation and inhomogeneous relative density in laser powder bed fusion manufactured parts. In this study, cylindrical 15-5 PH stainless steel specimens are investigated by computer…

Computational Engineering, Finance, and Science · Computer Science 2022-01-28 Jorrit Voigt , Thomas Bock , Uwe Hilpert , Ralf Hellmann , Michael Moeckel

A model of an electron-beam-plasma system is introduced to model the electrical breakdown physics of low-pressure nitrogen irradiated by an intense pulsed electron beam. The rapidly rising beam current induces an electric field which drives…

In situ plasma etching is a common method to prepare diamond substrates for epitaxial overgrowth to effectuate higher quality. However, there is no practical, direct, qualitative method established so far to assess the performance of the…

Materials Science · Physics 2021-06-16 J. Langer , V. Cimalla , M. Prescher , J. Ligl , B. Tegetmeyer , C. Schreyvogel , O. Ambacher

We investigate the fabrication of electrical contacts using ion- and electron-beam induced deposition of platinum at the sub-\mu m scale. Halos associated with the metal surface decoration are characterized electrically in the 0.05-2 \mu m…

Mesoscale and Nanoscale Physics · Physics 2011-06-07 D. Brunel , D. Troadec , D. Hourlier , D. Deresmes , M Zdrojek , T. Mélin

The development of modern metal deposition techniques like Focused Ion/Electron Beam Induced Deposition FIBID/FEBID relies heavily on the availability of metal-organic precursors of particular properties. To create a new precursor,…

Mesoscale and Nanoscale Physics · Physics 2025-11-06 Benedykt R. Jany , Katarzyna Madajska , Aleksandra Butrymowicz-Kubiak , Franciszek Krok , Iwona B. Szymańska

Nitrogen doping treatment with the subsequent electropolishing (EP) of the niobium superconducting cavity can significantly increase the cavity's quality factor up to a factor of 3. But the process of the EP removal may reintroduce hydrogen…

Accelerator Physics · Physics 2015-08-27 Ziqin Yang , Xiangyang Lu , Datao Xie , Lin Lin , Kui Zhou , Jifei Zhao , Deyu Yang , Weiwei Tan

We investigated the electrical conductivity of platinum nanowires with heights ranging from 2 nm to 200 nm, deposited by focused electron beam induced deposition (FEBID). Post-deposition processing was employed to enhance the electrical…

Mesoscale and Nanoscale Physics · Physics 2026-01-21 Rajendra Rai , Ujjwal Dhakal , Binod DC , Yoichi Miyahara

The activity and stability of a platinum nanoparticle (NP) is not only affected by its size but additionally depends on its shape. To this end, simulations can identify structure-property relationships to make a priori decisions on the most…

Chemical Physics · Physics 2022-03-25 Björn Kirchhoff , Christoph Jung , Hannes Jónsson , Donato Fantauzzi , Timo Jacob

Focused electron beam induced deposition (FEBID) is an additive manufacturing technique uniquely suited for fabricating nanoscale 3D prototypes for a range of applications, including spintronic devices. However, the variation of growth…

Mesoscale and Nanoscale Physics · Physics 2026-05-15 Aurys Silinga , Keir Edgar , Stephen McVitie , Kayla Fallon , András Kovács , Rafal E. Dunin-Borkowski , Trevor P. Almeida
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